Transmissive spatial light modulator and method of manufacturing the same
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United States of America Patent
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Dec 26, 2006
Grant Date -
Nov 25, 2004
app pub date -
May 20, 2004
filing date -
May 23, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A transmissive spatial light modulator having a light-transmission area, comprises: a transparent substrate; a pixel drive circuit provided on the transparent substrate to form an area other than the light-transmission area; and a transmissive light modulation section including a micro-electromechanical element, the transmissive light modulation section being controlled by the pixel drive circuit and being provided above the pixel drive circuit.
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