Ellipsometric investigation of thin films
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United States of America Patent
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Mar 20, 2007
Issued Date -
N/A
app pub date -
Jan 27, 2004
filing date -
Jan 31, 2003
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Abstract
Use of differences in spectroscopic spectra resulting from multiple sample investigation, or sequential investigation of the same sample in evaluation of sample characterizing parameters such as ultra-thin film thickness.
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