US Patent No: 7,169,662
Number of patents in Portfolio can not be more than 2000
Methods for making semiconductor structures having high-speed areas and high-density areas
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Jan 30, 2007
Issued date -
Oct 30, 2003
filing date -
10/699,256
serial no -
In Force
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Abstract
Methods for making a semiconductor structure are discussed. The methods include forming openings in a high-density area and a high-speed area, and forming a metallization layer simultaneously into the high-density area and the high-speed area. The metallization layer includes a combination of substances and compounds that reduce vertical resistance, reduce horizontal resistance, and inhibit cross-diffusion.
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First Claim
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International Classification(s)
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Cited Art
| Patent Info | (Count) | # Cites | Year |
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| 6,174,807 Method of controlling gate dopant penetration and diffusion in a semiconductor device | 9 | 1999 | |
| 6,274,409 Method for making a semiconductor device | 16 | 2000 | |
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| 5,899,742 Manufacturing method for self-aligned local interconnects and contacts simultaneously | 56 | 1998 | |
| 6,083,828 Method for forming a self-aligned contact | 23 | 1999 | |
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| 6,121,129 Method of contact structure formation | 12 | 1997 | |
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| 6,300,178 Semiconductor device with self-aligned contact and manufacturing method thereof | 11 | 1998 | |
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| 6,730,553 Methods for making semiconductor structures having high-speed areas and high-density areas | 7 | 2001 | |
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| 6,069,038 Method of manufacturing a semiconductor integrated circuit device | 25 | 1999 | |
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| 6,451,708 Method of forming contact holes in a semiconductor device | 18 | 2000 | |
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| 6,271,087 Method for forming self-aligned contacts and local interconnects using self-aligned local interconnects | 33 | 2000 | |
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| 5,843,816 Integrated self-aligned butt contact process flow and structure for six transistor full complementary metal oxide semiconductor static random access memory cell | 17 | 1997 | |
Patent Citation Ranking
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
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| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Jul 30, 2014 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jul 30, 2018 |
| Fee | Large entity fee | small entity fee | micro entity fee |
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| Surcharge - 7.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
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