Pressure measuring device for vacuum systems
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United States of America Patent
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Feb 20, 2007
Issued Date -
N/A
app pub date -
Apr 27, 2005
filing date -
Apr 28, 2004
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A pressure-measuring device is configured for use in vacuum systems, which are used for surface coating or modification of objects and/or substrates in an inner receptacle inside a processing chamber. Elastic elements or portions are fabricated in the inner receptacle. The pressure-measuring device includes distance-measuring elements designed to measure the deformation of the elastic elements of the inner receptacle. The deformation measurements are related to the pressure in the inner receptacle. The pressure-measuring device provides a continuous and secure determination of the pressure.
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