Surface acoustic wave device having improved performance and method of making the device
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United States of America Patent
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Dec 12, 2006
Grant Date -
Aug 7, 2003
app pub date -
Feb 1, 2002
filing date -
Feb 1, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A surface acoustic wave device includes a transducer electrode formed on a substrate. In one aspect, the electrode has a plurality of layers. At least one of the layers is metal and another of the layers is a material for providing a hardening effect to the metal layer by reinforcement with Al.sub.2O.sub.3 precipitates. In another aspect, the electrode is electrically connected to a metal component that permits electrical connection of the surface acoustic wave device to an electrical device external to the surface acoustic wave device. The electrode has a metal portion of a first metallization. The component is of a second, different metallization. In other aspects, the surface acoustic wave device is made via a method to have such structural aspects.
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