Method and device for non-destructive analysis of perforations in a material
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United States of America Patent
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Dec 12, 2006
Issued Date -
N/A
app pub date -
Aug 14, 2003
filing date -
Jun 10, 1999
priority date (Note) -
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status (Latency Note)
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Abstract
Method for fabricating and inspecting small holes in a material are disclosed. The method includes directing light onto the material and through the holes formed in the material, and then collecting the light passing through the holes in the material onto a detector. The methods further include analyzing the light for properties of the holes, and modifying the process based these detected properties.
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