US Patent No: 7,161,094

Number of patents in Portfolio can not be more than 2000

Modifying the electro-mechanical behavior of devices

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A MEMS device is packaged with a control material that is included in the package to affect an operation of a moveable element of the device. The control material may affect operational characteristics including actuation and release voltages and currents, mechanical affects including damping and stiffness, lifetime of the device, optical properties, thermal affects and corrosion. The control material may be inserted into the package as part of any of several structural components of the package or the MEMS device.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
QUALCOMM MEMS TECHNOLOGIES, INC.SAN DIEGO, CA640

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chui, Clarence San Mateo, CA 185 7297
Kothari, Manish Redwood City, CA 194 5382
Palmateer, Lauren San Francisco, CA 34 690

Cited Art Landscape

Patent Info (Count) # Cites Year
 
Other [Check patent profile for assignment information] (6)
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4,663,083 Electro-optical dipole suspension with reflective-absorptive-transmissive characteristics 194 1984
5,142,414 Electrically actuatable temporal tristimulus-color device 291 1991
5,500,635 Products incorporating piezoelectric material 329 1994
6,819,469 High-resolution spatial light modulator for 3-dimensional holographic display 263 2003
2005/0001,828 Charge control of micro-electromechanical device 194 2004
 
MEMSCAP S.A. (1)
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Ocean Power Technologies, Inc. (1)
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TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (2)
6,741,384 Control of MEMS and light modulator arrays 235 2003
6,861,277 Method of forming MEMS device 231 2003
 
SAMSUNG ELECTRONICS CO., LTD. (1)
* 7,045,885 Placement of absorbing material in a semiconductor device 13 2004
 
IRIDIGM DISPLAY CORPORATION (1)
2001/0003,487 VISIBLE SPECTRUM MODULATOR ARRAYS 318 1999
 
SANDIA NATIONAL LABORATORIES (2)
6,661,084 Single level microelectronic device package with an integral window 143 2002
6,674,159 Bi-level microelectronic device package with an integral window 221 2002
 
Sandia Corporation (2)
6,392,144 Micromechanical die attachment surcharge 44 2000
6,379,988 Pre-release plastic packaging of MEMS and IMEMS devices 95 2000
 
NORTHROP CORPORATION (1)
5,153,771 Coherent light modulation and detector 193 1990
 
LOCKHEED MARTIN CORPORATION (2)
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5,124,834 Transferrable, self-supporting pellicle for elastomer light valve displays and method for making the same 272 1989
 
TRUSEAL TECHNOLOGIES, INC. (1)
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THE REGENTS OF THE UNIVERSITY OF COLORADO, A BODY CORPORATE (1)
5,381,253 Chiral smectic liquid crystal optical modulators having variable retardation 247 1991
 
Societe d'Etude du Radant (1)
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TYCO ELECTRONICS CORPORATION (1)
5,815,141 Resistive touchscreen having multiple selectable regions for pressure discrimination 168 1996
 
ADVANCED SEMICONDUCTOR ENGINEERING, INC. (1)
2004/0184,133 MICROSYSTEM PACKAGE STRUCTURE 61 2003
 
CANON KABUSHIKI KAISHA (3)
6,630,786 Light-emitting device having light-reflective layer formed with, or/and adjacent to, material that enhances device performance 211 2001
6,822,628 Methods and systems for compensating row-to-row brightness variations of a field emission display 204 2001
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MICROCHIPS BIOTECH, INC. (1)
6,551,838 Microfabricated devices for the storage and selective exposure of chemicals and devices 152 2001
 
HEWLETT-PACKARD COMPANY (1)
6,465,355 Method of fabricating suspended microstructures 239 2001
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (13)
6,862,029 Color display system 210 1999
6,859,218 Electronic display devices and methods 195 2000
6,632,698 Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS 290 2001
2003/0202,264 Micro-mirror device 215 2002
6,747,785 MEMS-actuated color light modulator and methods 230 2002
6,666,561 Continuously variable analog micro-mirror device 259 2002
2004/0147,056 Micro-fabricated device and method of making 206 2003
6,829,132 Charge control of micro-electromechanical device 228 2003
6,811,267 Display system with nonvisible data projection 251 2003
2005/0057,442 Adjacent display of sequential sub-images 223 2003
2005/0068,583 Organizing a digital image 192 2003
2004/0212,026 MEMS device having time-varying control 193 2004
2005/0196,074 Method and system for searching form features for form identification 2 2005
 
LUCENT TECHNOLOGIES INC. (3)
5,636,052 Direct view display based on a micromechanical modulation 329 1994
5,825,528 Phase-mismatched fabry-perot cavity micromechanical modulator 337 1995
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U.S. PHILIPS CORPORATION (4)
4,403,248 Display device with deformable reflective medium 367 1981
4,519,676 Passive display device 260 1983
4,459,182 Method of manufacturing a display device 261 1983
4,681,403 Display device with micromechanical leaf spring switches 244 1986
 
UNITED TEST AND ASSEMBLY CENTER LIMITED (1)
2004/0140,557 Wl-bga for MEMS/MOEMS devices 93 2003
 
COLIBRYS SA (2)
5,078,479 Light modulation device with matrix addressing 319 1991
5,579,149 Miniature network of light obturators 254 1994
 
MOTOROLA, INC. (1)
5,044,736 Configurable optical filter or display 234 1990
 
INFINEON TECHNOLOGIES AG (1)
* 7,011,986 Method for manufacturing a housing for a chip with a micromechanical structure 8 2004
 
BAKER, JOHN M. (1)
5,784,190 Electro-micro-mechanical shutters on transparent substrates 266 1995
 
TEXAS INSTRUMENTS INCORPORATED (127)
4,500,171 Process for plastic LCD fill hole sealing 220 1982
4,441,791 Deformable mirror light modulator 659 1982
4,482,213 Perimeter seal reinforcement holes for plastic LCDs 234 1982
4,571,603 Deformable mirror electrostatic printer 377 1984
4,566,935 Spatial light modulator and method 533 1984
4,710,732 Spatial light modulator and method 502 1984
4,596,992 Linear spatial light modulator and printer 418 1984
4,615,595 Frame addressed spatial light modulator 409 1984
4,662,746 Spatial light modulator and method 511 1985
4,856,863 Optical fiber interconnection network including spatial light modulator 295 1988
4,956,619 Spatial light modulator 601 1988
5,079,544 Standard independent digitized video system 358 1989
5,028,939 Spatial light modulator system 409 1989
4,954,789 Spatial light modulator 600 1989
5,037,173 Optical interconnection network 341 1989
5,018,256 Architecture and process for integrating DMD with control circuit substrates 313 1990
5,083,857 Multi-level deformable mirror device 553 1990
5,142,405 Bistable DMD addressing circuit and method 371 1990
5,061,049 Spatial light modulator and method 769 1990
5,192,395 Method of making a digital flexure beam accelerometer 216 1990
5,096,279 Spatial light modulator and method 548 1990
5,099,353 Architecture and process for integrating DMD with control circuit substrates 328 1991
5,226,099 Digital micromirror shutter device 385 1991
5,162,787 Apparatus and method for digitized video system utilizing a moving display surface 261 1991
5,170,156 Multi-frequency two dimensional display system 267 1991
5,192,946 Digitized color video display system 340 1991
5,214,419 Planarized true three dimensional display 269 1991
5,214,420 Spatial light modulator projection system with random polarity light 311 1991
5,206,629 Spatial light modulator and memory for digitized video display 262 1991
5,179,274 Method for controlling operation of optical systems and devices 243 1991
5,168,406 Color deformable mirror device and method for manufacture 297 1991
5,254,980 DMD display system controller 254 1991
5,563,398 Spatial light modulator scanning system 217 1991
5,233,385 White light enhanced color field sequential projection 411 1991
5,233,456 Resonant mirror and method of manufacture 318 1991
5,216,537 Architecture and process for integrating DMD with control circuit substrates 393 1992
5,331,454 Low reset voltage process for DMD 361 1992
5,296,950 Optical signal free-space conversion board 241 1992
5,231,532 Switchable resonant filter for optical radiation 262 1992
5,312,513 Methods of forming multiple phase light modulators 316 1992
5,172,262 Spatial light modulator and method 400 1992
5,305,640 Digital flexure beam accelerometer 202 1992
5,446,479 Multi-dimensional array video processor system 264 1992
5,818,095 High-yield spatial light modulator with light blocking layer 329 1992
5,272,473 Reduced-speckle display system 306 1992
5,327,286 Real time optical correlation system 287 1992
5,287,096 Variable luminosity display system 283 1992
5,325,116 Device for writing to and reading from optical storage media 268 1992
5,280,277 Field updated deformable mirror device 364 1992
5,506,597 Apparatus and method for image projection 297 1992
5,457,566 DMD scanner 254 1992
5,278,652 DMD architecture and timing for use in a pulse width modulated display system 382 1993
5,461,411 Process and architecture for digital micromirror printer 330 1993
5,323,002 Spatial light modulator based optical calibration system 295 1993
5,489,952 Method and device for multi-format television 350 1993
5,365,283 Color phase control for projection display using spatial light modulator 300 1993
5,526,172 Microminiature, monolithic, variable electrical signal processor and apparatus including same 433 1993
5,581,272 Signal generator for controlling a spatial light modulator 209 1993
5,457,493 Digital micro-mirror based image simulation system 382 1993
5,411,769 Method of producing micromechanical devices 274 1993
5,339,116 DMD architecture and timing for use in a pulse-width modulated display system 320 1993
5,526,051 Digital television system 302 1993
5,459,602 Micro-mechanical optical shutter 230 1993
5,452,024 DMD display system 461 1993
5,497,197 System and method for packaging data into video processor 245 1993
5,517,347 Direct view deformable mirror device 342 1993
5,583,688 Multi-level digital micromirror device 488 1993
5,448,314 Method and apparatus for sequential color imaging 428 1994
5,602,671 Low surface energy passivation layer for micromechanical devices 289 1994
5,606,441 Multiple phase light modulation using binary addressing 240 1994
5,444,566 Optimized electronic operation of digital micromirror devices 375 1994
5,665,997 Grated landing area to eliminate sticking of micro-mechanical devices 319 1994
5,526,688 Digital flexure beam accelerometer and method 222 1994
5,523,803 DMD architecture and timing for use in a pulse-width modulated display system 316 1994
6,061,075 Non-systolic time delay and integration printing 195 1994
5,497,172 Pulse width modulation for spatial light modulator with split reset addressing 347 1994
5,454,906 Method of providing sacrificial spacer for micro-mechanical devices 295 1994
5,499,062 Multiplexed memory timing with block reset and secondary memory 274 1994
5,548,301 Pixel control circuitry for spatial light modulator 283 1994
5,650,881 Support post architecture for micromechanical devices 274 1994
5,552,924 Micromechanical device having an improved beam 260 1994
5,610,624 Spatial light modulator with reduced possibility of an on state defect 215 1994
5,659,374 Method of repairing defective pixels 219 1994
5,567,334 Method for creating a digital micromirror device using an aluminum hard mask 266 1995
6,049,317 System for imaging of light-sensitive media 288 1995
5,610,438 Micro-mechanical device with non-evaporable getter 308 1995
5,515,076 Multi-dimensional array video processor system 260 1995
6,232,936 DMD Architecture to improve horizontal resolution 225 1995
5,535,047 Active yoke hidden hinge digital micromirror device 489 1995
5,619,365 Elecronically tunable optical periodic surface filters with an alterable resonant frequency 254 1995
5,619,366 Controllable surface filter 251 1995
5,551,293 Micro-machined accelerometer array with shield plane 235 1995
5,570,135 Method and device for multi-format television 250 1995
5,589,852 Apparatus and method for image projection with pixel intensity control 291 1995
5,597,736 High-yield spatial light modulator with light blocking layer 267 1995
5,600,383 Multi-level deformable mirror device with torsion hinges placed in a layer different from the torsion beam layer 430 1995
5,608,468 Method and device for multi-format television 267 1995
5,610,625 Monolithic spatial light modulator and memory package 198 1995
5,646,768 Support posts for micro-mechanical devices 323 1995
5,745,193 DMD architecture and timing for use in a pulse-width modulated display system 254 1995
6,099,132 Manufacture method for micromechanical devices 221 1995
6,447,126 Support post architecture for micromechanical devices 340 1995
5,657,099 Color phase control for projection display using spatial light modulator 221 1995
5,654,741 Spatial light modulator display pointing device 210 1995
5,784,212 Method of making a support post for a micromechanical device 248 1996
5,771,116 Multiple bias level reset waveform for enhanced DMD control 305 1996
5,842,088 Method of calibrating a spatial light modulator printing system 276 1997
5,939,785 Micromechanical device including time-release passivant 125 1997
5,912,758 Bipolar reset for spatial light modulators 218 1998
5,936,758 Method of passivating a micromechanical device within a hermetic package 76 1998
6,480,177 Blocked stepped address voltage for micromechanical devices 207 1998
6,028,690 Reduced micromirror mirror gaps for improved contrast ratio 310 1998
6,282,010 Anti-reflective coatings for spatial light modulators 308 1999
6,323,982 Yield superstructure for digital micromirror device 277 1999
6,295,154 Optical switching apparatus 312 1999
6,147,790 Spring-ring micromechanical device 254 1999
6,038,056 Spatial light modulator having improved contrast ratio 276 1999
6,473,274 Symmetrical microactuator structure for use in mass data storage devices, or the like 206 2000
6,549,338 Bandpass filter to reduce thermal impact of dichroic light shift 229 2000
6,552,840 Electrostatic efficiency of micromechanical devices 251 2000
6,466,358 Analog pulse width modulation cell for digital micromechanical device 231 2000
6,778,155 Display operation with inserted block clears 195 2001
6,643,069 SLM-base color projection display having multiple SLM's and multiple projection lenses 240 2001
6,775,174 Memory architecture for micromirror cell 194 2001
6,625,047 Micromechanical memory element 273 2001
* 6,876,071 Masking layer in substrate cavity 5 2002
6,741,503 SLM display data address mapping for four bank frame buffer 194 2002
 
GEORGIA TECH RESEARCH CORPORATION (1)
5,401,983 Processes for lift-off of thin film materials or devices for fabricating three dimensional integrated circuits, optical detectors, and micromechanical devices 281 1993
 
QINETIQ LIMITED (1)
4,790,635 Electro-optical device 234 1987
 
PROMOS TECHNOLOGIES INC. (1)
6,855,610 Method of forming self-aligned contact structure with locally etched gate conductive layer 205 2002
 
ETALON, INC. (1)
2003/0072,070 Visible spectrum modulator arrays 288 2002
 
AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD. (2)
5,745,281 Electrostatically-driven light modulator and display 333 1996
6,787,897 Wafer-level package with silicon gasket 30 2001
 
HEWLETT PACKARD ENTERPRISE DEVELOPMENT LP (1)
6,862,022 Method and system for automatically selecting a vertical refresh rate for a video display monitor 231 2001
 
BENHOV GMBH, LLC (1)
5,739,945 Electrically tunable optical filter utilizing a deformable multi-layer mirror 319 1996
 
XEROX CORPORATION (6)
6,160,833 Blue vertical cavity surface emitting laser 217 1998
6,180,428 Monolithic scanning light emitting devices using micromachining 199 1998
6,201,633 Micro-electromechanical based bistable color display sheets 310 1999
6,545,335 Structure and method for electrical isolation of optoelectronic integrated circuits 206 1999
6,548,908 Structure and method for planar lateral oxidation in passive devices 195 1999
6,674,090 Structure and method for planar lateral oxidation in active 181 1999
 
NOBEX CORPORATION (1)
6,600,201 Systems with high density packing of micromachines 215 2001
 
MASSACHUSETTS INSTITUTE OF TECHNOLOGY (2)
5,022,745 Electrostatically deformable single crystal dielectrically coated mirror 371 1989
5,233,459 Electric display device 390 1991
 
Quantum Diagnostics Ltd. (1)
4,786,128 Device for modulating and reflecting electromagnetic radiation employing electro-optic layer having a variable index of refraction 310 1986
 
MITSUBISHI GAS CHEMICAL COMPANY, INC. (1)
5,853,662 Method for preserving polished inorganic glass and method for preserving article obtained by using the same 43 1996
 
SHARP KABUSHIKI KAISHA (1)
6,113,239 Projection display system for reflective light valves 268 1998
 
GLOBAL OLED TECHNOLOGY LLC (3)
6,226,890 Desiccation of moisture-sensitive electronic devices 136 2000
* 6,740,145 Desiccants and desiccant packages for highly moisture-sensitive electronic devices 25 2001
6,590,157 Sealing structure for highly moisture-sensitive electronic device element and method for fabrication 10 2001
 
DOW CORNING S.A. (1)
6,238,755 Insulating glass units 61 1998
 
THE REGENTS OF THE UNIVERSITY OF MICHIGAN (1)
6,696,645 On-wafer packaging for RF-MEMS 11 2002
 
SHARP LABORATORIES OF AMERICA, INC. (3)
6,496,122 Image display and remote control system capable of displaying two distinct images 391 1998
6,606,175 Multi-segment light-emitting diode 196 1999
6,870,581 Single panel color video projection display using reflective banded color falling-raster illumination 222 2001
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (2)
5,311,360 Method and apparatus for modulating a light beam 596 1992
5,459,610 Deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate 322 1993
 
FORD MOTOR COMPANY (1)
4,977,009 Composite polymer/desiccant coatings for IC encapsulation 64 1990
 
QUALCOMM MEMS TECHNOLOGIES, INC. (15)
5,835,255 Visible spectrum modulator arrays 582 1994
6,040,937 Interferometric modulation 700 1996
5,986,796 Visible spectrum modulator arrays 562 1996
6,674,562 Interferometric modulation of radiation 780 1998
6,055,090 Interferometric modulation 494 1999
6,589,625 Hermetic seal and method to create the same 355 2001
6,867,896 Interferometric modulation of radiation 436 2001
6,680,792 Interferometric modulation of radiation 600 2001
6,650,455 Photonic mems and structures 599 2001
2002/0075,555 Interferometric modulation of radiation 460 2001
6,794,119 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 469 2002
6,710,908 Controlling micro-electro-mechanical cavities 420 2002
6,574,033 Microelectromechanical systems device and method for fabricating same 540 2002
6,741,377 Device having a light-absorbing mask and a method for fabricating same 357 2002
2004/0240,032 Interferometric modulation of radiation 326 2004
 
HONEYWELL INTERNATIONAL INC. (2)
6,474,138 Adsorption based carbon monoxide sensor and method 8 2000
2005/0253,283 Getter deposition for vacuum packaging 49 2004
 
HONEYWELL INC. (1)
4,377,324 Graded index Fabry-Perot optical filter device 252 1980
 
ANALOG DEVICES, INC. (1)
2002/0075,551 Enclosure for MEMS apparatus and method of using the same 42 2001
 
GEMFIRE CORPORATION (1)
5,703,710 Method for manipulating optical energy using poled structure 211 1994
 
EASTMAN KODAK COMPANY (1)
5,075,796 Optical article for multicolor imaging 220 1990
 
NATIONAL RESEARCH COUNCIL OF CANADA (1)
5,619,059 Color deformable mirror device having optical thin film interference color coatings 245 1994
 
ALPHA FRY LIMITED (3)
5,244,707 Enclosure for electronic devices 103 1992
5,304,419 Moisture and particle getter for enclosures 139 1992
5,591,379 Moisture getting composition for hermetic microelectronic devices 115 1993
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (1)
4,389,096 Image display apparatus of liquid crystal valve projection type 293 1981
 
AT&T CORP. (1)
5,500,761 Micromechanical modulator 354 1994
* Cited By Examiner

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
Pitronix, Inc. (1)
8,262,274 Light guides and backlight systems incorporating light redirectors at varying densities 2 2011
 
QUALCOMM MEMS TECHNOLOGIES, INC. (3)
7,550,912 Method and system for maintaining partial vacuum in display device 1 2005
8,410,690 Display device with desiccant 0 2009
* 2010/0206,629 DISPLAY DEVICE WITH DESICCANT 0 2009
 
HONEYWELL INTERNATIONAL INC. (2)
* 7,800,190 Getter on die in an upper sense plate designed system 0 2008
* 2009/0309,203 GETTER ON DIE IN AN UPPER SENSE PLATE DESIGNED SYSTEM 6 2008
 
PIXTRONIX, INC. (48)
9,158,106 Display methods and apparatus 0 2006
7,405,852 Display apparatus and methods for manufacture thereof 73 2006
* 2007/0002,156 Display apparatus and methods for manufacture thereof 28 2006
* 2006/0209,012 Devices having MEMS displays 149 2006
7,876,489 Display apparatus with optical cavities 62 2006
* 2007/0279,727 Display apparatus with optical cavities 102 2006
7,619,806 Methods and apparatus for spatial light modulation 22 2006
* 2007/0091,038 Methods and apparatus for spatial light modulation 42 2006
8,310,442 Circuits for controlling display apparatus 15 2006
* 2007/0205,969 Direct-view MEMS display devices and methods for generating images thereon 69 2006
7,675,665 Methods and apparatus for actuating displays 27 2007
8,482,496 Circuits for controlling MEMS display apparatus on a transparent substrate 6 2007
* 2008/0174,532 Circuits for controlling display apparatus 49 2007
7,636,189 Display methods and apparatus 20 2007
7,551,344 Methods for manufacturing displays 27 2007
* 2008/0123,175 Methods for manufacturing displays 21 2007
7,927,654 Methods and apparatus for spatial light modulation 37 2007
* 2008/0145,527 Methods and apparatus for spatial light modulation 30 2007
9,229,222 Alignment methods in fluid-filled MEMS displays 0 2007
9,176,318 Methods for manufacturing fluid-filled MEMS displays 0 2007
7,852,546 Spacers for maintaining display apparatus alignment 29 2007
7,746,529 MEMS display apparatus 33 2007
8,519,945 Circuits for controlling display apparatus 8 2007
* 2008/0129,681 Circuits for controlling display apparatus 45 2007
7,920,317 Display with controlled formation of bubbles 25 2008
8,248,560 Light guides and backlight systems incorporating prismatic structures and light redirectors 3 2008
8,526,096 Mechanical light modulators with stressed beams 13 2009
* 2009/0195,855 MECHANICAL LIGHT MODULATORS WITH STRESSED BEAMS 25 2009
9,182,587 Manufacturing structure and process for compliant mechanisms 0 2009
9,082,353 Circuits for controlling display apparatus 2 2010
9,261,694 Display apparatus and methods for manufacture thereof 0 2011
* 2011/0122,474 DISPLAY APPARATUS AND METHODS FOR MANUFACTURE THEREOF 21 2011
9,087,486 Circuits for controlling display apparatus 0 2011
8,520,285 Methods for manufacturing cold seal fluid-filled display apparatus 2 2011
* 2011/0205,756 LIGHT GUIDES AND BACKLIGHT SYSTEMS INCORPORATING PRISMATIC STRUCTURES AND LIGHT REDIRECTORS 3 2011
8,519,923 Display methods and apparatus 8 2012
8,599,463 MEMS anchors 12 2012
8,441,602 Light guides and backlight systems incorporating prismatic structures and light redirectors 5 2012
8,545,084 Light guides and backlight systems incorporating light redirectors at varying densities 1 2012
9,135,868 Direct-view MEMS display devices and methods for generating images thereon 0 2012
9,274,333 Alignment methods in fluid-filled MEMS displays 0 2012
9,336,732 Circuits for controlling display apparatus 0 2012
9,134,552 Display apparatus with narrow gap electrostatic actuators 0 2013
9,243,774 Light guides and backlight systems incorporating prismatic structures and light redirectors 0 2013
8,891,152 Methods for manufacturing cold seal fluid-filled display apparatus 0 2013
9,177,523 Circuits for controlling display apparatus 0 2013
9,128,277 Mechanical light modulators with stressed beams 0 2013
9,116,344 MEMS anchors 0 2013
 
FLEX LIGHTING II, LLC (1)
9,110,200 Illumination device comprising a film-based lightguide 1 2011
* Cited By Examiner

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