Methods and apparatus for reducing error in interferometric imaging measurements
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United States of America Patent
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Feb 27, 2007
Grant Date -
Feb 3, 2005
app pub date -
Jun 18, 2004
filing date -
Jun 18, 2003
priority date (Note) -
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Abstract
The present invention provides a method and apparatus for reducing error in interferometric fringe stability and reproducibility in an interference fringe generator. In one aspect, the method for reducing error in interferometric fringe stability and reproducibility includes providing a light source, positioning a grating to receive light from the light source and positioning a projection lens having a focal length F to receive light from the grating. The projection lens projects the received light upon an object of interest positioned substantially at a distance d.sub.1 from the lens. Typically the lens is positioned substantially at a distance d.sub.2 from the grating. The values of d.sub.1, d.sub.2, and F are related by d.sub.2 being approximately equal to d.sub.1F/(d.sub.1-F).
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