Sensor for sensing temperature adjusted fluid pressure
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United States of America Patent
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Feb 6, 2007
Issued Date -
N/A
app pub date -
Jun 5, 2006
filing date -
Oct 18, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A pressure sensor is provided incorporating a first chamber having a first flexible membrane exposed to fluid pressure and configured to deflect in response to changes in the fluid pressure and temperature within the first chamber, a second chamber having a second flexible membrane sealed from the fluid pressure and configured to deflect in response to changes in temperature within the second chamber, and associated circuitry for comparing the deflection of the first and second membranes to sense the fluid pressure.
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