US Patent No: 7,161,094

Number of patents in Portfolio can not be more than 2000

Modifying the electro-mechanical behavior of devices

ALSO PUBLISHED AS: 20060219435

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Abstract

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A MEMS device is packaged with a control material that is included in the package to affect an operation of a moveable element of the device. The control material may affect operational characteristics including actuation and release voltages and currents, mechanical affects including damping and stiffness, lifetime of the device, optical properties, thermal affects and corrosion. The control material may be inserted into the package as part of any of several structural components of the package or the MEMS device.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
QUALCOMM MEMS TECHNOLOGIES, INC.SAN DIEGO, CA661

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chui, Clarence San Jose, CA 321 5659
Kothari, Manish Cupertino, CA 314 4023
Palmateer, Lauren San Francisco, CA 61 488

Cited Art Landscape

Patent Info (Count) # Cites Year
 
TEXAS INSTRUMENTS INCORPORATED (127)
4,500,171 Process for plastic LCD fill hole sealing 211 1982
4,441,791 Deformable mirror light modulator 634 1982
4,482,213 Perimeter seal reinforcement holes for plastic LCDs 225 1982
4,571,603 Deformable mirror electrostatic printer 367 1984
4,566,935 Spatial light modulator and method 514 1984
4,710,732 Spatial light modulator and method 491 1984
4,596,992 Linear spatial light modulator and printer 397 1984
4,615,595 Frame addressed spatial light modulator 397 1984
4,662,746 Spatial light modulator and method 496 1985
4,856,863 Optical fiber interconnection network including spatial light modulator 285 1988
4,956,619 Spatial light modulator 583 1988
5,079,544 Standard independent digitized video system 349 1989
5,028,939 Spatial light modulator system 395 1989
4,954,789 Spatial light modulator 573 1989
5,037,173 Optical interconnection network 322 1989
5,018,256 Architecture and process for integrating DMD with control circuit substrates 303 1990
5,083,857 Multi-level deformable mirror device 536 1990
5,142,405 Bistable DMD addressing circuit and method 342 1990
5,061,049 Spatial light modulator and method 736 1990
5,192,395 Method of making a digital flexure beam accelerometer 207 1990
5,096,279 Spatial light modulator and method 512 1990
5,099,353 Architecture and process for integrating DMD with control circuit substrates 318 1991
5,226,099 Digital micromirror shutter device 371 1991
5,162,787 Apparatus and method for digitized video system utilizing a moving display surface 252 1991
5,170,156 Multi-frequency two dimensional display system 257 1991
5,192,946 Digitized color video display system 327 1991
5,214,419 Planarized true three dimensional display 260 1991
5,214,420 Spatial light modulator projection system with random polarity light 301 1991
5,206,629 Spatial light modulator and memory for digitized video display 253 1991
5,179,274 Method for controlling operation of optical systems and devices 234 1991
5,168,406 Color deformable mirror device and method for manufacture 285 1991
5,254,980 DMD display system controller 244 1991
5,563,398 Spatial light modulator scanning system 206 1991
5,233,385 White light enhanced color field sequential projection 379 1991
5,233,456 Resonant mirror and method of manufacture 306 1991
5,216,537 Architecture and process for integrating DMD with control circuit substrates 383 1992
5,331,454 Low reset voltage process for DMD 351 1992
5,296,950 Optical signal free-space conversion board 232 1992
5,231,532 Switchable resonant filter for optical radiation 248 1992
5,312,513 Methods of forming multiple phase light modulators 280 1992
5,172,262 Spatial light modulator and method 390 1992
5,305,640 Digital flexure beam accelerometer 193 1992
5,446,479 Multi-dimensional array video processor system 255 1992
5,818,095 High-yield spatial light modulator with light blocking layer 313 1992
5,272,473 Reduced-speckle display system 290 1992
5,327,286 Real time optical correlation system 277 1992
5,287,096 Variable luminosity display system 274 1992
5,325,116 Device for writing to and reading from optical storage media 258 1992
5,280,277 Field updated deformable mirror device 336 1992
5,506,597 Apparatus and method for image projection 287 1992
5,457,566 DMD scanner 245 1992
5,278,652 DMD architecture and timing for use in a pulse width modulated display system 354 1993
5,461,411 Process and architecture for digital micromirror printer 303 1993
5,323,002 Spatial light modulator based optical calibration system 280 1993
5,489,952 Method and device for multi-format television 335 1993
5,365,283 Color phase control for projection display using spatial light modulator 288 1993
5,526,172 Microminiature, monolithic, variable electrical signal processor and apparatus including same 414 1993
5,581,272 Signal generator for controlling a spatial light modulator 200 1993
5,457,493 Digital micro-mirror based image simulation system 331 1993
5,411,769 Method of producing micromechanical devices 265 1993
5,339,116 DMD architecture and timing for use in a pulse-width modulated display system 293 1993
5,526,051 Digital television system 269 1993
5,459,602 Micro-mechanical optical shutter 221 1993
5,452,024 DMD display system 425 1993
5,497,197 System and method for packaging data into video processor 236 1993
5,517,347 Direct view deformable mirror device 308 1993
5,583,688 Multi-level digital micromirror device 472 1993
5,448,314 Method and apparatus for sequential color imaging 414 1994
5,602,671 Low surface energy passivation layer for micromechanical devices 279 1994
5,606,441 Multiple phase light modulation using binary addressing 226 1994
5,444,566 Optimized electronic operation of digital micromirror devices 362 1994
5,665,997 Grated landing area to eliminate sticking of micro-mechanical devices 305 1994
5,526,688 Digital flexure beam accelerometer and method 213 1994
5,523,803 DMD architecture and timing for use in a pulse-width modulated display system 286 1994
6,061,075 Non-systolic time delay and integration printing 186 1994
5,497,172 Pulse width modulation for spatial light modulator with split reset addressing 315 1994
5,454,906 Method of providing sacrificial spacer for micro-mechanical devices 285 1994
5,499,062 Multiplexed memory timing with block reset and secondary memory 265 1994
5,548,301 Pixel control circuitry for spatial light modulator 255 1994
5,650,881 Support post architecture for micromechanical devices 265 1994
5,552,924 Micromechanical device having an improved beam 250 1994
5,610,624 Spatial light modulator with reduced possibility of an on state defect 206 1994
5,659,374 Method of repairing defective pixels 210 1994
5,567,334 Method for creating a digital micromirror device using an aluminum hard mask 246 1995
6,049,317 System for imaging of light-sensitive media 259 1995
5,610,438 Micro-mechanical device with non-evaporable getter 299 1995
5,515,076 Multi-dimensional array video processor system 251 1995
6,232,936 DMD Architecture to improve horizontal resolution 216 1995
5,535,047 Active yoke hidden hinge digital micromirror device 474 1995
5,619,365 Elecronically tunable optical periodic surface filters with an alterable resonant frequency 240 1995
5,619,366 Controllable surface filter 235 1995
5,551,293 Micro-machined accelerometer array with shield plane 226 1995
5,570,135 Method and device for multi-format television 232 1995
5,589,852 Apparatus and method for image projection with pixel intensity control 280 1995
5,597,736 High-yield spatial light modulator with light blocking layer 253 1995
5,600,383 Multi-level deformable mirror device with torsion hinges placed in a layer different from the torsion beam layer 413 1995
5,608,468 Method and device for multi-format television 252 1995
5,610,625 Monolithic spatial light modulator and memory package 189 1995
5,646,768 Support posts for micro-mechanical devices 310 1995
5,745,193 DMD architecture and timing for use in a pulse-width modulated display system 226 1995
6,099,132 Manufacture method for micromechanical devices 212 1995
6,447,126 Support post architecture for micromechanical devices 331 1995
5,657,099 Color phase control for projection display using spatial light modulator 212 1995
5,654,741 Spatial light modulator display pointing device 197 1995
5,784,212 Method of making a support post for a micromechanical device 239 1996
5,771,116 Multiple bias level reset waveform for enhanced DMD control 291 1996
5,842,088 Method of calibrating a spatial light modulator printing system 262 1997
5,939,785 Micromechanical device including time-release passivant 123 1997
5,912,758 Bipolar reset for spatial light modulators 209 1998
5,936,758 Method of passivating a micromechanical device within a hermetic package 74 1998
6,480,177 Blocked stepped address voltage for micromechanical devices 197 1998
6,028,690 Reduced micromirror mirror gaps for improved contrast ratio 294 1998
6,282,010 Anti-reflective coatings for spatial light modulators 294 1999
6,323,982 Yield superstructure for digital micromirror device 267 1999
6,295,154 Optical switching apparatus 302 1999
6,147,790 Spring-ring micromechanical device 244 1999
6,038,056 Spatial light modulator having improved contrast ratio 267 1999
6,473,274 Symmetrical microactuator structure for use in mass data storage devices, or the like 197 2000
6,549,338 Bandpass filter to reduce thermal impact of dichroic light shift 217 2000
6,552,840 Electrostatic efficiency of micromechanical devices 240 2000
6,466,358 Analog pulse width modulation cell for digital micromechanical device 219 2000
6,778,155 Display operation with inserted block clears 186 2001
6,643,069 SLM-base color projection display having multiple SLM's and multiple projection lenses 226 2001
6,775,174 Memory architecture for micromirror cell 185 2001
6,625,047 Micromechanical memory element 260 2001
* 6,876,071 Masking layer in substrate cavity 3 2002
6,741,503 SLM display data address mapping for four bank frame buffer 185 2002
 
QUALCOMM MEMS TECHNOLOGIES, INC. (15)
5,835,255 Visible spectrum modulator arrays 518 1994
6,040,937 Interferometric modulation 651 1996
5,986,796 Visible spectrum modulator arrays 498 1996
6,674,562 Interferometric modulation of radiation 694 1998
6,055,090 Interferometric modulation 461 1999
6,589,625 Hermetic seal and method to create the same 297 2001
6,867,896 Interferometric modulation of radiation 403 2001
6,680,792 Interferometric modulation of radiation 526 2001
6,650,455 Photonic mems and structures 522 2001
2002/0075,555 Interferometric modulation of radiation 428 2001
6,794,119 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 403 2002
6,710,908 Controlling micro-electro-mechanical cavities 356 2002
6,574,033 Microelectromechanical systems device and method for fabricating same 469 2002
6,741,377 Device having a light-absorbing mask and a method for fabricating same 295 2002
2004/0240,032 Interferometric modulation of radiation 309 2004
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (13)
6,862,029 Color display system 200 1999
6,859,218 Electronic display devices and methods 186 2000
6,862,022 Method and system for automatically selecting a vertical refresh rate for a video display monitor 214 2001
6,632,698 Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS 278 2001
2003/0202,264 Micro-mirror device 206 2002
6,747,785 MEMS-actuated color light modulator and methods 219 2002
6,666,561 Continuously variable analog micro-mirror device 236 2002
2004/0147,056 Micro-fabricated device and method of making 195 2003
6,829,132 Charge control of micro-electromechanical device 218 2003
6,811,267 Display system with nonvisible data projection 232 2003
2005/0057,442 Adjacent display of sequential sub-images 209 2003
2005/0068,583 Organizing a digital image 183 2003
2004/0212,026 MEMS device having time-varying control 184 2004
 
XEROX CORPORATION (6)
6,160,833 Blue vertical cavity surface emitting laser 208 1998
6,180,428 Monolithic scanning light emitting devices using micromachining 190 1998
6,201,633 Micro-electromechanical based bistable color display sheets 276 1999
6,545,335 Structure and method for electrical isolation of optoelectronic integrated circuits 197 1999
6,548,908 Structure and method for planar lateral oxidation in passive devices 186 1999
6,674,090 Structure and method for planar lateral oxidation in active 171 1999
 
U.S. PHILIPS CORPORATION (4)
4,403,248 Display device with deformable reflective medium 350 1981
4,519,676 Passive display device 248 1983
4,459,182 Method of manufacturing a display device 249 1983
4,681,403 Display device with micromechanical leaf spring switches 230 1986
 
ALPHA FRY LIMITED (3)
5,244,707 Enclosure for electronic devices 96 1992
5,304,419 Moisture and particle getter for enclosures 132 1992
5,591,379 Moisture getting composition for hermetic microelectronic devices 104 1993
 
CANON KABUSHIKI KAISHA (3)
6,630,786 Light-emitting device having light-reflective layer formed with, or/and adjacent to, material that enhances device performance 197 2001
6,822,628 Methods and systems for compensating row-to-row brightness variations of a field emission display 195 2001
6,853,129 Protected substrate structure for a field emission display device 190 2003
 
GLOBAL OLED TECHNOLOGY LLC (3)
6,226,890 Desiccation of moisture-sensitive electronic devices 125 2000
* 6,740,145 Desiccants and desiccant packages for highly moisture-sensitive electronic devices 22 2001
6,590,157 Sealing structure for highly moisture-sensitive electronic device element and method for fabrication 10 2001
 
LUCENT TECHNOLOGIES INC. (3)
5,636,052 Direct view display based on a micromechanical modulation 313 1994
5,825,528 Phase-mismatched fabry-perot cavity micromechanical modulator 323 1995
5,710,656 Micromechanical optical modulator having a reduced-mass composite membrane 282 1996
 
SHARP LABORATORIES OF AMERICA, INC. (3)
6,496,122 Image display and remote control system capable of displaying two distinct images 339 1998
6,606,175 Multi-segment light-emitting diode 186 1999
6,870,581 Single panel color video projection display using reflective banded color falling-raster illumination 210 2001
 
AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD. (2)
5,745,281 Electrostatically-driven light modulator and display 300 1996
6,787,897 Wafer-level package with silicon gasket 21 2001
 
COLIBRYS SA (2)
5,078,479 Light modulation device with matrix addressing 287 1991
5,579,149 Miniature network of light obturators 233 1994
 
HONEYWELL INTERNATIONAL INC. (2)
6,474,138 Adsorption based carbon monoxide sensor and method 8 2000
2005/0253,283 Getter deposition for vacuum packaging 47 2004
 
LOCKHEED MARTIN CORPORATION (2)
4,982,184 Electrocrystallochromic display and element 362 1989
5,124,834 Transferrable, self-supporting pellicle for elastomer light valve displays and method for making the same 259 1989
 
MASSACHUSETTS INSTITUTE OF TECHNOLOGY (2)
5,022,745 Electrostatically deformable single crystal dielectrically coated mirror 354 1989
5,233,459 Electric display device 359 1991
 
SANDIA CORPORATION (2)
6,392,144 Micromechanical die attachment surcharge 43 2000
6,379,988 Pre-release plastic packaging of MEMS and IMEMS devices 83 2000
 
SANDIA NATIONAL LABORATORIES (2)
6,661,084 Single level microelectronic device package with an integral window 100 2002
6,674,159 Bi-level microelectronic device package with an integral window 198 2002
 
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (2)
6,741,384 Control of MEMS and light modulator arrays 225 2003
6,861,277 Method of forming MEMS device 220 2003
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (2)
5,311,360 Method and apparatus for modulating a light beam 578 1992
5,459,610 Deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate 309 1993
 
ADVANCED SEMICONDUCTOR ENGINEERING, INC. (1)
2004/0184,133 MICROSYSTEM PACKAGE STRUCTURE 61 2003
 
ANALOG DEVICES, INC. (1)
2002/0075,551 Enclosure for MEMS apparatus and method of using the same 42 2001
 
AT&T CORP. (1)
5,500,761 Micromechanical modulator 340 1994
 
BAKER, JOHN M. (1)
5,784,190 Electro-micro-mechanical shutters on transparent substrates 255 1995
 
CARDIFF SOFTWARE, INC. (1)
2005/0196,074 Method and system for searching form features for form identification 2005
 
DOW CORNING S.A. (1)
6,238,755 Insulating glass units 59 1998
 
EASTMAN KODAK COMPANY (1)
5,075,796 Optical article for multicolor imaging 207 1990
 
ETALON, INC. (1)
2003/0072,070 Visible spectrum modulator arrays 279 2002
 
FORD MOTOR COMPANY (1)
4,977,009 Composite polymer/desiccant coatings for IC encapsulation 62 1990
 
GEMFIRE CORPORATION (1)
5,703,710 Method for manipulating optical energy using poled structure 198 1994
 
GENESIS MICROCHIP INC. (1)
6,551,838 Microfabricated devices for the storage and selective exposure of chemicals and devices 138 2001
 
GEORGIA TECH RESEARCH CORPORATION (1)
5,401,983 Processes for lift-off of thin film materials or devices for fabricating three dimensional integrated circuits, optical detectors, and micromechanical devices 265 1993
 
HEWLETT-PACKARD COMPANY (1)
6,465,355 Method of fabricating suspended microstructures 229 2001
 
Honeywell Inc. (1)
4,377,324 Graded index Fabry-Perot optical filter device 240 1980
 
INFINEON TECHNOLOGIES AG (1)
* 7,011,986 Method for manufacturing a housing for a chip with a micromechanical structure 8 2004
 
IRIDIGM DISPLAY CORPORATION (1)
2001/0003,487 VISIBLE SPECTRUM MODULATOR ARRAYS 301 1999
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (1)
4,389,096 Image display apparatus of liquid crystal valve projection type 281 1981
 
MEMSCAP S.A. (1)
6,472,739 Encapsulated microelectromechanical (MEMS) devices 29 1999
 
MITSUBISHI GAS CHEMICAL COMPANY, INC. (1)
5,853,662 Method for preserving polished inorganic glass and method for preserving article obtained by using the same 43 1996
 
MOTOROLA, INC. (1)
5,044,736 Configurable optical filter or display 221 1990
 
NATIONAL RESEARCH COUNCIL OF CANADA (1)
5,619,059 Color deformable mirror device having optical thin film interference color coatings 233 1994
 
NOBEX CORPORATION (1)
6,600,201 Systems with high density packing of micromachines 206 2001
 
Northrop Corporation (1)
5,153,771 Coherent light modulation and detector 181 1990
 
OCEAN POWER TECHNOLOGIES, INC. (1)
4,748,366 Novel uses of piezoelectric materials for creating optical effects 285 1986
 
POPKIN FAMILY ASSETS, L.L.C. (1)
5,739,945 Electrically tunable optical filter utilizing a deformable multi-layer mirror 304 1996
 
PROMOS TECHNOLOGIES INC. (1)
6,855,610 Method of forming self-aligned contact structure with locally etched gate conductive layer 196 2002
 
QINETIQ LIMITED (1)
4,790,635 Electro-optical device 221 1987
 
Quantum Diagnostics Ltd. (1)
4,786,128 Device for modulating and reflecting electromagnetic radiation employing electro-optic layer having a variable index of refraction 294 1986
 
SAMSUNG ELECTRONICS CO., LTD. (1)
* 7,045,885 Placement of absorbing material in a semiconductor device 9 2004
 
SHARP KABUSHIKI KAISHA (1)
6,113,239 Projection display system for reflective light valves 256 1998
 
Societe d'Etude du Radant (1)
4,531,126 Method and device for analyzing a very high frequency radiation beam of electromagnetic waves 186 1982
 
THE REGENTS OF THE UNIVERSITY OF COLORADO, A BODY CORPORATE (1)
5,381,253 Chiral smectic liquid crystal optical modulators having variable retardation 235 1991
 
THE REGENTS OF THE UNIVERSITY OF MICHIGAN (1)
6,696,645 On-wafer packaging for RF-MEMS 11 2002
 
TRUSEAL TECHNOLOGIES, INC. (1)
4,431,691 Dimensionally stable sealant and spacer strip and composite structures comprising the same 112 1981
 
TYCO ELECTRONICS CORPORATION (1)
5,815,141 Resistive touchscreen having multiple selectable regions for pressure discrimination 146 1996
 
UNITED TEST AND ASSEMBLY CENTER LTD. (1)
2004/0140,557 Wl-bga for MEMS/MOEMS devices 84 2003
 
Other [Check patent profile for assignment information] (6)
4,445,050 Device for conversion of light power to electric power 195 1981
4,663,083 Electro-optical dipole suspension with reflective-absorptive-transmissive characteristics 181 1984
5,142,414 Electrically actuatable temporal tristimulus-color device 275 1991
5,500,635 Products incorporating piezoelectric material 294 1994
6,819,469 High-resolution spatial light modulator for 3-dimensional holographic display 249 2003
2005/0001,828 Charge control of micro-electromechanical device 184 2004
* Cited By Examiner

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
PIXTRONIX, INC. (21)
7,405,852 Display apparatus and methods for manufacture thereof 43 2006
7,876,489 Display apparatus with optical cavities 32 2006
7,619,806 Methods and apparatus for spatial light modulation 9 2006
8,310,442 Circuits for controlling display apparatus 5 2006
7,675,665 Methods and apparatus for actuating displays 11 2007
8,482,496 Circuits for controlling MEMS display apparatus on a transparent substrate 0 2007
7,636,189 Display methods and apparatus 5 2007
7,551,344 Methods for manufacturing displays 10 2007
7,927,654 Methods and apparatus for spatial light modulation 13 2007
7,852,546 Spacers for maintaining display apparatus alignment 10 2007
7,746,529 MEMS display apparatus 13 2007
8,519,945 Circuits for controlling display apparatus 0 2007
7,920,317 Display with controlled formation of bubbles 8 2008
8,248,560 Light guides and backlight systems incorporating prismatic structures and light redirectors 1 2008
8,526,096 Mechanical light modulators with stressed beams 0 2009
8,520,285 Methods for manufacturing cold seal fluid-filled display apparatus 1 2011
8,519,923 Display methods and apparatus 0 2012
8,599,463 MEMS anchors 0 2012
8,441,602 Light guides and backlight systems incorporating prismatic structures and light redirectors 2 2012
8,545,084 Light guides and backlight systems incorporating light redirectors at varying densities 0 2012
8,891,152 Methods for manufacturing cold seal fluid-filled display apparatus 0 2013
 
QUALCOMM MEMS TECHNOLOGIES, INC. (2)
7,550,912 Method and system for maintaining partial vacuum in display device 1 2005
8,410,690 Display device with desiccant 0 2009
 
HONEYWELL INTERNATIONAL INC. (1)
* 7,800,190 Getter on die in an upper sense plate designed system 0 2008
 
Pitronix, Inc. (1)
8,262,274 Light guides and backlight systems incorporating light redirectors at varying densities 2 2011
* Cited By Examiner

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