Wire grid polarizer with double metal layers
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United States of America Patent
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Jan 2, 2007
Issued Date -
N/A
app pub date -
Apr 8, 2004
filing date -
Oct 23, 2003
priority date (Note) -
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Abstract
A wire grid polarizer with double metal layers for the visible spectrum. Parallel dielectric layers having a period (p) of 10.about.250 nm and a trench between adjacent dielectric layers overlie a transparent substrate. A first metal layer having a first thickness (d1) of 30.about.150 nm is disposed in the trench. A second metal layer having a second thickness (d2) of 30.about.150 nm and a width (w) overlies on the top surface of each dielectric layer. The first and second metal layers are separated by a vertical distance (l) of 10.about.100 nm. The first thickness (d1) is the same as the second thickness (d2). A ratio of the width (w) to the period (p) is 25.about.75%.
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