US Patent No: 7,161,094

Number of patents in Portfolio can not be more than 2000

Modifying the electro-mechanical behavior of devices

ALSO PUBLISHED AS: 20060219435

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Abstract

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A MEMS device is packaged with a control material that is included in the package to affect an operation of a moveable element of the device. The control material may affect operational characteristics including actuation and release voltages and currents, mechanical affects including damping and stiffness, lifetime of the device, optical properties, thermal affects and corrosion. The control material may be inserted into the package as part of any of several structural components of the package or the MEMS device.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
QUALCOMM MEMS TECHNOLOGIES, INC.SAN DIEGO, CA662

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chui, Clarence San Jose, CA 321 5747
Kothari, Manish Cupertino, CA 314 4104
Palmateer, Lauren San Francisco, CA 61 494

Cited Art Landscape

Patent Info (Count) # Cites Year
 
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6,819,469 High-resolution spatial light modulator for 3-dimensional holographic display 251 2003
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IRIDIGM DISPLAY CORPORATION (1)
2001/0003,487 VISIBLE SPECTRUM MODULATOR ARRAYS 303 1999
 
SANDIA NATIONAL LABORATORIES (2)
6,661,084 Single level microelectronic device package with an integral window 102 2002
6,674,159 Bi-level microelectronic device package with an integral window 198 2002
 
SANDIA CORPORATION (2)
6,392,144 Micromechanical die attachment surcharge 43 2000
6,379,988 Pre-release plastic packaging of MEMS and IMEMS devices 83 2000
 
Northrop Corporation (1)
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THE REGENTS OF THE UNIVERSITY OF COLORADO, A BODY CORPORATE (1)
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ADVANCED SEMICONDUCTOR ENGINEERING, INC. (1)
2004/0184,133 MICROSYSTEM PACKAGE STRUCTURE 61 2003
 
CANON KABUSHIKI KAISHA (3)
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CARDIFF SOFTWARE, INC. (1)
2005/0196,074 Method and system for searching form features for form identification 2005
 
HEWLETT-PACKARD COMPANY (1)
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HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (13)
6,862,029 Color display system 202 1999
6,859,218 Electronic display devices and methods 188 2000
6,862,022 Method and system for automatically selecting a vertical refresh rate for a video display monitor 216 2001
6,632,698 Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS 280 2001
2003/0202,264 Micro-mirror device 208 2002
6,747,785 MEMS-actuated color light modulator and methods 221 2002
6,666,561 Continuously variable analog micro-mirror device 238 2002
2004/0147,056 Micro-fabricated device and method of making 197 2003
6,829,132 Charge control of micro-electromechanical device 220 2003
6,811,267 Display system with nonvisible data projection 234 2003
2005/0057,442 Adjacent display of sequential sub-images 211 2003
2005/0068,583 Organizing a digital image 185 2003
2004/0212,026 MEMS device having time-varying control 186 2004
 
LUCENT TECHNOLOGIES INC. (3)
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U.S. PHILIPS CORPORATION (4)
4,403,248 Display device with deformable reflective medium 352 1981
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UNITED TEST AND ASSEMBLY CENTER LTD. (1)
2004/0140,557 Wl-bga for MEMS/MOEMS devices 86 2003
 
COLIBRYS SA (2)
5,078,479 Light modulation device with matrix addressing 289 1991
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MOTOROLA, INC. (1)
5,044,736 Configurable optical filter or display 223 1990
 
INFINEON TECHNOLOGIES AG (1)
* 7,011,986 Method for manufacturing a housing for a chip with a micromechanical structure 8 2004
 
BAKER, JOHN M. (1)
5,784,190 Electro-micro-mechanical shutters on transparent substrates 257 1995
 
TEXAS INSTRUMENTS INCORPORATED (127)
4,500,171 Process for plastic LCD fill hole sealing 213 1982
4,441,791 Deformable mirror light modulator 636 1982
4,482,213 Perimeter seal reinforcement holes for plastic LCDs 227 1982
4,571,603 Deformable mirror electrostatic printer 369 1984
4,566,935 Spatial light modulator and method 518 1984
4,710,732 Spatial light modulator and method 493 1984
4,596,992 Linear spatial light modulator and printer 401 1984
4,615,595 Frame addressed spatial light modulator 399 1984
4,662,746 Spatial light modulator and method 498 1985
4,856,863 Optical fiber interconnection network including spatial light modulator 287 1988
4,956,619 Spatial light modulator 585 1988
5,079,544 Standard independent digitized video system 351 1989
5,028,939 Spatial light modulator system 397 1989
4,954,789 Spatial light modulator 575 1989
5,037,173 Optical interconnection network 324 1989
5,018,256 Architecture and process for integrating DMD with control circuit substrates 305 1990
5,083,857 Multi-level deformable mirror device 538 1990
5,142,405 Bistable DMD addressing circuit and method 344 1990
5,061,049 Spatial light modulator and method 738 1990
5,192,395 Method of making a digital flexure beam accelerometer 209 1990
5,096,279 Spatial light modulator and method 514 1990
5,099,353 Architecture and process for integrating DMD with control circuit substrates 320 1991
5,226,099 Digital micromirror shutter device 373 1991
5,162,787 Apparatus and method for digitized video system utilizing a moving display surface 254 1991
5,170,156 Multi-frequency two dimensional display system 259 1991
5,192,946 Digitized color video display system 329 1991
5,214,419 Planarized true three dimensional display 262 1991
5,214,420 Spatial light modulator projection system with random polarity light 303 1991
5,206,629 Spatial light modulator and memory for digitized video display 255 1991
5,179,274 Method for controlling operation of optical systems and devices 236 1991
5,168,406 Color deformable mirror device and method for manufacture 287 1991
5,254,980 DMD display system controller 246 1991
5,563,398 Spatial light modulator scanning system 208 1991
5,233,385 White light enhanced color field sequential projection 381 1991
5,233,456 Resonant mirror and method of manufacture 308 1991
5,216,537 Architecture and process for integrating DMD with control circuit substrates 385 1992
5,331,454 Low reset voltage process for DMD 353 1992
5,296,950 Optical signal free-space conversion board 234 1992
5,231,532 Switchable resonant filter for optical radiation 250 1992
5,312,513 Methods of forming multiple phase light modulators 283 1992
5,172,262 Spatial light modulator and method 392 1992
5,305,640 Digital flexure beam accelerometer 195 1992
5,446,479 Multi-dimensional array video processor system 257 1992
5,818,095 High-yield spatial light modulator with light blocking layer 315 1992
5,272,473 Reduced-speckle display system 292 1992
5,327,286 Real time optical correlation system 279 1992
5,287,096 Variable luminosity display system 276 1992
5,325,116 Device for writing to and reading from optical storage media 260 1992
5,280,277 Field updated deformable mirror device 338 1992
5,506,597 Apparatus and method for image projection 289 1992
5,457,566 DMD scanner 247 1992
5,278,652 DMD architecture and timing for use in a pulse width modulated display system 356 1993
5,461,411 Process and architecture for digital micromirror printer 305 1993
5,323,002 Spatial light modulator based optical calibration system 282 1993
5,489,952 Method and device for multi-format television 337 1993
5,365,283 Color phase control for projection display using spatial light modulator 290 1993
5,526,172 Microminiature, monolithic, variable electrical signal processor and apparatus including same 418 1993
5,581,272 Signal generator for controlling a spatial light modulator 202 1993
5,457,493 Digital micro-mirror based image simulation system 333 1993
5,411,769 Method of producing micromechanical devices 267 1993
5,339,116 DMD architecture and timing for use in a pulse-width modulated display system 295 1993
5,526,051 Digital television system 271 1993
5,459,602 Micro-mechanical optical shutter 223 1993
5,452,024 DMD display system 427 1993
5,497,197 System and method for packaging data into video processor 238 1993
5,517,347 Direct view deformable mirror device 310 1993
5,583,688 Multi-level digital micromirror device 474 1993
5,448,314 Method and apparatus for sequential color imaging 416 1994
5,602,671 Low surface energy passivation layer for micromechanical devices 281 1994
5,606,441 Multiple phase light modulation using binary addressing 228 1994
5,444,566 Optimized electronic operation of digital micromirror devices 364 1994
5,665,997 Grated landing area to eliminate sticking of micro-mechanical devices 307 1994
5,526,688 Digital flexure beam accelerometer and method 215 1994
5,523,803 DMD architecture and timing for use in a pulse-width modulated display system 288 1994
6,061,075 Non-systolic time delay and integration printing 188 1994
5,497,172 Pulse width modulation for spatial light modulator with split reset addressing 317 1994
5,454,906 Method of providing sacrificial spacer for micro-mechanical devices 287 1994
5,499,062 Multiplexed memory timing with block reset and secondary memory 267 1994
5,548,301 Pixel control circuitry for spatial light modulator 257 1994
5,650,881 Support post architecture for micromechanical devices 267 1994
5,552,924 Micromechanical device having an improved beam 252 1994
5,610,624 Spatial light modulator with reduced possibility of an on state defect 208 1994
5,659,374 Method of repairing defective pixels 212 1994
5,567,334 Method for creating a digital micromirror device using an aluminum hard mask 249 1995
6,049,317 System for imaging of light-sensitive media 261 1995
5,610,438 Micro-mechanical device with non-evaporable getter 301 1995
5,515,076 Multi-dimensional array video processor system 253 1995
6,232,936 DMD Architecture to improve horizontal resolution 218 1995
5,535,047 Active yoke hidden hinge digital micromirror device 476 1995
5,619,365 Elecronically tunable optical periodic surface filters with an alterable resonant frequency 242 1995
5,619,366 Controllable surface filter 237 1995
5,551,293 Micro-machined accelerometer array with shield plane 228 1995
5,570,135 Method and device for multi-format television 234 1995
5,589,852 Apparatus and method for image projection with pixel intensity control 282 1995
5,597,736 High-yield spatial light modulator with light blocking layer 255 1995
5,600,383 Multi-level deformable mirror device with torsion hinges placed in a layer different from the torsion beam layer 415 1995
5,608,468 Method and device for multi-format television 254 1995
5,610,625 Monolithic spatial light modulator and memory package 191 1995
5,646,768 Support posts for micro-mechanical devices 312 1995
5,745,193 DMD architecture and timing for use in a pulse-width modulated display system 228 1995
6,099,132 Manufacture method for micromechanical devices 214 1995
6,447,126 Support post architecture for micromechanical devices 333 1995
5,657,099 Color phase control for projection display using spatial light modulator 214 1995
5,654,741 Spatial light modulator display pointing device 199 1995
5,784,212 Method of making a support post for a micromechanical device 241 1996
5,771,116 Multiple bias level reset waveform for enhanced DMD control 293 1996
5,842,088 Method of calibrating a spatial light modulator printing system 265 1997
5,939,785 Micromechanical device including time-release passivant 123 1997
5,912,758 Bipolar reset for spatial light modulators 211 1998
5,936,758 Method of passivating a micromechanical device within a hermetic package 74 1998
6,480,177 Blocked stepped address voltage for micromechanical devices 199 1998
6,028,690 Reduced micromirror mirror gaps for improved contrast ratio 296 1998
6,282,010 Anti-reflective coatings for spatial light modulators 296 1999
6,323,982 Yield superstructure for digital micromirror device 269 1999
6,295,154 Optical switching apparatus 304 1999
6,147,790 Spring-ring micromechanical device 246 1999
6,038,056 Spatial light modulator having improved contrast ratio 269 1999
6,473,274 Symmetrical microactuator structure for use in mass data storage devices, or the like 199 2000
6,549,338 Bandpass filter to reduce thermal impact of dichroic light shift 219 2000
6,552,840 Electrostatic efficiency of micromechanical devices 242 2000
6,466,358 Analog pulse width modulation cell for digital micromechanical device 221 2000
6,778,155 Display operation with inserted block clears 188 2001
6,643,069 SLM-base color projection display having multiple SLM's and multiple projection lenses 228 2001
6,775,174 Memory architecture for micromirror cell 187 2001
6,625,047 Micromechanical memory element 262 2001
* 6,876,071 Masking layer in substrate cavity 3 2002
6,741,503 SLM display data address mapping for four bank frame buffer 187 2002
 
GEORGIA TECH RESEARCH CORPORATION (1)
5,401,983 Processes for lift-off of thin film materials or devices for fabricating three dimensional integrated circuits, optical detectors, and micromechanical devices 267 1993
 
PROMOS TECHNOLOGIES INC. (1)
6,855,610 Method of forming self-aligned contact structure with locally etched gate conductive layer 198 2002
 
QINETIQ LIMITED (1)
4,790,635 Electro-optical device 223 1987
 
ETALON, INC. (1)
2003/0072,070 Visible spectrum modulator arrays 279 2002
 
AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD. (2)
5,745,281 Electrostatically-driven light modulator and display 302 1996
6,787,897 Wafer-level package with silicon gasket 21 2001
 
XEROX CORPORATION (6)
6,160,833 Blue vertical cavity surface emitting laser 210 1998
6,180,428 Monolithic scanning light emitting devices using micromachining 192 1998
6,201,633 Micro-electromechanical based bistable color display sheets 278 1999
6,545,335 Structure and method for electrical isolation of optoelectronic integrated circuits 199 1999
6,548,908 Structure and method for planar lateral oxidation in passive devices 188 1999
6,674,090 Structure and method for planar lateral oxidation in active 173 1999
 
NOBEX CORPORATION (1)
6,600,201 Systems with high density packing of micromachines 208 2001
 
MASSACHUSETTS INSTITUTE OF TECHNOLOGY (2)
5,022,745 Electrostatically deformable single crystal dielectrically coated mirror 356 1989
5,233,459 Electric display device 361 1991
 
Quantum Diagnostics Ltd. (1)
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MITSUBISHI GAS CHEMICAL COMPANY, INC. (1)
5,853,662 Method for preserving polished inorganic glass and method for preserving article obtained by using the same 43 1996
 
SHARP KABUSHIKI KAISHA (1)
6,113,239 Projection display system for reflective light valves 258 1998
 
GLOBAL OLED TECHNOLOGY LLC (3)
6,226,890 Desiccation of moisture-sensitive electronic devices 127 2000
* 6,740,145 Desiccants and desiccant packages for highly moisture-sensitive electronic devices 22 2001
6,590,157 Sealing structure for highly moisture-sensitive electronic device element and method for fabrication 10 2001
 
DOW CORNING S.A. (1)
6,238,755 Insulating glass units 59 1998
 
THE REGENTS OF THE UNIVERSITY OF MICHIGAN (1)
6,696,645 On-wafer packaging for RF-MEMS 11 2002
 
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SHARP LABORATORIES OF AMERICA, INC. (3)
6,496,122 Image display and remote control system capable of displaying two distinct images 346 1998
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GENESIS MICROCHIP INC. (1)
6,551,838 Microfabricated devices for the storage and selective exposure of chemicals and devices 138 2001
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (2)
5,311,360 Method and apparatus for modulating a light beam 580 1992
5,459,610 Deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate 311 1993
 
FORD MOTOR COMPANY (1)
4,977,009 Composite polymer/desiccant coatings for IC encapsulation 62 1990
 
QUALCOMM MEMS TECHNOLOGIES, INC. (15)
5,835,255 Visible spectrum modulator arrays 520 1994
6,040,937 Interferometric modulation 653 1996
5,986,796 Visible spectrum modulator arrays 500 1996
6,674,562 Interferometric modulation of radiation 696 1998
6,055,090 Interferometric modulation 463 1999
6,589,625 Hermetic seal and method to create the same 299 2001
6,867,896 Interferometric modulation of radiation 405 2001
6,680,792 Interferometric modulation of radiation 528 2001
6,650,455 Photonic mems and structures 525 2001
2002/0075,555 Interferometric modulation of radiation 430 2001
6,794,119 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 405 2002
6,710,908 Controlling micro-electro-mechanical cavities 358 2002
6,574,033 Microelectromechanical systems device and method for fabricating same 471 2002
6,741,377 Device having a light-absorbing mask and a method for fabricating same 297 2002
2004/0240,032 Interferometric modulation of radiation 310 2004
 
HONEYWELL INTERNATIONAL INC. (2)
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Honeywell Inc. (1)
4,377,324 Graded index Fabry-Perot optical filter device 242 1980
 
ANALOG DEVICES, INC. (1)
2002/0075,551 Enclosure for MEMS apparatus and method of using the same 42 2001
 
GEMFIRE CORPORATION (1)
5,703,710 Method for manipulating optical energy using poled structure 200 1994
 
EASTMAN KODAK COMPANY (1)
5,075,796 Optical article for multicolor imaging 209 1990
 
NATIONAL RESEARCH COUNCIL OF CANADA (1)
5,619,059 Color deformable mirror device having optical thin film interference color coatings 235 1994
 
ALPHA FRY LIMITED (3)
5,244,707 Enclosure for electronic devices 96 1992
5,304,419 Moisture and particle getter for enclosures 133 1992
5,591,379 Moisture getting composition for hermetic microelectronic devices 106 1993
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (1)
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AT&T CORP. (1)
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* Cited By Examiner

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
Pitronix, Inc. (1)
8,262,274 Light guides and backlight systems incorporating light redirectors at varying densities 2 2011
 
QUALCOMM MEMS TECHNOLOGIES, INC. (2)
7,550,912 Method and system for maintaining partial vacuum in display device 1 2005
8,410,690 Display device with desiccant 0 2009
 
HONEYWELL INTERNATIONAL INC. (1)
* 7,800,190 Getter on die in an upper sense plate designed system 0 2008
 
PIXTRONIX, INC. (21)
7,405,852 Display apparatus and methods for manufacture thereof 45 2006
7,876,489 Display apparatus with optical cavities 32 2006
7,619,806 Methods and apparatus for spatial light modulation 9 2006
8,310,442 Circuits for controlling display apparatus 5 2006
7,675,665 Methods and apparatus for actuating displays 11 2007
8,482,496 Circuits for controlling MEMS display apparatus on a transparent substrate 0 2007
7,636,189 Display methods and apparatus 5 2007
7,551,344 Methods for manufacturing displays 10 2007
7,927,654 Methods and apparatus for spatial light modulation 14 2007
7,852,546 Spacers for maintaining display apparatus alignment 11 2007
7,746,529 MEMS display apparatus 13 2007
8,519,945 Circuits for controlling display apparatus 0 2007
7,920,317 Display with controlled formation of bubbles 8 2008
8,248,560 Light guides and backlight systems incorporating prismatic structures and light redirectors 1 2008
8,526,096 Mechanical light modulators with stressed beams 0 2009
8,520,285 Methods for manufacturing cold seal fluid-filled display apparatus 1 2011
8,519,923 Display methods and apparatus 0 2012
8,599,463 MEMS anchors 0 2012
8,441,602 Light guides and backlight systems incorporating prismatic structures and light redirectors 2 2012
8,545,084 Light guides and backlight systems incorporating light redirectors at varying densities 0 2012
8,891,152 Methods for manufacturing cold seal fluid-filled display apparatus 0 2013
* Cited By Examiner

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