US Patent No: 7,188,524
Number of patents in Portfolio can not be more than 2000
Conductive element for a movable electric circuit and a vibration gyroscope
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Mar 13, 2007
Issued date -
Jul 29, 2004
filing date -
10/902,592
serial no -
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Abstract
A conductive element for a movable electrical circuit (a conductive element most suitable for an electric circuit that is placed on a movable element in which the shape of the circuit itself changes during circuit operation) which is Al-based and has an average cross sectional area for the crystal grain of 1 micron.sup.2 or less. Preferably, this conductive element contains N+O at 550 to 20000 ppm in atomic concentration and also one or more selected from the group consisting of Si at 0.5 5.0% in atomic concentration, Ta at 0.5 5.0%, and Cu at 0.5 5.0%. More preferably, it contains Nd at 0.5 5.0%.This conductive element for a movable circuit is especially suitable for the wiring pattern in a vibrating gyroscope.
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First Claim
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International Classification(s)
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Cited Art
| Patent Info | (Count) | # Cites | Year |
|---|---|---|---|
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| 6,555,204 Method of preventing bridging between polycrystalline micro-scale features | 1 | 2000 | |
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| 6,592,812 Aluminum alloy thin film target material and method for forming thin film using the same | 7 | 2001 | |
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| 6,055,858 Acceleration sensor | 24 | 1999 | |
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| 5,534,463 Method for forming a wiring layer | 75 | 1993 | |
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| 5,942,054 Micromechanical device with reduced load relaxation | 13 | 1996 | |
Patent Citation Ranking
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