Optical MEMS cavity having a wide scanning range for measuring a sensing interferometer
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United States of America Patent
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Mar 6, 2007
Grant Date -
Oct 27, 2005
app pub date -
Apr 23, 2004
filing date -
Apr 23, 2004
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Abstract
A method for measuring the cavity length of a remote sensing interferometer by locally replicating the state of the remote sensing interferometer by way of a local interferometer. The local interferometer is produced by micro-electromechanical micro machining techniques, thus obtaining a highly accurate and reliable fiber optic sensing at a cost comparable to electronic sensing devices.
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