Chuck with integrated wafer support

United States of America Patent

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Mar 6, 2007
Grant Date
Jun 30, 2005
app pub date
Aug 26, 2004
filing date
Dec 24, 2003

priority date (Note)
Expired

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Abstract

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An improved chuck with lift pins within a probe station.

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Patent Owner(s)

Patent Owner	Address
CASCADE MICROTECH INC	2430 NW 206TH AVENUE BEAVERTON OR 97006

International Classification(s)

G01R:MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC V....

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Inventor Name	Address	# of filed Patents	Total Citations
Andrews, Peter	Beaverton, OR	94	2691
Dunklee, John	Tigard, OR	36	578
Froemke, Brad	Portland, OR	6	174

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Chuck with integrated wafer support

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United States of America Patent

10927247

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PATENT NO	7187188
APP PUB NO	20050140384A1
SERIAL NO	10927247
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity Expired	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
March 06, 2007	US,7187188,B2 US7187188B2	GRANTED PATENT AS SECOND PUBLICATION
June 30, 2005	US,20050140384,A1 US20050140384A1	FIRST PUBLISHED PATENT APPLICATION

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10927247

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