US Patent No: 7,196,837

Number of patents in Portfolio can not be more than 2000

Area array modulation and lead reduction in interferometric modulators

ALSO PUBLISHED AS: 20050231791
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Abstract

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A light modulator is arranged as array of rows and columns of interferometric display elements. Each element is divided into sub-rows of sub-elements. Array connection lines transmit operating signals to the display elements, with one connection line corresponding to one row of display elements in the array. Sub-array connection lines electrically connect to each array connection line. Switches transmit the operating signals from each array connection line to the sub-rows to effect gray scale modulation.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
QUALCOMM MEMS TECHNOLOGIES, INC.SAN DIEGO, CA652

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chui, Clarence San Jose, CA 318 5226
Kothari, Manish Cupertino, CA 306 3669
Sampsell, Jeffrey Brian San Francisco, CA 30 857

Cited Art Landscape

Patent Info (Count) # Cites Year
 
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4,441,791 Deformable mirror light modulator 616 1982
4,482,213 Perimeter seal reinforcement holes for plastic LCDs 218 1982
4,571,603 Deformable mirror electrostatic printer 357 1984
4,566,935 Spatial light modulator and method 501 1984
4,710,732 Spatial light modulator and method 483 1984
4,596,992 Linear spatial light modulator and printer 383 1984
4,615,595 Frame addressed spatial light modulator 389 1984
4,662,746 Spatial light modulator and method 487 1985
4,856,863 Optical fiber interconnection network including spatial light modulator 278 1988
4,956,619 Spatial light modulator 573 1988
5,079,544 Standard independent digitized video system 342 1989
5,028,939 Spatial light modulator system 386 1989
4,954,789 Spatial light modulator 558 1989
5,037,173 Optical interconnection network 313 1989
5,018,256 Architecture and process for integrating DMD with control circuit substrates 296 1990
5,083,857 Multi-level deformable mirror device 527 1990
5,142,405 Bistable DMD addressing circuit and method 334 1990
5,061,049 Spatial light modulator and method 726 1990
5,192,395 Method of making a digital flexure beam accelerometer 200 1990
5,096,279 Spatial light modulator and method 503 1990
5,099,353 Architecture and process for integrating DMD with control circuit substrates 311 1991
5,226,099 Digital micromirror shutter device 361 1991
5,162,787 Apparatus and method for digitized video system utilizing a moving display surface 245 1991
5,170,156 Multi-frequency two dimensional display system 250 1991
5,192,946 Digitized color video display system 318 1991
5,214,419 Planarized true three dimensional display 253 1991
5,214,420 Spatial light modulator projection system with random polarity light 294 1991
5,206,629 Spatial light modulator and memory for digitized video display 246 1991
5,179,274 Method for controlling operation of optical systems and devices 227 1991
5,168,406 Color deformable mirror device and method for manufacture 276 1991
5,254,980 DMD display system controller 237 1991
5,563,398 Spatial light modulator scanning system 198 1991
5,233,385 White light enhanced color field sequential projection 367 1991
5,233,456 Resonant mirror and method of manufacture 299 1991
5,216,537 Architecture and process for integrating DMD with control circuit substrates 375 1992
5,331,454 Low reset voltage process for DMD 342 1992
5,296,950 Optical signal free-space conversion board 225 1992
5,231,532 Switchable resonant filter for optical radiation 240 1992
5,212,582 Electrostatically controlled beam steering device and method 342 1992
5,312,513 Methods of forming multiple phase light modulators 272 1992
5,172,262 Spatial light modulator and method 383 1992
5,305,640 Digital flexure beam accelerometer 186 1992
5,446,479 Multi-dimensional array video processor system 248 1992
5,818,095 High-yield spatial light modulator with light blocking layer 302 1992
5,272,473 Reduced-speckle display system 283 1992
5,327,286 Real time optical correlation system 269 1992
5,287,096 Variable luminosity display system 267 1992
5,325,116 Device for writing to and reading from optical storage media 251 1992
5,280,277 Field updated deformable mirror device 328 1992
5,506,597 Apparatus and method for image projection 280 1992
5,457,566 DMD scanner 238 1992
5,278,652 DMD architecture and timing for use in a pulse width modulated display system 346 1993
5,461,411 Process and architecture for digital micromirror printer 295 1993
5,323,002 Spatial light modulator based optical calibration system 271 1993
5,489,952 Method and device for multi-format television 326 1993
5,365,283 Color phase control for projection display using spatial light modulator 279 1993
5,526,172 Microminiature, monolithic, variable electrical signal processor and apparatus including same 401 1993
5,581,272 Signal generator for controlling a spatial light modulator 193 1993
5,457,493 Digital micro-mirror based image simulation system 315 1993
5,411,769 Method of producing micromechanical devices 258 1993
5,339,116 DMD architecture and timing for use in a pulse-width modulated display system 285 1993
5,526,051 Digital television system 259 1993
5,459,602 Micro-mechanical optical shutter 214 1993
5,452,024 DMD display system 415 1993
5,497,197 System and method for packaging data into video processor 229 1993
5,517,347 Direct view deformable mirror device 298 1993
5,583,688 Multi-level digital micromirror device 460 1993
5,448,314 Method and apparatus for sequential color imaging 405 1994
5,602,671 Low surface energy passivation layer for micromechanical devices 271 1994
5,606,441 Multiple phase light modulation using binary addressing 217 1994
5,444,566 Optimized electronic operation of digital micromirror devices 355 1994
5,665,997 Grated landing area to eliminate sticking of micro-mechanical devices 297 1994
5,526,688 Digital flexure beam accelerometer and method 206 1994
5,523,803 DMD architecture and timing for use in a pulse-width modulated display system 278 1994
6,061,075 Non-systolic time delay and integration printing 179 1994
5,497,172 Pulse width modulation for spatial light modulator with split reset addressing 306 1994
5,454,906 Method of providing sacrificial spacer for micro-mechanical devices 278 1994
5,499,062 Multiplexed memory timing with block reset and secondary memory 258 1994
5,548,301 Pixel control circuitry for spatial light modulator 247 1994
5,650,881 Support post architecture for micromechanical devices 258 1994
5,552,924 Micromechanical device having an improved beam 243 1994
5,610,624 Spatial light modulator with reduced possibility of an on state defect 199 1994
5,659,374 Method of repairing defective pixels 203 1994
5,612,713 Digital micro-mirror device with block data loading 69 1995
5,567,334 Method for creating a digital micromirror device using an aluminum hard mask 238 1995
6,049,317 System for imaging of light-sensitive media 248 1995
5,610,438 Micro-mechanical device with non-evaporable getter 291 1995
5,515,076 Multi-dimensional array video processor system 244 1995
6,232,936 DMD Architecture to improve horizontal resolution 209 1995
5,535,047 Active yoke hidden hinge digital micromirror device 458 1995
5,619,365 Elecronically tunable optical periodic surface filters with an alterable resonant frequency 231 1995
5,619,366 Controllable surface filter 226 1995
5,551,293 Micro-machined accelerometer array with shield plane 218 1995
5,570,135 Method and device for multi-format television 223 1995
5,589,852 Apparatus and method for image projection with pixel intensity control 271 1995
5,597,736 High-yield spatial light modulator with light blocking layer 245 1995
5,600,383 Multi-level deformable mirror device with torsion hinges placed in a layer different from the torsion beam layer 400 1995
5,608,468 Method and device for multi-format television 244 1995
5,610,625 Monolithic spatial light modulator and memory package 182 1995
5,646,768 Support posts for micro-mechanical devices 301 1995
5,745,193 DMD architecture and timing for use in a pulse-width modulated display system 218 1995
6,099,132 Manufacture method for micromechanical devices 205 1995
6,447,126 Support post architecture for micromechanical devices 324 1995
5,657,099 Color phase control for projection display using spatial light modulator 205 1995
5,654,741 Spatial light modulator display pointing device 189 1995
5,784,212 Method of making a support post for a micromechanical device 232 1996
5,771,116 Multiple bias level reset waveform for enhanced DMD control 283 1996
5,842,088 Method of calibrating a spatial light modulator printing system 253 1997
5,808,780 Non-contacting micromechanical optical switch 228 1997
5,912,758 Bipolar reset for spatial light modulators 202 1998
6,480,177 Blocked stepped address voltage for micromechanical devices 190 1998
6,028,690 Reduced micromirror mirror gaps for improved contrast ratio 285 1998
6,282,010 Anti-reflective coatings for spatial light modulators 284 1999
6,323,982 Yield superstructure for digital micromirror device 260 1999
6,295,154 Optical switching apparatus 295 1999
6,147,790 Spring-ring micromechanical device 237 1999
6,038,056 Spatial light modulator having improved contrast ratio 260 1999
6,473,274 Symmetrical microactuator structure for use in mass data storage devices, or the like 190 2000
6,549,338 Bandpass filter to reduce thermal impact of dichroic light shift 208 2000
6,552,840 Electrostatic efficiency of micromechanical devices 233 2000
6,466,358 Analog pulse width modulation cell for digital micromechanical device 210 2000
6,778,155 Display operation with inserted block clears 178 2001
6,643,069 SLM-base color projection display having multiple SLM's and multiple projection lenses 217 2001
6,775,174 Memory architecture for micromirror cell 178 2001
6,625,047 Micromechanical memory element 250 2001
6,741,503 SLM display data address mapping for four bank frame buffer 178 2002
 
QUALCOMM MEMS TECHNOLOGIES, INC. (16)
5,835,255 Visible spectrum modulator arrays 498 1994
6,040,937 Interferometric modulation 628 1996
5,986,796 Visible spectrum modulator arrays 479 1996
6,674,562 Interferometric modulation of radiation 663 1998
6,055,090 Interferometric modulation 447 1999
6,589,625 Hermetic seal and method to create the same 280 2001
6,867,896 Interferometric modulation of radiation 391 2001
6,680,792 Interferometric modulation of radiation 503 2001
6,650,455 Photonic mems and structures 498 2001
2002/0075,555 Interferometric modulation of radiation 414 2001
6,794,119 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 381 2002
6,710,908 Controlling micro-electro-mechanical cavities 338 2002
6,574,033 Microelectromechanical systems device and method for fabricating same 444 2002
6,741,377 Device having a light-absorbing mask and a method for fabricating same 275 2002
2004/0058,532 Controlling electromechanical behavior of structures within a microelectromechanical systems device 285 2002
2004/0240,032 Interferometric modulation of radiation 302 2004
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (13)
6,862,029 Color display system 192 1999
6,859,218 Electronic display devices and methods 179 2000
6,862,022 Method and system for automatically selecting a vertical refresh rate for a video display monitor 206 2001
6,632,698 Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS 270 2001
2003/0202,264 Micro-mirror device 199 2002
6,747,785 MEMS-actuated color light modulator and methods 211 2002
6,666,561 Continuously variable analog micro-mirror device 226 2002
2004/0147,056 Micro-fabricated device and method of making 188 2003
6,829,132 Charge control of micro-electromechanical device 208 2003
6,811,267 Display system with nonvisible data projection 219 2003
2005/0057,442 Adjacent display of sequential sub-images 200 2003
2005/0068,583 Organizing a digital image 175 2003
2004/0212,026 MEMS device having time-varying control 176 2004
 
CANON KABUSHIKI KAISHA (6)
4,709,995 Ferroelectric display panel and driving method therefor to achieve gray scale 225 1985
5,633,652 Method for driving optical modulation device 135 1995
6,100,872 Display control method and apparatus 177 1997
6,630,786 Light-emitting device having light-reflective layer formed with, or/and adjacent to, material that enhances device performance 188 2001
6,822,628 Methods and systems for compensating row-to-row brightness variations of a field emission display 187 2001
6,853,129 Protected substrate structure for a field emission display device 182 2003
 
XEROX CORPORATION (6)
6,160,833 Blue vertical cavity surface emitting laser 201 1998
6,180,428 Monolithic scanning light emitting devices using micromachining 183 1998
6,201,633 Micro-electromechanical based bistable color display sheets 266 1999
6,545,335 Structure and method for electrical isolation of optoelectronic integrated circuits 190 1999
6,548,908 Structure and method for planar lateral oxidation in passive devices 179 1999
6,674,090 Structure and method for planar lateral oxidation in active 165 1999
 
LUCENT TECHNOLOGIES INC. (4)
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U.S. Philips Corporation (4)
4,403,248 Display device with deformable reflective medium 339 1981
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SHARP LABORATORIES OF AMERICA, INC. (3)
6,496,122 Image display and remote control system capable of displaying two distinct images 319 1998
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FUJI PHOTO FILM CO., LTD. (2)
6,356,254 Array-type light modulating device and method of operating flat display unit 131 1999
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LOCKHEED MARTIN CORPORATION (2)
4,982,184 Electrocrystallochromic display and element 353 1989
5,124,834 Transferrable, self-supporting pellicle for elastomer light valve displays and method for making the same 251 1989
 
MASSACHUSETTS INSTITUTE OF TECHNOLOGY (2)
5,233,459 Electric display device 350 1991
5,959,763 Spatial light modulator 234 1998
 
SANDIA CORPORATION (2)
5,867,302 Bistable microelectromechanical actuator 370 1997
6,813,060 Electrical latching of microelectromechanical devices 48 2002
 
SHARP KABUSHIKI KAISHA (2)
4,859,060 Variable interferometric device and a process for the production of the same 376 1986
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TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (2)
6,741,384 Control of MEMS and light modulator arrays 218 2003
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ADVANTEST CORPORATION (1)
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ANALOG DEVICES, INC. (1)
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AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD. (1)
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BAKER, JOHN M. (1)
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HEWLETT-PACKARD COMPANY (1)
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QINETIQ LIMITED (1)
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SEERTECH CORPORATION (1)
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SEIKO EPSON CORPORATION (1)
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Other [Check patent profile for assignment information] (3)
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Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (21)
7,532,194 Driver voltage adjuster 3 2004
7,889,163 Drive method for MEMS devices 16 2005
7,843,410 Method and device for electrically programmable display 6 2005
7,345,805 Interferometric modulator array with integrated MEMS electrical switches 6 2005
7,724,993 MEMS switches with deforming membranes 2 2005
7,545,550 Systems and methods of actuating MEMS display elements 4 2005
7,446,927 MEMS switch with set and latch electrodes 6 2005
8,174,469 Dynamic driver IC and display panel configuration 0 2006
7,724,417 MEMS switches with deforming membranes 0 2006
7,556,981 Switches for shorting during MEMS etch release 1 2006
8,022,896 ESD protection for MEMS display panels 0 2007
7,859,739 Interferometric modulator array with integrated MEMS electrical switches 0 2008
7,977,931 Family of current/power-efficient high voltage linear regulator circuit architectures 0 2008
7,768,690 Backlight displays 7 2008
7,782,522 Encapsulation methods for interferometric modulator and MEMS devices 0 2008
7,911,677 MEMS switch with set and latch electrodes 0 2008
8,736,590 Low voltage driver scheme for interferometric modulators 0 2010
8,223,424 Interferometric modulator array with integrated MEMS electrical switches 0 2010
8,693,084 Interferometric modulator in transmission mode 0 2012
8,437,071 Interferometric modulator array with integrated MEMS electrical switches 0 2012
8,791,897 Method and system for writing data to MEMS display elements 0 2012
 
PIXTRONIX, INC. (5)
8,482,496 Circuits for controlling MEMS display apparatus on a transparent substrate 0 2007
8,519,945 Circuits for controlling display apparatus 0 2007
8,526,096 Mechanical light modulators with stressed beams 0 2009
8,519,923 Display methods and apparatus 0 2012
8,599,463 MEMS anchors 0 2012

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