Control of fluid flow in the processing of an object with a fluid
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United States of America Patent
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Jan 16, 2007
Grant Date -
Feb 3, 2005
app pub date -
Jul 29, 2003
filing date -
Jul 29, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An apparatus for and methods of control of a fluid flow. In a system for supercritical processing of an object, the apparatus includes a measuring device for measuring a pump performance parameter and a controller for adjusting a fluid flow in response to the performance parameter. The system further includes a processing chamber for performing a supercritical process and a device for circulating at least one of a gaseous, liquid, supercritical and near-supercritical fluid within the processing chamber. A method of control of a fluid flow includes the steps of: measuring a pump performance parameter; comparing a measured pump performance parameter to a predetermined target pump performance parameter; and adjusting a fluid flow in response to a difference in the measured pump performance parameter and the predetermined target pump performance parameter.
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