Micro-oscillation element having two rotational axes that are non-orthogonal to each other
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United States of America Patent
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-
Jan 9, 2007
Grant Date -
Feb 17, 2005
app pub date -
Mar 3, 2004
filing date -
Aug 12, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A micro-oscillation element includes a movable main section, a first frame and a second frame, and a first connecting section that connects the movable main section and the first frame and defines a first axis of rotation for a first rotational operation of the movable main section with respect to the first frame. The element further includes a second connecting section that connects the first frame and the second frame and defines a second axis of rotation for a second rotational operation of the first frame and the movable main section with respect to the second frame. A first drive mechanism is provided for generating a driving force for the first rotational operation. A second drive mechanism is provided for generating a driving force for the second rotational operation. The first axis of rotation and the second axis of rotation are not orthogonal.
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