Optical microelectromechanical device and fabrication method thereof
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United States of America Patent
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Jan 16, 2007
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N/A
app pub date -
May 24, 2005
filing date -
Dec 30, 2004
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Abstract
An optical microelectromechanical (MEMS) device includes a conductive layer, a dielectric layer, a reflective layer and a plurality of supporters between the dielectric layer and reflective layer. The supporters are tapers, or inversed tapers, having an acute angle, wherein a side surface of one of the supporters and the surface of the dielectric layer form the acute angle. Each supporter comprises a horizontal extending portion connecting to the reflective layer, such that the reflective layer is suspended from the dielectric layer by a predetermined gap.
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