Importance

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Abstract

In an automated guided vehicle including a transfer equipment which transfers a wafer, a buffer cassette which temporarily stores the wafer, and a pressing member which is provided at an opening of the buffer cassette, when traveling the automated guided vehicle, if the pressing member is slid to a center position from an end position of the opening of the buffer cassette to contact and press against the edge of the wafer, the pressing member was easily damaged by being rubbed against a periphery of the wafer, and there was a problem in durability of the pressing member.The pressing member 55 can transfer between a 'pressing' position which contacts against the edge of the wafer 10 to press the wafer 10, and a 'receding' position which is located away from the edge of the wafer 10. A transferring direction A of the pressing member 55 of a moment in which the pressing member 55 contacts against the edge of the wafer 10 when the pressing member 55 transfers from the 'receding' position to the 'pressing' position, is approximately perpendicular to an outline of the part of the wafer 10 contacted against the pressing member 55.

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First Claim