Multi-chamber installation for treating objects under vacuum, method for evacuating said installation and evacuation system therefor
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United States of America Patent
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Jan 2, 2007
Grant Date -
Jan 6, 2005
app pub date -
Sep 28, 2002
filing date -
Oct 11, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A multi-chamber installation (1) treats objects under vacuum. An evacuation system (5) is connected to a plurality of chambers (2, 3, 4). To reduce the complexity of the evacuation process, a forepump (5) has several stages (11, 12, 13). Each of said stages is connected to one of the chambers (2, 3, 4).
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