Achromatic spectroscopic ellipsometer with high spatial resolution

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7184145
APP PUB NO 20060164642A1
SERIAL NO

10518121

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Abstract

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Disclosed is an achromatic spectroscopic ellispometer for analyzing small regions of a sample over a wide range of wavelengths from ultraviolet (UV) to infrared (IR). The spectroscopic ellipsometer contains a light source emitting a light beam which passes through a polarisation state generator section before being focused at an incidence angle q by a first parabolic mirror to a small spot on a sample. A second parabolic mirror collects the reflected beam and connects said beam to an analyzing section. The reflected beam emerges from the analyzing section and is spectroscopically detected and analyzed. The light beam through the polarisation state generator section up to the first parabolic mirror and the light beam from the second mirror through the analyzing section are parallel enabling achromatism. The incidence angle q is largely varied without shifting of the location of the small spot on the sample surface.

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Patent Owner(s)

Patent OwnerAddress
HORIBA JOBIN YVON S A S91160 LONGJUMEAU

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Amary, Pascal Saint Pryve Saint Mesmin, FR 2 12
Benferhat, Ramdane Oncy sur Ecole, FR 3 26
Bos, Francis Longjumeau, FR 2 6
Cattelan, Denis Paris, FR 5 30

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