Multivariate control of semiconductor processes
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United States of America Patent
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Dec 19, 2006
Grant Date -
May 25, 2006
app pub date -
Sep 16, 2005
filing date -
Sep 17, 2004
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Abstract
A method for detecting a fault condition of a manufacturing process involving acquiring data and developing a model based on a plurality of manufacturing related variables for a plurality of outputs of a manufacturing process. The method also involves identifying which of the manufacturing related variables have a substantial affect on the model for detecting faulty outputs of the manufacturing process. The method also involves updating the model by using the manufacturing related variables identified as having a substantial affect on the model to improve the ability of the model to detect faulty outputs of the manufacturing process.
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