Conductive element for a movable electric circuit and a vibration gyroscope
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United States of America Patent
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Mar 13, 2007
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N/A
app pub date -
Jul 29, 2004
filing date -
Jun 28, 2002
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Abstract
A conductive element for a movable electrical circuit (a conductive element most suitable for an electric circuit that is placed on a movable element in which the shape of the circuit itself changes during circuit operation) which is Al-based and has an average cross sectional area for the crystal grain of 1 micron.sup.2 or less. Preferably, this conductive element contains N+O at 550 to 20000 ppm in atomic concentration and also one or more selected from the group consisting of Si at 0.5 5.0% in atomic concentration, Ta at 0.5 5.0%, and Cu at 0.5 5.0%. More preferably, it contains Nd at 0.5 5.0%.This conductive element for a movable circuit is especially suitable for the wiring pattern in a vibrating gyroscope.
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