Electronic optical lens barrel and production method therefor
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United States of America Patent
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-
Mar 20, 2007
Grant Date -
Aug 11, 2005
app pub date -
Jun 10, 2003
filing date -
Jun 13, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention provides an electron optical lens column suitable for miniaturization, and provides the manufacturing method thereof. The column unit (1) comprises an inner column (11) and an outer column (12). The column unit is, as a whole, structured from a high-resistance electrically conductive ceramic. Electrostatic lenses (21, 22, 23, and 24) are affixed to the inner surface (111) of the inner column using a means such as plating or vapor deposition. Of the electrodes or electrode parts (211 213, 221, 231, 232, and 241 243) from which the lens is structured, those that share the same electric potential are connected by shared interconnections. This makes it possible to connect all of the electrodes or electrode parts with shared electric potentials as a group to the external interconnections.
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