Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists
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United States of America Patent
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Jan 23, 2007
Issued Date -
N/A
app pub date -
Mar 20, 2003
filing date -
Jun 19, 2002
priority date (Note) -
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status (Latency Note)
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Abstract
An Automated Material Handling System (AMHS) that allows an overhead hoist transport vehicle to load/ unload parts directly to/from storage units included in the system. The AMHS includes an overhead hoist transport subsystem and a vertical carousel stocker having a plurality of storage bins. The subsystem includes an overhead hoist transport vehicle traveling along a suspended track defining a predetermined route. The route passes over the stocker, which allows the vehicle to access parts directly from one of the storage bins. The selected bin is positioned at the top of the stocker underneath the track. Next, the vehicle is moved along the track to a position above the selected bin. The hoist is then lowered parallel to the longitudinal axis of the stocker toward the selected bin. Finally, the hoist is operated to pick parts directly from the bin, or to place parts in the bin.
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