Methods and apparatus for positioning a substrate relative to a support stage
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Dec 19, 2006
Grant Date -
Nov 4, 2004
app pub date -
Feb 19, 2004
filing date -
Feb 20, 2003
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
In a first aspect, a substrate positioning system includes a plurality of pushers arranged in a spaced relation about a stage adapted to support a substrate. Each pusher is adapted to assume a retracted position so as to permit the substrate to be loaded onto and unloaded from the stage, extend toward an edge of the substrate that is supported by the stage, contact the edge of the substrate, and continue extending so as to cause the substrate to move relative to the stage until the substrate is calibrated to the stage. Numerous other aspects are provided.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully