US Patent No: 7,161,094

Number of patents in Portfolio can not be more than 2000

Modifying the electro-mechanical behavior of devices

ALSO PUBLISHED AS: 20060219435

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Abstract

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A MEMS device is packaged with a control material that is included in the package to affect an operation of a moveable element of the device. The control material may affect operational characteristics including actuation and release voltages and currents, mechanical affects including damping and stiffness, lifetime of the device, optical properties, thermal affects and corrosion. The control material may be inserted into the package as part of any of several structural components of the package or the MEMS device.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
QUALCOMM MEMS TECHNOLOGIES, INC.SAN DIEGO, CA660

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chui, Clarence San Jose, CA 318 5314
Kothari, Manish Cupertino, CA 306 3741
Palmateer, Lauren San Francisco, CA 60 462

Cited Art Landscape

Patent Info (Count) # Cites Year
 
TEXAS INSTRUMENTS INCORPORATED (127)
4,500,171 Process for plastic LCD fill hole sealing 206 1982
4,441,791 Deformable mirror light modulator 619 1982
4,482,213 Perimeter seal reinforcement holes for plastic LCDs 220 1982
4,571,603 Deformable mirror electrostatic printer 359 1984
4,566,935 Spatial light modulator and method 505 1984
4,710,732 Spatial light modulator and method 486 1984
4,596,992 Linear spatial light modulator and printer 387 1984
4,615,595 Frame addressed spatial light modulator 392 1984
4,662,746 Spatial light modulator and method 490 1985
4,856,863 Optical fiber interconnection network including spatial light modulator 280 1988
4,956,619 Spatial light modulator 576 1988
5,079,544 Standard independent digitized video system 344 1989
5,028,939 Spatial light modulator system 389 1989
4,954,789 Spatial light modulator 561 1989
5,037,173 Optical interconnection network 315 1989
5,018,256 Architecture and process for integrating DMD with control circuit substrates 298 1990
5,083,857 Multi-level deformable mirror device 529 1990
5,142,405 Bistable DMD addressing circuit and method 336 1990
5,061,049 Spatial light modulator and method 728 1990
5,192,395 Method of making a digital flexure beam accelerometer 202 1990
5,096,279 Spatial light modulator and method 505 1990
5,099,353 Architecture and process for integrating DMD with control circuit substrates 313 1991
5,226,099 Digital micromirror shutter device 363 1991
5,162,787 Apparatus and method for digitized video system utilizing a moving display surface 247 1991
5,170,156 Multi-frequency two dimensional display system 252 1991
5,192,946 Digitized color video display system 320 1991
5,214,419 Planarized true three dimensional display 255 1991
5,214,420 Spatial light modulator projection system with random polarity light 296 1991
5,206,629 Spatial light modulator and memory for digitized video display 248 1991
5,179,274 Method for controlling operation of optical systems and devices 229 1991
5,168,406 Color deformable mirror device and method for manufacture 278 1991
5,254,980 DMD display system controller 239 1991
5,563,398 Spatial light modulator scanning system 200 1991
5,233,385 White light enhanced color field sequential projection 370 1991
5,233,456 Resonant mirror and method of manufacture 301 1991
5,216,537 Architecture and process for integrating DMD with control circuit substrates 377 1992
5,331,454 Low reset voltage process for DMD 344 1992
5,296,950 Optical signal free-space conversion board 227 1992
5,231,532 Switchable resonant filter for optical radiation 242 1992
5,312,513 Methods of forming multiple phase light modulators 274 1992
5,172,262 Spatial light modulator and method 385 1992
5,305,640 Digital flexure beam accelerometer 188 1992
5,446,479 Multi-dimensional array video processor system 250 1992
5,818,095 High-yield spatial light modulator with light blocking layer 304 1992
5,272,473 Reduced-speckle display system 285 1992
5,327,286 Real time optical correlation system 272 1992
5,287,096 Variable luminosity display system 269 1992
5,325,116 Device for writing to and reading from optical storage media 253 1992
5,280,277 Field updated deformable mirror device 330 1992
5,506,597 Apparatus and method for image projection 282 1992
5,457,566 DMD scanner 240 1992
5,278,652 DMD architecture and timing for use in a pulse width modulated display system 348 1993
5,461,411 Process and architecture for digital micromirror printer 297 1993
5,323,002 Spatial light modulator based optical calibration system 274 1993
5,489,952 Method and device for multi-format television 329 1993
5,365,283 Color phase control for projection display using spatial light modulator 281 1993
5,526,172 Microminiature, monolithic, variable electrical signal processor and apparatus including same 403 1993
5,581,272 Signal generator for controlling a spatial light modulator 195 1993
5,457,493 Digital micro-mirror based image simulation system 320 1993
5,411,769 Method of producing micromechanical devices 260 1993
5,339,116 DMD architecture and timing for use in a pulse-width modulated display system 287 1993
5,526,051 Digital television system 262 1993
5,459,602 Micro-mechanical optical shutter 216 1993
5,452,024 DMD display system 418 1993
5,497,197 System and method for packaging data into video processor 231 1993
5,517,347 Direct view deformable mirror device 300 1993
5,583,688 Multi-level digital micromirror device 463 1993
5,448,314 Method and apparatus for sequential color imaging 407 1994
5,602,671 Low surface energy passivation layer for micromechanical devices 274 1994
5,606,441 Multiple phase light modulation using binary addressing 219 1994
5,444,566 Optimized electronic operation of digital micromirror devices 357 1994
5,665,997 Grated landing area to eliminate sticking of micro-mechanical devices 299 1994
5,526,688 Digital flexure beam accelerometer and method 208 1994
5,523,803 DMD architecture and timing for use in a pulse-width modulated display system 280 1994
6,061,075 Non-systolic time delay and integration printing 181 1994
5,497,172 Pulse width modulation for spatial light modulator with split reset addressing 308 1994
5,454,906 Method of providing sacrificial spacer for micro-mechanical devices 280 1994
5,499,062 Multiplexed memory timing with block reset and secondary memory 260 1994
5,548,301 Pixel control circuitry for spatial light modulator 249 1994
5,650,881 Support post architecture for micromechanical devices 260 1994
5,552,924 Micromechanical device having an improved beam 245 1994
5,610,624 Spatial light modulator with reduced possibility of an on state defect 201 1994
5,659,374 Method of repairing defective pixels 205 1994
5,567,334 Method for creating a digital micromirror device using an aluminum hard mask 240 1995
6,049,317 System for imaging of light-sensitive media 250 1995
5,610,438 Micro-mechanical device with non-evaporable getter 293 1995
5,515,076 Multi-dimensional array video processor system 246 1995
6,232,936 DMD Architecture to improve horizontal resolution 211 1995
5,535,047 Active yoke hidden hinge digital micromirror device 461 1995
5,619,365 Elecronically tunable optical periodic surface filters with an alterable resonant frequency 233 1995
5,619,366 Controllable surface filter 228 1995
5,551,293 Micro-machined accelerometer array with shield plane 220 1995
5,570,135 Method and device for multi-format television 226 1995
5,589,852 Apparatus and method for image projection with pixel intensity control 273 1995
5,597,736 High-yield spatial light modulator with light blocking layer 247 1995
5,600,383 Multi-level deformable mirror device with torsion hinges placed in a layer different from the torsion beam layer 403 1995
5,608,468 Method and device for multi-format television 247 1995
5,610,625 Monolithic spatial light modulator and memory package 184 1995
5,646,768 Support posts for micro-mechanical devices 303 1995
5,745,193 DMD architecture and timing for use in a pulse-width modulated display system 220 1995
6,099,132 Manufacture method for micromechanical devices 207 1995
6,447,126 Support post architecture for micromechanical devices 326 1995
5,657,099 Color phase control for projection display using spatial light modulator 207 1995
5,654,741 Spatial light modulator display pointing device 191 1995
5,784,212 Method of making a support post for a micromechanical device 234 1996
5,771,116 Multiple bias level reset waveform for enhanced DMD control 285 1996
5,842,088 Method of calibrating a spatial light modulator printing system 256 1997
5,939,785 Micromechanical device including time-release passivant 121 1997
5,912,758 Bipolar reset for spatial light modulators 204 1998
5,936,758 Method of passivating a micromechanical device within a hermetic package 74 1998
6,480,177 Blocked stepped address voltage for micromechanical devices 192 1998
6,028,690 Reduced micromirror mirror gaps for improved contrast ratio 287 1998
6,282,010 Anti-reflective coatings for spatial light modulators 286 1999
6,323,982 Yield superstructure for digital micromirror device 262 1999
6,295,154 Optical switching apparatus 297 1999
6,147,790 Spring-ring micromechanical device 239 1999
6,038,056 Spatial light modulator having improved contrast ratio 262 1999
6,473,274 Symmetrical microactuator structure for use in mass data storage devices, or the like 192 2000
6,549,338 Bandpass filter to reduce thermal impact of dichroic light shift 210 2000
6,552,840 Electrostatic efficiency of micromechanical devices 235 2000
6,466,358 Analog pulse width modulation cell for digital micromechanical device 212 2000
6,778,155 Display operation with inserted block clears 181 2001
6,643,069 SLM-base color projection display having multiple SLM's and multiple projection lenses 219 2001
6,775,174 Memory architecture for micromirror cell 180 2001
6,625,047 Micromechanical memory element 253 2001
6,876,071 Masking layer in substrate cavity 3 2002
6,741,503 SLM display data address mapping for four bank frame buffer 180 2002
 
QUALCOMM MEMS TECHNOLOGIES, INC. (15)
5,835,255 Visible spectrum modulator arrays 502 1994
6,040,937 Interferometric modulation 632 1996
5,986,796 Visible spectrum modulator arrays 483 1996
6,674,562 Interferometric modulation of radiation 669 1998
6,055,090 Interferometric modulation 449 1999
6,589,625 Hermetic seal and method to create the same 284 2001
6,867,896 Interferometric modulation of radiation 394 2001
6,680,792 Interferometric modulation of radiation 507 2001
6,650,455 Photonic mems and structures 502 2001
2002/0075,555 Interferometric modulation of radiation 416 2001
6,794,119 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 385 2002
6,710,908 Controlling micro-electro-mechanical cavities 342 2002
6,574,033 Microelectromechanical systems device and method for fabricating same 449 2002
6,741,377 Device having a light-absorbing mask and a method for fabricating same 279 2002
2004/0240,032 Interferometric modulation of radiation 303 2004
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (13)
6,862,029 Color display system 194 1999
6,859,218 Electronic display devices and methods 181 2000
6,862,022 Method and system for automatically selecting a vertical refresh rate for a video display monitor 208 2001
6,632,698 Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS 272 2001
2003/0202,264 Micro-mirror device 201 2002
6,747,785 MEMS-actuated color light modulator and methods 213 2002
6,666,561 Continuously variable analog micro-mirror device 228 2002
2004/0147,056 Micro-fabricated device and method of making 190 2003
6,829,132 Charge control of micro-electromechanical device 210 2003
6,811,267 Display system with nonvisible data projection 221 2003
2005/0057,442 Adjacent display of sequential sub-images 202 2003
2005/0068,583 Organizing a digital image 177 2003
2004/0212,026 MEMS device having time-varying control 178 2004
 
XEROX CORPORATION (6)
6,160,833 Blue vertical cavity surface emitting laser 203 1998
6,180,428 Monolithic scanning light emitting devices using micromachining 185 1998
6,201,633 Micro-electromechanical based bistable color display sheets 268 1999
6,545,335 Structure and method for electrical isolation of optoelectronic integrated circuits 192 1999
6,548,908 Structure and method for planar lateral oxidation in passive devices 181 1999
6,674,090 Structure and method for planar lateral oxidation in active 167 1999
 
U.S. Philips Corporation (4)
4,403,248 Display device with deformable reflective medium 341 1981
4,519,676 Passive display device 242 1983
4,459,182 Method of manufacturing a display device 243 1983
4,681,403 Display device with micromechanical leaf spring switches 223 1986
 
ALPHA FRY LIMITED (3)
5,244,707 Enclosure for electronic devices 92 1992
5,304,419 Moisture and particle getter for enclosures 127 1992
5,591,379 Moisture getting composition for hermetic microelectronic devices 100 1993
 
CANON KABUSHIKI KAISHA (3)
6,630,786 Light-emitting device having light-reflective layer formed with, or/and adjacent to, material that enhances device performance 190 2001
6,822,628 Methods and systems for compensating row-to-row brightness variations of a field emission display 189 2001
6,853,129 Protected substrate structure for a field emission display device 184 2003
 
GLOBAL OLED TECHNOLOGY LLC (3)
6,226,890 Desiccation of moisture-sensitive electronic devices 118 2000
6,740,145 Desiccants and desiccant packages for highly moisture-sensitive electronic devices 21 2001
6,590,157 Sealing structure for highly moisture-sensitive electronic device element and method for fabrication 10 2001
 
LUCENT TECHNOLOGIES INC. (3)
5,636,052 Direct view display based on a micromechanical modulation 306 1994
5,825,528 Phase-mismatched fabry-perot cavity micromechanical modulator 319 1995
5,710,656 Micromechanical optical modulator having a reduced-mass composite membrane 276 1996
 
SHARP LABORATORIES OF AMERICA, INC. (3)
6,496,122 Image display and remote control system capable of displaying two distinct images 327 1998
6,606,175 Multi-segment light-emitting diode 181 1999
6,870,581 Single panel color video projection display using reflective banded color falling-raster illumination 203 2001
 
AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD. (2)
5,745,281 Electrostatically-driven light modulator and display 291 1996
6,787,897 Wafer-level package with silicon gasket 19 2001
 
COLIBRYS SA (2)
5,078,479 Light modulation device with matrix addressing 281 1991
5,579,149 Miniature network of light obturators 228 1994
 
HONEYWELL INTERNATIONAL INC. (2)
6,474,138 Adsorption based carbon monoxide sensor and method 7 2000
2005/0253,283 Getter deposition for vacuum packaging 47 2004
 
LOCKHEED MARTIN CORPORATION (2)
4,982,184 Electrocrystallochromic display and element 355 1989
5,124,834 Transferrable, self-supporting pellicle for elastomer light valve displays and method for making the same 253 1989
 
MASSACHUSETTS INSTITUTE OF TECHNOLOGY (2)
5,022,745 Electrostatically deformable single crystal dielectrically coated mirror 348 1989
5,233,459 Electric display device 353 1991
 
SANDIA CORPORATION (2)
6,392,144 Micromechanical die attachment surcharge 42 2000
6,379,988 Pre-release plastic packaging of MEMS and IMEMS devices 82 2000
 
SANDIA NATIONAL LABORATORIES (2)
6,661,084 Single level microelectronic device package with an integral window 96 2002
6,674,159 Bi-level microelectronic device package with an integral window 191 2002
 
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (2)
6,741,384 Control of MEMS and light modulator arrays 220 2003
6,861,277 Method of forming MEMS device 215 2003
 
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY (2)
5,311,360 Method and apparatus for modulating a light beam 570 1992
5,459,610 Deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate 301 1993
 
ADVANCED SEMICONDUCTOR ENGINEERING, INC. (1)
2004/0184,133 MICROSYSTEM PACKAGE STRUCTURE 61 2003
 
ANALOG DEVICES, INC. (1)
2002/0075,551 Enclosure for MEMS apparatus and method of using the same 42 2001
 
AT&T CORP. (1)
5,500,761 Micromechanical modulator 336 1994
 
BAKER, JOHN M. (1)
5,784,190 Electro-micro-mechanical shutters on transparent substrates 252 1995
 
CARDIFF SOFTWARE, INC. (1)
2005/0196,074 Method and system for searching form features for form identification 2005
 
DOW CORNING S.A. (1)
6,238,755 Insulating glass units 58 1998
 
EASTMAN KODAK COMPANY (1)
5,075,796 Optical article for multicolor imaging 202 1990
 
ETALON, INC. (1)
2003/0072,070 Visible spectrum modulator arrays 275 2002
 
FORD MOTOR COMPANY (1)
4,977,009 Composite polymer/desiccant coatings for IC encapsulation 56 1990
 
GEMFIRE CORPORATION (1)
5,703,710 Method for manipulating optical energy using poled structure 193 1994
 
GENESIS MICROCHIP INC. (1)
6,551,838 Microfabricated devices for the storage and selective exposure of chemicals and devices 132 2001
 
GEORGIA TECH RESEARCH CORPORATION (1)
5,401,983 Processes for lift-off of thin film materials or devices for fabricating three dimensional integrated circuits, optical detectors, and micromechanical devices 260 1993
 
HEWLETT-PACKARD COMPANY (1)
6,465,355 Method of fabricating suspended microstructures 224 2001
 
Honeywell Inc. (1)
4,377,324 Graded index Fabry-Perot optical filter device 235 1980
 
INFINEON TECHNOLOGIES AG (1)
7,011,986 Method for manufacturing a housing for a chip with a micromechanical structure 7 2004
 
IRIDIGM DISPLAY CORPORATION (1)
2001/0003,487 VISIBLE SPECTRUM MODULATOR ARRAYS 292 1999
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (1)
4,389,096 Image display apparatus of liquid crystal valve projection type 276 1981
 
MEMSCAP S.A. (1)
6,472,739 Encapsulated microelectromechanical (MEMS) devices 29 1999
 
MITSUBISHI GAS CHEMICAL COMPANY, INC. (1)
5,853,662 Method for preserving polished inorganic glass and method for preserving article obtained by using the same 42 1996
 
MOTOROLA, INC. (1)
5,044,736 Configurable optical filter or display 216 1990
 
NATIONAL RESEARCH COUNCIL OF CANADA (1)
5,619,059 Color deformable mirror device having optical thin film interference color coatings 226 1994
 
NOBEX CORPORATION (1)
6,600,201 Systems with high density packing of micromachines 201 2001
 
Northrop Corporation (1)
5,153,771 Coherent light modulation and detector 177 1990
 
OCEAN POWER TECHNOLOGIES, INC. (1)
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POPKIN FAMILY ASSETS, L.L.C. (1)
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PROMOS TECHNOLOGIES INC. (1)
6,855,610 Method of forming self-aligned contact structure with locally etched gate conductive layer 191 2002
 
QINETIQ LIMITED (1)
4,790,635 Electro-optical device 216 1987
 
Quantum Diagnostics Ltd. (1)
4,786,128 Device for modulating and reflecting electromagnetic radiation employing electro-optic layer having a variable index of refraction 289 1986
 
SAMSUNG ELECTRONICS CO., LTD. (1)
7,045,885 Placement of absorbing material in a semiconductor device 9 2004
 
SHARP KABUSHIKI KAISHA (1)
6,113,239 Projection display system for reflective light valves 249 1998
 
Societe d'Etude du Radant (1)
4,531,126 Method and device for analyzing a very high frequency radiation beam of electromagnetic waves 182 1982
 
THE REGENTS OF THE UNIVERSITY OF COLORADO, A BODY CORPORATE (1)
5,381,253 Chiral smectic liquid crystal optical modulators having variable retardation 231 1991
 
THE REGENTS OF THE UNIVERSITY OF MICHIGAN (1)
6,696,645 On-wafer packaging for RF-MEMS 11 2002
 
The United States of America as represented by the Secretary of the Navy (1)
4,228,437 Wideband polarization-transforming electromagnetic mirror 173 1979
 
TRUSEAL TECHNOLOGIES, INC. (1)
4,431,691 Dimensionally stable sealant and spacer strip and composite structures comprising the same 110 1981
 
TYCO ELECTRONICS CORPORATION (1)
5,815,141 Resistive touchscreen having multiple selectable regions for pressure discrimination 135 1996
 
UNITED TEST AND ASSEMBLY CENTER LTD. (1)
2004/0140,557 Wl-bga for MEMS/MOEMS devices 83 2003
 
Other [Check patent profile for assignment information] (6)
4,445,050 Device for conversion of light power to electric power 188 1981
4,663,083 Electro-optical dipole suspension with reflective-absorptive-transmissive characteristics 177 1984
5,142,414 Electrically actuatable temporal tristimulus-color device 267 1991
5,500,635 Products incorporating piezoelectric material 286 1994
6,819,469 High-resolution spatial light modulator for 3-dimensional holographic display 241 2003
2005/0001,828 Charge control of micro-electromechanical device 178 2004

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
PIXTRONIX, INC. (20)
7,405,852 Display apparatus and methods for manufacture thereof 41 2006
7,876,489 Display apparatus with optical cavities 32 2006
7,619,806 Methods and apparatus for spatial light modulation 9 2006
8,310,442 Circuits for controlling display apparatus 5 2006
7,675,665 Methods and apparatus for actuating displays 9 2007
8,482,496 Circuits for controlling MEMS display apparatus on a transparent substrate 0 2007
7,636,189 Display methods and apparatus 5 2007
7,551,344 Methods for manufacturing displays 8 2007
7,927,654 Methods and apparatus for spatial light modulation 9 2007
7,852,546 Spacers for maintaining display apparatus alignment 10 2007
7,746,529 MEMS display apparatus 12 2007
8,519,945 Circuits for controlling display apparatus 0 2007
7,920,317 Display with controlled formation of bubbles 6 2008
8,248,560 Light guides and backlight systems incorporating prismatic structures and light redirectors 1 2008
8,526,096 Mechanical light modulators with stressed beams 0 2009
8,520,285 Methods for manufacturing cold seal fluid-filled display apparatus 0 2011
8,519,923 Display methods and apparatus 0 2012
8,599,463 MEMS anchors 0 2012
8,441,602 Light guides and backlight systems incorporating prismatic structures and light redirectors 2 2012
8,545,084 Light guides and backlight systems incorporating light redirectors at varying densities 0 2012
 
QUALCOMM MEMS TECHNOLOGIES, INC. (2)
7,550,912 Method and system for maintaining partial vacuum in display device 1 2005
8,410,690 Display device with desiccant 0 2009
 
HONEYWELL INTERNATIONAL INC. (1)
7,800,190 Getter on die in an upper sense plate designed system 0 2008
 
Pitronix, Inc. (1)
8,262,274 Light guides and backlight systems incorporating light redirectors at varying densities 2 2011

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