US Patent No: 7,161,094

Number of patents in Portfolio can not be more than 2000

Modifying the electro-mechanical behavior of devices

ALSO PUBLISHED AS: 20060219435
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Abstract

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A MEMS device is packaged with a control material that is included in the package to affect an operation of a moveable element of the device. The control material may affect operational characteristics including actuation and release voltages and currents, mechanical affects including damping and stiffness, lifetime of the device, optical properties, thermal affects and corrosion. The control material may be inserted into the package as part of any of several structural components of the package or the MEMS device.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
QUALCOMM MEMS TECHNOLOGIES, INC.SAN DIEGO, CA698

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chui, Clarence San Mateo, CA 181 3688
Kothari, Manish Redwood City, CA 187 2514
Palmateer, Lauren San Francisco, CA 34 360

Cited Art Landscape

Patent Info (Count) # Cites Year
 
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SANDIA CORPORATION (2)
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6,379,988 Pre-release plastic packaging of MEMS and IMEMS devices 88 2000
 
Northrop Corporation (1)
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HEWLETT-PACKARD COMPANY (2)
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HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (13)
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U.S. PHILIPS CORPORATION (4)
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UNITED TEST AND ASSEMBLY CENTER LTD. (1)
2004/0140,557 Wl-bga for MEMS/MOEMS devices 90 2003
 
COLIBRYS SA (2)
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MOTOROLA, INC. (1)
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INFINEON TECHNOLOGIES AG (1)
* 7,011,986 Method for manufacturing a housing for a chip with a micromechanical structure 8 2004
 
BAKER, JOHN M. (1)
5,784,190 Electro-micro-mechanical shutters on transparent substrates 261 1995
 
TEXAS INSTRUMENTS INCORPORATED (127)
4,500,171 Process for plastic LCD fill hole sealing 217 1982
4,441,791 Deformable mirror light modulator 647 1982
4,482,213 Perimeter seal reinforcement holes for plastic LCDs 231 1982
4,571,603 Deformable mirror electrostatic printer 373 1984
4,566,935 Spatial light modulator and method 528 1984
4,710,732 Spatial light modulator and method 497 1984
4,596,992 Linear spatial light modulator and printer 413 1984
4,615,595 Frame addressed spatial light modulator 403 1984
4,662,746 Spatial light modulator and method 503 1985
4,856,863 Optical fiber interconnection network including spatial light modulator 291 1988
4,956,619 Spatial light modulator 592 1988
5,079,544 Standard independent digitized video system 355 1989
5,028,939 Spatial light modulator system 404 1989
4,954,789 Spatial light modulator 587 1989
5,037,173 Optical interconnection network 333 1989
5,018,256 Architecture and process for integrating DMD with control circuit substrates 310 1990
5,083,857 Multi-level deformable mirror device 545 1990
5,142,405 Bistable DMD addressing circuit and method 350 1990
5,061,049 Spatial light modulator and method 745 1990
5,192,395 Method of making a digital flexure beam accelerometer 213 1990
5,096,279 Spatial light modulator and method 525 1990
5,099,353 Architecture and process for integrating DMD with control circuit substrates 325 1991
5,226,099 Digital micromirror shutter device 381 1991
5,162,787 Apparatus and method for digitized video system utilizing a moving display surface 258 1991
5,170,156 Multi-frequency two dimensional display system 263 1991
5,192,946 Digitized color video display system 336 1991
5,214,419 Planarized true three dimensional display 266 1991
5,214,420 Spatial light modulator projection system with random polarity light 307 1991
5,206,629 Spatial light modulator and memory for digitized video display 259 1991
5,179,274 Method for controlling operation of optical systems and devices 240 1991
5,168,406 Color deformable mirror device and method for manufacture 294 1991
5,254,980 DMD display system controller 250 1991
5,563,398 Spatial light modulator scanning system 213 1991
5,233,385 White light enhanced color field sequential projection 390 1991
5,233,456 Resonant mirror and method of manufacture 314 1991
5,216,537 Architecture and process for integrating DMD with control circuit substrates 389 1992
5,331,454 Low reset voltage process for DMD 357 1992
5,296,950 Optical signal free-space conversion board 238 1992
5,231,532 Switchable resonant filter for optical radiation 258 1992
5,312,513 Methods of forming multiple phase light modulators 292 1992
5,172,262 Spatial light modulator and method 396 1992
5,305,640 Digital flexure beam accelerometer 199 1992
5,446,479 Multi-dimensional array video processor system 261 1992
5,818,095 High-yield spatial light modulator with light blocking layer 325 1992
5,272,473 Reduced-speckle display system 298 1992
5,327,286 Real time optical correlation system 284 1992
5,287,096 Variable luminosity display system 280 1992
5,325,116 Device for writing to and reading from optical storage media 265 1992
5,280,277 Field updated deformable mirror device 344 1992
5,506,597 Apparatus and method for image projection 294 1992
5,457,566 DMD scanner 251 1992
5,278,652 DMD architecture and timing for use in a pulse width modulated display system 362 1993
5,461,411 Process and architecture for digital micromirror printer 311 1993
5,323,002 Spatial light modulator based optical calibration system 286 1993
5,489,952 Method and device for multi-format television 341 1993
5,365,283 Color phase control for projection display using spatial light modulator 297 1993
5,526,172 Microminiature, monolithic, variable electrical signal processor and apparatus including same 427 1993
5,581,272 Signal generator for controlling a spatial light modulator 206 1993
5,457,493 Digital micro-mirror based image simulation system 347 1993
5,411,769 Method of producing micromechanical devices 271 1993
5,339,116 DMD architecture and timing for use in a pulse-width modulated display system 301 1993
5,526,051 Digital television system 277 1993
5,459,602 Micro-mechanical optical shutter 227 1993
5,452,024 DMD display system 435 1993
5,497,197 System and method for packaging data into video processor 242 1993
5,517,347 Direct view deformable mirror device 322 1993
5,583,688 Multi-level digital micromirror device 482 1993
5,448,314 Method and apparatus for sequential color imaging 424 1994
5,602,671 Low surface energy passivation layer for micromechanical devices 286 1994
5,606,441 Multiple phase light modulation using binary addressing 236 1994
5,444,566 Optimized electronic operation of digital micromirror devices 369 1994
5,665,997 Grated landing area to eliminate sticking of micro-mechanical devices 315 1994
5,526,688 Digital flexure beam accelerometer and method 219 1994
5,523,803 DMD architecture and timing for use in a pulse-width modulated display system 294 1994
6,061,075 Non-systolic time delay and integration printing 192 1994
5,497,172 Pulse width modulation for spatial light modulator with split reset addressing 327 1994
5,454,906 Method of providing sacrificial spacer for micro-mechanical devices 291 1994
5,499,062 Multiplexed memory timing with block reset and secondary memory 271 1994
5,548,301 Pixel control circuitry for spatial light modulator 263 1994
5,650,881 Support post architecture for micromechanical devices 271 1994
5,552,924 Micromechanical device having an improved beam 257 1994
5,610,624 Spatial light modulator with reduced possibility of an on state defect 212 1994
5,659,374 Method of repairing defective pixels 216 1994
5,567,334 Method for creating a digital micromirror device using an aluminum hard mask 256 1995
6,049,317 System for imaging of light-sensitive media 271 1995
5,610,438 Micro-mechanical device with non-evaporable getter 305 1995
5,515,076 Multi-dimensional array video processor system 257 1995
6,232,936 DMD Architecture to improve horizontal resolution 222 1995
5,535,047 Active yoke hidden hinge digital micromirror device 481 1995
5,619,365 Elecronically tunable optical periodic surface filters with an alterable resonant frequency 251 1995
5,619,366 Controllable surface filter 246 1995
5,551,293 Micro-machined accelerometer array with shield plane 232 1995
5,570,135 Method and device for multi-format television 239 1995
5,589,852 Apparatus and method for image projection with pixel intensity control 286 1995
5,597,736 High-yield spatial light modulator with light blocking layer 263 1995
5,600,383 Multi-level deformable mirror device with torsion hinges placed in a layer different from the torsion beam layer 423 1995
5,608,468 Method and device for multi-format television 258 1995
5,610,625 Monolithic spatial light modulator and memory package 195 1995
5,646,768 Support posts for micro-mechanical devices 319 1995
5,745,193 DMD architecture and timing for use in a pulse-width modulated display system 235 1995
6,099,132 Manufacture method for micromechanical devices 218 1995
6,447,126 Support post architecture for micromechanical devices 337 1995
5,657,099 Color phase control for projection display using spatial light modulator 218 1995
5,654,741 Spatial light modulator display pointing device 205 1995
5,784,212 Method of making a support post for a micromechanical device 245 1996
5,771,116 Multiple bias level reset waveform for enhanced DMD control 300 1996
5,842,088 Method of calibrating a spatial light modulator printing system 272 1997
5,939,785 Micromechanical device including time-release passivant 123 1997
5,912,758 Bipolar reset for spatial light modulators 215 1998
5,936,758 Method of passivating a micromechanical device within a hermetic package 74 1998
6,480,177 Blocked stepped address voltage for micromechanical devices 203 1998
6,028,690 Reduced micromirror mirror gaps for improved contrast ratio 305 1998
6,282,010 Anti-reflective coatings for spatial light modulators 304 1999
6,323,982 Yield superstructure for digital micromirror device 274 1999
6,295,154 Optical switching apparatus 309 1999
6,147,790 Spring-ring micromechanical device 251 1999
6,038,056 Spatial light modulator having improved contrast ratio 273 1999
6,473,274 Symmetrical microactuator structure for use in mass data storage devices, or the like 203 2000
6,549,338 Bandpass filter to reduce thermal impact of dichroic light shift 226 2000
6,552,840 Electrostatic efficiency of micromechanical devices 248 2000
6,466,358 Analog pulse width modulation cell for digital micromechanical device 228 2000
6,778,155 Display operation with inserted block clears 192 2001
6,643,069 SLM-base color projection display having multiple SLM's and multiple projection lenses 236 2001
6,775,174 Memory architecture for micromirror cell 191 2001
6,625,047 Micromechanical memory element 269 2001
* 6,876,071 Masking layer in substrate cavity 4 2002
6,741,503 SLM display data address mapping for four bank frame buffer 191 2002
 
GEORGIA TECH RESEARCH CORPORATION (1)
5,401,983 Processes for lift-off of thin film materials or devices for fabricating three dimensional integrated circuits, optical detectors, and micromechanical devices 277 1993
 
QINETIQ LIMITED (1)
4,790,635 Electro-optical device 230 1987
 
PROMOS TECHNOLOGIES INC. (1)
6,855,610 Method of forming self-aligned contact structure with locally etched gate conductive layer 202 2002
 
ETALON, INC. (1)
2003/0072,070 Visible spectrum modulator arrays 280 2002
 
AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD. (2)
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6,787,897 Wafer-level package with silicon gasket 23 2001
 
XEROX CORPORATION (6)
6,160,833 Blue vertical cavity surface emitting laser 214 1998
6,180,428 Monolithic scanning light emitting devices using micromachining 196 1998
6,201,633 Micro-electromechanical based bistable color display sheets 287 1999
6,545,335 Structure and method for electrical isolation of optoelectronic integrated circuits 203 1999
6,548,908 Structure and method for planar lateral oxidation in passive devices 192 1999
6,674,090 Structure and method for planar lateral oxidation in active 178 1999
 
NOBEX CORPORATION (1)
6,600,201 Systems with high density packing of micromachines 212 2001
 
MASSACHUSETTS INSTITUTE OF TECHNOLOGY (2)
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Quantum Diagnostics Ltd. (1)
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SHARP KABUSHIKI KAISHA (1)
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GLOBAL OLED TECHNOLOGY LLC (3)
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DOW CORNING S.A. (1)
6,238,755 Insulating glass units 59 1998
 
THE REGENTS OF THE UNIVERSITY OF MICHIGAN (1)
6,696,645 On-wafer packaging for RF-MEMS 11 2002
 
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THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (2)
5,311,360 Method and apparatus for modulating a light beam 591 1992
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FORD MOTOR COMPANY (1)
4,977,009 Composite polymer/desiccant coatings for IC encapsulation 63 1990
 
QUALCOMM MEMS TECHNOLOGIES, INC. (15)
5,835,255 Visible spectrum modulator arrays 541 1994
6,040,937 Interferometric modulation 675 1996
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6,674,562 Interferometric modulation of radiation 727 1998
6,055,090 Interferometric modulation 476 1999
6,589,625 Hermetic seal and method to create the same 314 2001
6,867,896 Interferometric modulation of radiation 418 2001
6,680,792 Interferometric modulation of radiation 552 2001
6,650,455 Photonic mems and structures 547 2001
2002/0075,555 Interferometric modulation of radiation 443 2001
6,794,119 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 427 2002
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6,574,033 Microelectromechanical systems device and method for fabricating same 497 2002
6,741,377 Device having a light-absorbing mask and a method for fabricating same 314 2002
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Gemfire Corporation (1)
5,703,710 Method for manipulating optical energy using poled structure 207 1994
 
EASTMAN KODAK COMPANY (1)
5,075,796 Optical article for multicolor imaging 216 1990
 
NATIONAL RESEARCH COUNCIL OF CANADA (1)
5,619,059 Color deformable mirror device having optical thin film interference color coatings 242 1994
 
ALPHA FRY LIMITED (3)
5,244,707 Enclosure for electronic devices 97 1992
5,304,419 Moisture and particle getter for enclosures 135 1992
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AT&T CORP. (1)
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* Cited By Examiner

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
Pitronix, Inc. (1)
8,262,274 Light guides and backlight systems incorporating light redirectors at varying densities 2 2011
 
QUALCOMM MEMS TECHNOLOGIES, INC. (2)
7,550,912 Method and system for maintaining partial vacuum in display device 1 2005
8,410,690 Display device with desiccant 0 2009
 
HONEYWELL INTERNATIONAL INC. (1)
* 7,800,190 Getter on die in an upper sense plate designed system 0 2008
 
PIXTRONIX, INC. (23)
7,405,852 Display apparatus and methods for manufacture thereof 53 2006
7,876,489 Display apparatus with optical cavities 38 2006
7,619,806 Methods and apparatus for spatial light modulation 11 2006
8,310,442 Circuits for controlling display apparatus 6 2006
7,675,665 Methods and apparatus for actuating displays 13 2007
8,482,496 Circuits for controlling MEMS display apparatus on a transparent substrate 0 2007
7,636,189 Display methods and apparatus 7 2007
7,551,344 Methods for manufacturing displays 12 2007
7,927,654 Methods and apparatus for spatial light modulation 17 2007
7,852,546 Spacers for maintaining display apparatus alignment 14 2007
7,746,529 MEMS display apparatus 15 2007
8,519,945 Circuits for controlling display apparatus 1 2007
7,920,317 Display with controlled formation of bubbles 10 2008
8,248,560 Light guides and backlight systems incorporating prismatic structures and light redirectors 1 2008
8,526,096 Mechanical light modulators with stressed beams 0 2009
9,082,353 Circuits for controlling display apparatus 0 2010
9,087,486 Circuits for controlling display apparatus 0 2011
8,520,285 Methods for manufacturing cold seal fluid-filled display apparatus 1 2011
8,519,923 Display methods and apparatus 0 2012
8,599,463 MEMS anchors 2 2012
8,441,602 Light guides and backlight systems incorporating prismatic structures and light redirectors 3 2012
8,545,084 Light guides and backlight systems incorporating light redirectors at varying densities 0 2012
8,891,152 Methods for manufacturing cold seal fluid-filled display apparatus 0 2013
* Cited By Examiner

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