Hermetically sealed elements of an actuator
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United States of America Patent
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Feb 27, 2007
Grant Date -
May 12, 2005
app pub date -
Nov 6, 2003
filing date -
Nov 6, 2003
priority date (Note) -
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status (Latency Note)
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Abstract
An actuator for positioning of an optical element, such as a mirror, in an optic system that operates under vacuum conditions is provided and includes a first actuator body including a first actuator element that is hermetically sealed in the first actuator body and a second actuator body that includes a second actuator element that is hermetically sealed in the second actuator body. The first and second actuator bodies are hermetically sealed using any number of techniques including a welding process. Moreover, in one embodiment, the actuator operates under the Lorentz principle and the first actuator element is a magnet or magnet assembly and the second actuator element is a coil assembly with the first and second actuator bodies being free of attachment to one another.
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