Micro mirror unit and method of making the same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7145712
SERIAL NO

10962445

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A micro mirror unit includes a moving part carrying a mirror portion, a frame and torsion bars connecting the moving part to the frame. The moving part, the frame and the torsion bars are formed integral from a material substrate. The frame includes a portion thicker than the moving part.

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Patent Owner(s)

Patent OwnerAddress
DRNC HOLDINGS INC200 BELLEVUE PARKWAY SUITE 300 WILMINGTON DE 19809

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kouma, Norinao Kawasaki, JP 56 420
Mizuno, Yoshihiro Kawasaki, JP 93 769
Okuda, Hisao Kawasaki, JP 47 573
Sawaki, Ippei Kawasaki, JP 50 634
Soneda, Hiromitsu Kawasaki, JP 61 508
Tsuboi, Osamu Kawasaki, JP 109 751
Ueda, Satoshi Kawasaki, JP 270 3234
Yamagishi, Fumio Kawasaki, JP 56 1580

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