Lithographic apparatus and device manufacturing method
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United States of America Patent
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Mar 27, 2007
Grant Date -
Jun 2, 2005
app pub date -
Oct 26, 2004
filing date -
Nov 7, 2003
priority date (Note) -
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Abstract
An array of individually controllable elements is comprised of elements, each formed of a stack of layers of dielectric material. At least one layer is an electro-optical material. The at least one layer's refractive index for radiation that is plane polarized in a given direction can be changed by application of a voltage in order to change the reflection/transmission characteristic of the boundary between this layer and the adjacent layer.
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