US Patent No: 7,161,094

Number of patents in Portfolio can not be more than 2000

Modifying the electro-mechanical behavior of devices

ALSO PUBLISHED AS: 20060219435

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Abstract

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A MEMS device is packaged with a control material that is included in the package to affect an operation of a moveable element of the device. The control material may affect operational characteristics including actuation and release voltages and currents, mechanical affects including damping and stiffness, lifetime of the device, optical properties, thermal affects and corrosion. The control material may be inserted into the package as part of any of several structural components of the package or the MEMS device.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
QUALCOMM MEMS TECHNOLOGIES, INC.SAN DIEGO, CA666

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chui, Clarence San Jose, CA 319 5370
Kothari, Manish Cupertino, CA 308 3798
Palmateer, Lauren San Francisco, CA 61 466

Cited Art Landscape

Patent Info (Count) # Cites Year
 
TEXAS INSTRUMENTS INCORPORATED (127)
4,500,171 Process for plastic LCD fill hole sealing 207 1982
4,441,791 Deformable mirror light modulator 621 1982
4,482,213 Perimeter seal reinforcement holes for plastic LCDs 221 1982
4,571,603 Deformable mirror electrostatic printer 362 1984
4,566,935 Spatial light modulator and method 508 1984
4,710,732 Spatial light modulator and method 487 1984
4,596,992 Linear spatial light modulator and printer 391 1984
4,615,595 Frame addressed spatial light modulator 393 1984
4,662,746 Spatial light modulator and method 491 1985
4,856,863 Optical fiber interconnection network including spatial light modulator 281 1988
4,956,619 Spatial light modulator 577 1988
5,079,544 Standard independent digitized video system 345 1989
5,028,939 Spatial light modulator system 390 1989
4,954,789 Spatial light modulator 563 1989
5,037,173 Optical interconnection network 316 1989
5,018,256 Architecture and process for integrating DMD with control circuit substrates 299 1990
5,083,857 Multi-level deformable mirror device 530 1990
5,142,405 Bistable DMD addressing circuit and method 337 1990
5,061,049 Spatial light modulator and method 730 1990
5,192,395 Method of making a digital flexure beam accelerometer 203 1990
5,096,279 Spatial light modulator and method 506 1990
5,099,353 Architecture and process for integrating DMD with control circuit substrates 314 1991
5,226,099 Digital micromirror shutter device 364 1991
5,162,787 Apparatus and method for digitized video system utilizing a moving display surface 248 1991
5,170,156 Multi-frequency two dimensional display system 253 1991
5,192,946 Digitized color video display system 322 1991
5,214,419 Planarized true three dimensional display 256 1991
5,214,420 Spatial light modulator projection system with random polarity light 297 1991
5,206,629 Spatial light modulator and memory for digitized video display 249 1991
5,179,274 Method for controlling operation of optical systems and devices 230 1991
5,168,406 Color deformable mirror device and method for manufacture 280 1991
5,254,980 DMD display system controller 240 1991
5,563,398 Spatial light modulator scanning system 201 1991
5,233,385 White light enhanced color field sequential projection 372 1991
5,233,456 Resonant mirror and method of manufacture 302 1991
5,216,537 Architecture and process for integrating DMD with control circuit substrates 378 1992
5,331,454 Low reset voltage process for DMD 346 1992
5,296,950 Optical signal free-space conversion board 228 1992
5,231,532 Switchable resonant filter for optical radiation 243 1992
5,312,513 Methods of forming multiple phase light modulators 275 1992
5,172,262 Spatial light modulator and method 386 1992
5,305,640 Digital flexure beam accelerometer 189 1992
5,446,479 Multi-dimensional array video processor system 251 1992
5,818,095 High-yield spatial light modulator with light blocking layer 307 1992
5,272,473 Reduced-speckle display system 286 1992
5,327,286 Real time optical correlation system 273 1992
5,287,096 Variable luminosity display system 270 1992
5,325,116 Device for writing to and reading from optical storage media 254 1992
5,280,277 Field updated deformable mirror device 331 1992
5,506,597 Apparatus and method for image projection 283 1992
5,457,566 DMD scanner 241 1992
5,278,652 DMD architecture and timing for use in a pulse width modulated display system 349 1993
5,461,411 Process and architecture for digital micromirror printer 298 1993
5,323,002 Spatial light modulator based optical calibration system 275 1993
5,489,952 Method and device for multi-format television 330 1993
5,365,283 Color phase control for projection display using spatial light modulator 283 1993
5,526,172 Microminiature, monolithic, variable electrical signal processor and apparatus including same 405 1993
5,581,272 Signal generator for controlling a spatial light modulator 196 1993
5,457,493 Digital micro-mirror based image simulation system 323 1993
5,411,769 Method of producing micromechanical devices 261 1993
5,339,116 DMD architecture and timing for use in a pulse-width modulated display system 288 1993
5,526,051 Digital television system 263 1993
5,459,602 Micro-mechanical optical shutter 217 1993
5,452,024 DMD display system 420 1993
5,497,197 System and method for packaging data into video processor 232 1993
5,517,347 Direct view deformable mirror device 302 1993
5,583,688 Multi-level digital micromirror device 465 1993
5,448,314 Method and apparatus for sequential color imaging 409 1994
5,602,671 Low surface energy passivation layer for micromechanical devices 275 1994
5,606,441 Multiple phase light modulation using binary addressing 221 1994
5,444,566 Optimized electronic operation of digital micromirror devices 358 1994
5,665,997 Grated landing area to eliminate sticking of micro-mechanical devices 300 1994
5,526,688 Digital flexure beam accelerometer and method 209 1994
5,523,803 DMD architecture and timing for use in a pulse-width modulated display system 281 1994
6,061,075 Non-systolic time delay and integration printing 182 1994
5,497,172 Pulse width modulation for spatial light modulator with split reset addressing 309 1994
5,454,906 Method of providing sacrificial spacer for micro-mechanical devices 281 1994
5,499,062 Multiplexed memory timing with block reset and secondary memory 261 1994
5,548,301 Pixel control circuitry for spatial light modulator 250 1994
5,650,881 Support post architecture for micromechanical devices 261 1994
5,552,924 Micromechanical device having an improved beam 246 1994
5,610,624 Spatial light modulator with reduced possibility of an on state defect 202 1994
5,659,374 Method of repairing defective pixels 206 1994
5,567,334 Method for creating a digital micromirror device using an aluminum hard mask 241 1995
6,049,317 System for imaging of light-sensitive media 252 1995
5,610,438 Micro-mechanical device with non-evaporable getter 295 1995
5,515,076 Multi-dimensional array video processor system 247 1995
6,232,936 DMD Architecture to improve horizontal resolution 212 1995
5,535,047 Active yoke hidden hinge digital micromirror device 463 1995
5,619,365 Elecronically tunable optical periodic surface filters with an alterable resonant frequency 235 1995
5,619,366 Controllable surface filter 230 1995
5,551,293 Micro-machined accelerometer array with shield plane 221 1995
5,570,135 Method and device for multi-format television 227 1995
5,589,852 Apparatus and method for image projection with pixel intensity control 276 1995
5,597,736 High-yield spatial light modulator with light blocking layer 248 1995
5,600,383 Multi-level deformable mirror device with torsion hinges placed in a layer different from the torsion beam layer 404 1995
5,608,468 Method and device for multi-format television 248 1995
5,610,625 Monolithic spatial light modulator and memory package 185 1995
5,646,768 Support posts for micro-mechanical devices 304 1995
5,745,193 DMD architecture and timing for use in a pulse-width modulated display system 221 1995
6,099,132 Manufacture method for micromechanical devices 208 1995
6,447,126 Support post architecture for micromechanical devices 327 1995
5,657,099 Color phase control for projection display using spatial light modulator 208 1995
5,654,741 Spatial light modulator display pointing device 193 1995
5,784,212 Method of making a support post for a micromechanical device 235 1996
5,771,116 Multiple bias level reset waveform for enhanced DMD control 286 1996
5,842,088 Method of calibrating a spatial light modulator printing system 257 1997
5,939,785 Micromechanical device including time-release passivant 123 1997
5,912,758 Bipolar reset for spatial light modulators 205 1998
5,936,758 Method of passivating a micromechanical device within a hermetic package 74 1998
6,480,177 Blocked stepped address voltage for micromechanical devices 193 1998
6,028,690 Reduced micromirror mirror gaps for improved contrast ratio 289 1998
6,282,010 Anti-reflective coatings for spatial light modulators 289 1999
6,323,982 Yield superstructure for digital micromirror device 263 1999
6,295,154 Optical switching apparatus 298 1999
6,147,790 Spring-ring micromechanical device 240 1999
6,038,056 Spatial light modulator having improved contrast ratio 263 1999
6,473,274 Symmetrical microactuator structure for use in mass data storage devices, or the like 193 2000
6,549,338 Bandpass filter to reduce thermal impact of dichroic light shift 212 2000
6,552,840 Electrostatic efficiency of micromechanical devices 236 2000
6,466,358 Analog pulse width modulation cell for digital micromechanical device 214 2000
6,778,155 Display operation with inserted block clears 182 2001
6,643,069 SLM-base color projection display having multiple SLM's and multiple projection lenses 221 2001
6,775,174 Memory architecture for micromirror cell 181 2001
6,625,047 Micromechanical memory element 255 2001
6,876,071 Masking layer in substrate cavity 3 2002
6,741,503 SLM display data address mapping for four bank frame buffer 181 2002
 
QUALCOMM MEMS TECHNOLOGIES, INC. (15)
5,835,255 Visible spectrum modulator arrays 506 1994
6,040,937 Interferometric modulation 637 1996
5,986,796 Visible spectrum modulator arrays 487 1996
6,674,562 Interferometric modulation of radiation 676 1998
6,055,090 Interferometric modulation 452 1999
6,589,625 Hermetic seal and method to create the same 287 2001
6,867,896 Interferometric modulation of radiation 396 2001
6,680,792 Interferometric modulation of radiation 512 2001
6,650,455 Photonic mems and structures 508 2001
2002/0075,555 Interferometric modulation of radiation 419 2001
6,794,119 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 390 2002
6,710,908 Controlling micro-electro-mechanical cavities 345 2002
6,574,033 Microelectromechanical systems device and method for fabricating same 455 2002
6,741,377 Device having a light-absorbing mask and a method for fabricating same 283 2002
2004/0240,032 Interferometric modulation of radiation 305 2004
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (13)
6,862,029 Color display system 196 1999
6,859,218 Electronic display devices and methods 182 2000
6,862,022 Method and system for automatically selecting a vertical refresh rate for a video display monitor 209 2001
6,632,698 Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS 274 2001
2003/0202,264 Micro-mirror device 202 2002
6,747,785 MEMS-actuated color light modulator and methods 215 2002
6,666,561 Continuously variable analog micro-mirror device 229 2002
2004/0147,056 Micro-fabricated device and method of making 191 2003
6,829,132 Charge control of micro-electromechanical device 211 2003
6,811,267 Display system with nonvisible data projection 225 2003
2005/0057,442 Adjacent display of sequential sub-images 204 2003
2005/0068,583 Organizing a digital image 178 2003
2004/0212,026 MEMS device having time-varying control 179 2004
 
XEROX CORPORATION (6)
6,160,833 Blue vertical cavity surface emitting laser 204 1998
6,180,428 Monolithic scanning light emitting devices using micromachining 186 1998
6,201,633 Micro-electromechanical based bistable color display sheets 270 1999
6,545,335 Structure and method for electrical isolation of optoelectronic integrated circuits 193 1999
6,548,908 Structure and method for planar lateral oxidation in passive devices 182 1999
6,674,090 Structure and method for planar lateral oxidation in active 167 1999
 
U.S. Philips Corporation (4)
4,403,248 Display device with deformable reflective medium 343 1981
4,519,676 Passive display device 243 1983
4,459,182 Method of manufacturing a display device 244 1983
4,681,403 Display device with micromechanical leaf spring switches 225 1986
 
ALPHA FRY LIMITED (3)
5,244,707 Enclosure for electronic devices 93 1992
5,304,419 Moisture and particle getter for enclosures 128 1992
5,591,379 Moisture getting composition for hermetic microelectronic devices 101 1993
 
CANON KABUSHIKI KAISHA (3)
6,630,786 Light-emitting device having light-reflective layer formed with, or/and adjacent to, material that enhances device performance 192 2001
6,822,628 Methods and systems for compensating row-to-row brightness variations of a field emission display 191 2001
6,853,129 Protected substrate structure for a field emission display device 186 2003
 
GLOBAL OLED TECHNOLOGY LLC (3)
6,226,890 Desiccation of moisture-sensitive electronic devices 120 2000
6,740,145 Desiccants and desiccant packages for highly moisture-sensitive electronic devices 22 2001
6,590,157 Sealing structure for highly moisture-sensitive electronic device element and method for fabrication 10 2001
 
LUCENT TECHNOLOGIES INC. (3)
5,636,052 Direct view display based on a micromechanical modulation 307 1994
5,825,528 Phase-mismatched fabry-perot cavity micromechanical modulator 320 1995
5,710,656 Micromechanical optical modulator having a reduced-mass composite membrane 278 1996
 
SHARP LABORATORIES OF AMERICA, INC. (3)
6,496,122 Image display and remote control system capable of displaying two distinct images 330 1998
6,606,175 Multi-segment light-emitting diode 182 1999
6,870,581 Single panel color video projection display using reflective banded color falling-raster illumination 205 2001
 
AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD. (2)
5,745,281 Electrostatically-driven light modulator and display 293 1996
6,787,897 Wafer-level package with silicon gasket 19 2001
 
COLIBRYS SA (2)
5,078,479 Light modulation device with matrix addressing 282 1991
5,579,149 Miniature network of light obturators 230 1994
 
HONEYWELL INTERNATIONAL INC. (2)
6,474,138 Adsorption based carbon monoxide sensor and method 7 2000
2005/0253,283 Getter deposition for vacuum packaging 47 2004
 
LOCKHEED MARTIN CORPORATION (2)
4,982,184 Electrocrystallochromic display and element 357 1989
5,124,834 Transferrable, self-supporting pellicle for elastomer light valve displays and method for making the same 254 1989
 
MASSACHUSETTS INSTITUTE OF TECHNOLOGY (2)
5,022,745 Electrostatically deformable single crystal dielectrically coated mirror 350 1989
5,233,459 Electric display device 354 1991
 
SANDIA CORPORATION (2)
6,392,144 Micromechanical die attachment surcharge 42 2000
6,379,988 Pre-release plastic packaging of MEMS and IMEMS devices 83 2000
 
SANDIA NATIONAL LABORATORIES (2)
6,661,084 Single level microelectronic device package with an integral window 98 2002
6,674,159 Bi-level microelectronic device package with an integral window 193 2002
 
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (2)
6,741,384 Control of MEMS and light modulator arrays 221 2003
6,861,277 Method of forming MEMS device 216 2003
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (2)
5,311,360 Method and apparatus for modulating a light beam 574 1992
5,459,610 Deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate 305 1993
 
ADVANCED SEMICONDUCTOR ENGINEERING, INC. (1)
2004/0184,133 MICROSYSTEM PACKAGE STRUCTURE 61 2003
 
ANALOG DEVICES, INC. (1)
2002/0075,551 Enclosure for MEMS apparatus and method of using the same 42 2001
 
AT&T CORP. (1)
5,500,761 Micromechanical modulator 337 1994
 
BAKER, JOHN M. (1)
5,784,190 Electro-micro-mechanical shutters on transparent substrates 253 1995
 
CARDIFF SOFTWARE, INC. (1)
2005/0196,074 Method and system for searching form features for form identification 2005
 
DOW CORNING S.A. (1)
6,238,755 Insulating glass units 59 1998
 
EASTMAN KODAK COMPANY (1)
5,075,796 Optical article for multicolor imaging 203 1990
 
ETALON, INC. (1)
2003/0072,070 Visible spectrum modulator arrays 276 2002
 
FORD MOTOR COMPANY (1)
4,977,009 Composite polymer/desiccant coatings for IC encapsulation 59 1990
 
GEMFIRE CORPORATION (1)
5,703,710 Method for manipulating optical energy using poled structure 194 1994
 
GENESIS MICROCHIP INC. (1)
6,551,838 Microfabricated devices for the storage and selective exposure of chemicals and devices 134 2001
 
GEORGIA TECH RESEARCH CORPORATION (1)
5,401,983 Processes for lift-off of thin film materials or devices for fabricating three dimensional integrated circuits, optical detectors, and micromechanical devices 262 1993
 
HEWLETT-PACKARD COMPANY (1)
6,465,355 Method of fabricating suspended microstructures 225 2001
 
Honeywell Inc. (1)
4,377,324 Graded index Fabry-Perot optical filter device 237 1980
 
INFINEON TECHNOLOGIES AG (1)
7,011,986 Method for manufacturing a housing for a chip with a micromechanical structure 7 2004
 
IRIDIGM DISPLAY CORPORATION (1)
2001/0003,487 VISIBLE SPECTRUM MODULATOR ARRAYS 295 1999
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (1)
4,389,096 Image display apparatus of liquid crystal valve projection type 278 1981
 
MEMSCAP S.A. (1)
6,472,739 Encapsulated microelectromechanical (MEMS) devices 29 1999
 
MITSUBISHI GAS CHEMICAL COMPANY, INC. (1)
5,853,662 Method for preserving polished inorganic glass and method for preserving article obtained by using the same 43 1996
 
MOTOROLA, INC. (1)
5,044,736 Configurable optical filter or display 218 1990
 
NATIONAL RESEARCH COUNCIL OF CANADA (1)
5,619,059 Color deformable mirror device having optical thin film interference color coatings 229 1994
 
NOBEX CORPORATION (1)
6,600,201 Systems with high density packing of micromachines 202 2001
 
Northrop Corporation (1)
5,153,771 Coherent light modulation and detector 178 1990
 
OCEAN POWER TECHNOLOGIES, INC. (1)
4,748,366 Novel uses of piezoelectric materials for creating optical effects 281 1986
 
POPKIN FAMILY ASSETS, L.L.C. (1)
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PROMOS TECHNOLOGIES INC. (1)
6,855,610 Method of forming self-aligned contact structure with locally etched gate conductive layer 192 2002
 
QINETIQ LIMITED (1)
4,790,635 Electro-optical device 218 1987
 
Quantum Diagnostics Ltd. (1)
4,786,128 Device for modulating and reflecting electromagnetic radiation employing electro-optic layer having a variable index of refraction 290 1986
 
SAMSUNG ELECTRONICS CO., LTD. (1)
7,045,885 Placement of absorbing material in a semiconductor device 9 2004
 
SHARP KABUSHIKI KAISHA (1)
6,113,239 Projection display system for reflective light valves 251 1998
 
Societe d'Etude du Radant (1)
4,531,126 Method and device for analyzing a very high frequency radiation beam of electromagnetic waves 183 1982
 
THE REGENTS OF THE UNIVERSITY OF COLORADO, A BODY CORPORATE (1)
5,381,253 Chiral smectic liquid crystal optical modulators having variable retardation 232 1991
 
THE REGENTS OF THE UNIVERSITY OF MICHIGAN (1)
6,696,645 On-wafer packaging for RF-MEMS 11 2002
 
The United States of America as represented by the Secretary of the Navy (1)
4,228,437 Wideband polarization-transforming electromagnetic mirror 174 1979
 
TRUSEAL TECHNOLOGIES, INC. (1)
4,431,691 Dimensionally stable sealant and spacer strip and composite structures comprising the same 111 1981
 
TYCO ELECTRONICS CORPORATION (1)
5,815,141 Resistive touchscreen having multiple selectable regions for pressure discrimination 138 1996
 
UNITED TEST AND ASSEMBLY CENTER LTD. (1)
2004/0140,557 Wl-bga for MEMS/MOEMS devices 83 2003
 
Other [Check patent profile for assignment information] (6)
4,445,050 Device for conversion of light power to electric power 191 1981
4,663,083 Electro-optical dipole suspension with reflective-absorptive-transmissive characteristics 178 1984
5,142,414 Electrically actuatable temporal tristimulus-color device 269 1991
5,500,635 Products incorporating piezoelectric material 289 1994
6,819,469 High-resolution spatial light modulator for 3-dimensional holographic display 244 2003
2005/0001,828 Charge control of micro-electromechanical device 179 2004

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
PIXTRONIX, INC. (20)
7,405,852 Display apparatus and methods for manufacture thereof 41 2006
7,876,489 Display apparatus with optical cavities 32 2006
7,619,806 Methods and apparatus for spatial light modulation 9 2006
8,310,442 Circuits for controlling display apparatus 5 2006
7,675,665 Methods and apparatus for actuating displays 9 2007
8,482,496 Circuits for controlling MEMS display apparatus on a transparent substrate 0 2007
7,636,189 Display methods and apparatus 5 2007
7,551,344 Methods for manufacturing displays 8 2007
7,927,654 Methods and apparatus for spatial light modulation 11 2007
7,852,546 Spacers for maintaining display apparatus alignment 10 2007
7,746,529 MEMS display apparatus 12 2007
8,519,945 Circuits for controlling display apparatus 0 2007
7,920,317 Display with controlled formation of bubbles 6 2008
8,248,560 Light guides and backlight systems incorporating prismatic structures and light redirectors 1 2008
8,526,096 Mechanical light modulators with stressed beams 0 2009
8,520,285 Methods for manufacturing cold seal fluid-filled display apparatus 0 2011
8,519,923 Display methods and apparatus 0 2012
8,599,463 MEMS anchors 0 2012
8,441,602 Light guides and backlight systems incorporating prismatic structures and light redirectors 2 2012
8,545,084 Light guides and backlight systems incorporating light redirectors at varying densities 0 2012
 
QUALCOMM MEMS TECHNOLOGIES, INC. (2)
7,550,912 Method and system for maintaining partial vacuum in display device 1 2005
8,410,690 Display device with desiccant 0 2009
 
HONEYWELL INTERNATIONAL INC. (1)
7,800,190 Getter on die in an upper sense plate designed system 0 2008
 
Pitronix, Inc. (1)
8,262,274 Light guides and backlight systems incorporating light redirectors at varying densities 2 2011

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