Method of supplying fluorine
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United States of America Patent
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Jan 16, 2007
Grant Date -
Jun 22, 2006
app pub date -
Dec 22, 2004
filing date -
Dec 22, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
In a method of delivering high purity fluorine to a processing system, an on-site fluorine generator supplies high purity fluorine to a fixed storage tank, from which the high purity fluorine is supplied to the processing system. To provide a back up to the fluorine generator, high purity fluorine is also provided in a transportable gas storage vessel, for example, a multi-cylinder pack at a relatively low pressure, typically less than 35 psig. The transportable storage vessel is selectively connected to the fixed storage tank as required to enable the amount of fluorine within the storage tank to be maintained at a desired level.
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