Optically coupled sealed-cavity resonator and process
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United States of America Patent
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Feb 13, 2007
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N/A
app pub date -
Dec 12, 2004
filing date -
Dec 12, 2004
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Abstract
A process to form a laterally offset photodiode for an optically coupled resonator includes implanting a semiconductor substrate to form the laterally offset photodiode adjacent to the resonator. The resonator masks the implanting underneath the resonator when the semiconductor substrate is implanted. Also disclosed is an optically coupled resonator, a process for fabricating an optically coupled resonator, and a device including an optically coupled resonator having a laterally offset photodiode.
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