Hinge for micro-mirror devices
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United States of America Patent
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Feb 27, 2007
Grant Date -
Feb 16, 2006
app pub date -
Aug 14, 2004
filing date -
Aug 14, 2004
priority date (Note) -
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Abstract
An improved hinge for a micro-mirror device composed of a conductive doped semiconductor and immune to plastic deformation at typical to extreme temperatures. The hinge is directly connected to the micro-mirror device and facilitates the manufacturing of an optically flat micro-mirror. This eliminates Fraunhofer diffraction due to recesses on the reflective surface of the micro-mirror. In addition, the hinge is hidden from incoming light thus improving contrast and fill-factor.
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