Wireless capacitance pressure sensor
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United States of America Patent
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Feb 27, 2007
Grant Date -
N/A
app pub date -
Sep 13, 2005
filing date -
Sep 13, 2005
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A wireless pressure sensor system has a pressure sensing capacitor and an inductor mounted on a common housing. The pressure sensing capacitor has a conductive diaphragm, a dielectric layer and a fixed electrode separated at least in part from the diaphragm by a gap formed in the housing. The electrode is arranged with a protrusion such that displacement of the diaphragm varies the area of capacitive contact with the electrode by rolling along the protrusion. The inductor coil and pressure sensing capacitor are connected to form a passive inductive-capacitive (LC) tank circuit. A remote interrogation circuit, inductively coupled to the pressure sensor inductor coil can be utilized to detect the resonant frequency of the LC tank which varies as a function of pressure sensed by the diaphragm.
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