Micromechanical structure, device including the structure, and methods of forming and using same
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United States of America Patent
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Feb 20, 2007
Grant Date -
Mar 3, 2005
app pub date -
Sep 3, 2004
filing date -
Sep 3, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A micromechanical structure and device and methods of forming and using the structure and device are disclosed. The structure includes an ion conductor and a plurality of electrodes. Mechanical properties of the structure are altered by applying a bias across the electrodes. Such structures can be used to form device such as actuators and air-gap devices.
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