Toroidal low-field reactive gas source
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United States of America Patent
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Jan 9, 2007
Grant Date -
Apr 29, 2004
app pub date -
Oct 20, 2003
filing date -
Jun 26, 1997
priority date (Note) -
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Abstract
An apparatus for dissociating gases includes a plasma chamber that may be formed from a metallic material and a transformer having a magnetic core surrounding a portion of the plasma chamber and having a primary winding. The apparatus also includes one or more switching semiconductor devices that are directly coupled to a voltage supply and that have an output coupled to the primary winding of the transformer. The one or more switching semiconductor devices drive current in the primary winding that induces a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer.
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