Method and system for packaging a MEMS device
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United States of America Patent
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Feb 27, 2007
Grant Date -
Apr 13, 2006
app pub date -
Jan 28, 2005
filing date -
Sep 27, 2004
priority date (Note) -
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status (Latency Note)
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Abstract
A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate can contain electronic circuitry for controlling the array of interferometric modulators. The backplate can provide physical support for device components, such as electronic components which can be used to control the state of the display. The backplate can also be utilized as a primary structural support for the device.
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