US Patent No: 7,196,837

Number of patents in Portfolio can not be more than 2000

Area array modulation and lead reduction in interferometric modulators

ALSO PUBLISHED AS: 20050231791

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A light modulator is arranged as array of rows and columns of interferometric display elements. Each element is divided into sub-rows of sub-elements. Array connection lines transmit operating signals to the display elements, with one connection line corresponding to one row of display elements in the array. Sub-array connection lines electrically connect to each array connection line. Switches transmit the operating signals from each array connection line to the sub-rows to effect gray scale modulation.

Loading the Abstract Image... loading....

First Claim

See full text

all claims..

Related Publications

Loading Related Publications... loading....

Patent Owner(s)

Patent OwnerAddressTotal Patents
QUALCOMM MEMS TECHNOLOGIES, INC.SAN DIEGO, CA661

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chui, Clarence San Jose, CA 318 5335
Kothari, Manish Cupertino, CA 306 3769
Sampsell, Jeffrey Brian San Francisco, CA 31 877

Cited Art Landscape

Patent Info (Count) # Cites Year
 
TEXAS INSTRUMENTS INCORPORATED (127)
4,500,171 Process for plastic LCD fill hole sealing 206 1982
4,441,791 Deformable mirror light modulator 620 1982
4,482,213 Perimeter seal reinforcement holes for plastic LCDs 220 1982
4,571,603 Deformable mirror electrostatic printer 360 1984
4,566,935 Spatial light modulator and method 506 1984
4,710,732 Spatial light modulator and method 486 1984
4,596,992 Linear spatial light modulator and printer 389 1984
4,615,595 Frame addressed spatial light modulator 392 1984
4,662,746 Spatial light modulator and method 490 1985
4,856,863 Optical fiber interconnection network including spatial light modulator 280 1988
4,956,619 Spatial light modulator 576 1988
5,079,544 Standard independent digitized video system 344 1989
5,028,939 Spatial light modulator system 389 1989
4,954,789 Spatial light modulator 562 1989
5,037,173 Optical interconnection network 315 1989
5,018,256 Architecture and process for integrating DMD with control circuit substrates 298 1990
5,083,857 Multi-level deformable mirror device 529 1990
5,142,405 Bistable DMD addressing circuit and method 336 1990
5,061,049 Spatial light modulator and method 728 1990
5,192,395 Method of making a digital flexure beam accelerometer 202 1990
5,096,279 Spatial light modulator and method 505 1990
5,099,353 Architecture and process for integrating DMD with control circuit substrates 313 1991
5,226,099 Digital micromirror shutter device 363 1991
5,162,787 Apparatus and method for digitized video system utilizing a moving display surface 247 1991
5,170,156 Multi-frequency two dimensional display system 252 1991
5,192,946 Digitized color video display system 321 1991
5,214,419 Planarized true three dimensional display 255 1991
5,214,420 Spatial light modulator projection system with random polarity light 296 1991
5,206,629 Spatial light modulator and memory for digitized video display 248 1991
5,179,274 Method for controlling operation of optical systems and devices 229 1991
5,168,406 Color deformable mirror device and method for manufacture 279 1991
5,254,980 DMD display system controller 239 1991
5,563,398 Spatial light modulator scanning system 200 1991
5,233,385 White light enhanced color field sequential projection 371 1991
5,233,456 Resonant mirror and method of manufacture 301 1991
5,216,537 Architecture and process for integrating DMD with control circuit substrates 377 1992
5,331,454 Low reset voltage process for DMD 345 1992
5,296,950 Optical signal free-space conversion board 227 1992
5,231,532 Switchable resonant filter for optical radiation 242 1992
5,212,582 Electrostatically controlled beam steering device and method 344 1992
5,312,513 Methods of forming multiple phase light modulators 274 1992
5,172,262 Spatial light modulator and method 385 1992
5,305,640 Digital flexure beam accelerometer 188 1992
5,446,479 Multi-dimensional array video processor system 250 1992
5,818,095 High-yield spatial light modulator with light blocking layer 305 1992
5,272,473 Reduced-speckle display system 285 1992
5,327,286 Real time optical correlation system 272 1992
5,287,096 Variable luminosity display system 269 1992
5,325,116 Device for writing to and reading from optical storage media 253 1992
5,280,277 Field updated deformable mirror device 330 1992
5,506,597 Apparatus and method for image projection 282 1992
5,457,566 DMD scanner 240 1992
5,278,652 DMD architecture and timing for use in a pulse width modulated display system 348 1993
5,461,411 Process and architecture for digital micromirror printer 297 1993
5,323,002 Spatial light modulator based optical calibration system 274 1993
5,489,952 Method and device for multi-format television 329 1993
5,365,283 Color phase control for projection display using spatial light modulator 282 1993
5,526,172 Microminiature, monolithic, variable electrical signal processor and apparatus including same 404 1993
5,581,272 Signal generator for controlling a spatial light modulator 195 1993
5,457,493 Digital micro-mirror based image simulation system 322 1993
5,411,769 Method of producing micromechanical devices 260 1993
5,339,116 DMD architecture and timing for use in a pulse-width modulated display system 287 1993
5,526,051 Digital television system 262 1993
5,459,602 Micro-mechanical optical shutter 216 1993
5,452,024 DMD display system 419 1993
5,497,197 System and method for packaging data into video processor 231 1993
5,517,347 Direct view deformable mirror device 301 1993
5,583,688 Multi-level digital micromirror device 464 1993
5,448,314 Method and apparatus for sequential color imaging 408 1994
5,602,671 Low surface energy passivation layer for micromechanical devices 274 1994
5,606,441 Multiple phase light modulation using binary addressing 220 1994
5,444,566 Optimized electronic operation of digital micromirror devices 357 1994
5,665,997 Grated landing area to eliminate sticking of micro-mechanical devices 299 1994
5,526,688 Digital flexure beam accelerometer and method 208 1994
5,523,803 DMD architecture and timing for use in a pulse-width modulated display system 280 1994
6,061,075 Non-systolic time delay and integration printing 181 1994
5,497,172 Pulse width modulation for spatial light modulator with split reset addressing 308 1994
5,454,906 Method of providing sacrificial spacer for micro-mechanical devices 280 1994
5,499,062 Multiplexed memory timing with block reset and secondary memory 260 1994
5,548,301 Pixel control circuitry for spatial light modulator 249 1994
5,650,881 Support post architecture for micromechanical devices 260 1994
5,552,924 Micromechanical device having an improved beam 245 1994
5,610,624 Spatial light modulator with reduced possibility of an on state defect 201 1994
5,659,374 Method of repairing defective pixels 205 1994
5,612,713 Digital micro-mirror device with block data loading 69 1995
5,567,334 Method for creating a digital micromirror device using an aluminum hard mask 240 1995
6,049,317 System for imaging of light-sensitive media 250 1995
5,610,438 Micro-mechanical device with non-evaporable getter 294 1995
5,515,076 Multi-dimensional array video processor system 246 1995
6,232,936 DMD Architecture to improve horizontal resolution 211 1995
5,535,047 Active yoke hidden hinge digital micromirror device 461 1995
5,619,365 Elecronically tunable optical periodic surface filters with an alterable resonant frequency 234 1995
5,619,366 Controllable surface filter 229 1995
5,551,293 Micro-machined accelerometer array with shield plane 220 1995
5,570,135 Method and device for multi-format television 226 1995
5,589,852 Apparatus and method for image projection with pixel intensity control 275 1995
5,597,736 High-yield spatial light modulator with light blocking layer 247 1995
5,600,383 Multi-level deformable mirror device with torsion hinges placed in a layer different from the torsion beam layer 403 1995
5,608,468 Method and device for multi-format television 247 1995
5,610,625 Monolithic spatial light modulator and memory package 184 1995
5,646,768 Support posts for micro-mechanical devices 303 1995
5,745,193 DMD architecture and timing for use in a pulse-width modulated display system 220 1995
6,099,132 Manufacture method for micromechanical devices 207 1995
6,447,126 Support post architecture for micromechanical devices 326 1995
5,657,099 Color phase control for projection display using spatial light modulator 207 1995
5,654,741 Spatial light modulator display pointing device 191 1995
5,784,212 Method of making a support post for a micromechanical device 234 1996
5,771,116 Multiple bias level reset waveform for enhanced DMD control 285 1996
5,842,088 Method of calibrating a spatial light modulator printing system 256 1997
5,808,780 Non-contacting micromechanical optical switch 230 1997
5,912,758 Bipolar reset for spatial light modulators 204 1998
6,480,177 Blocked stepped address voltage for micromechanical devices 192 1998
6,028,690 Reduced micromirror mirror gaps for improved contrast ratio 288 1998
6,282,010 Anti-reflective coatings for spatial light modulators 287 1999
6,323,982 Yield superstructure for digital micromirror device 262 1999
6,295,154 Optical switching apparatus 297 1999
6,147,790 Spring-ring micromechanical device 239 1999
6,038,056 Spatial light modulator having improved contrast ratio 262 1999
6,473,274 Symmetrical microactuator structure for use in mass data storage devices, or the like 192 2000
6,549,338 Bandpass filter to reduce thermal impact of dichroic light shift 211 2000
6,552,840 Electrostatic efficiency of micromechanical devices 235 2000
6,466,358 Analog pulse width modulation cell for digital micromechanical device 213 2000
6,778,155 Display operation with inserted block clears 181 2001
6,643,069 SLM-base color projection display having multiple SLM's and multiple projection lenses 220 2001
6,775,174 Memory architecture for micromirror cell 180 2001
6,625,047 Micromechanical memory element 253 2001
6,741,503 SLM display data address mapping for four bank frame buffer 180 2002
 
QUALCOMM MEMS TECHNOLOGIES, INC. (16)
5,835,255 Visible spectrum modulator arrays 505 1994
6,040,937 Interferometric modulation 634 1996
5,986,796 Visible spectrum modulator arrays 486 1996
6,674,562 Interferometric modulation of radiation 673 1998
6,055,090 Interferometric modulation 450 1999
6,589,625 Hermetic seal and method to create the same 286 2001
6,867,896 Interferometric modulation of radiation 395 2001
6,680,792 Interferometric modulation of radiation 510 2001
6,650,455 Photonic mems and structures 505 2001
2002/0075,555 Interferometric modulation of radiation 417 2001
6,794,119 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 388 2002
6,710,908 Controlling micro-electro-mechanical cavities 344 2002
6,574,033 Microelectromechanical systems device and method for fabricating same 453 2002
6,741,377 Device having a light-absorbing mask and a method for fabricating same 282 2002
2004/0058,532 Controlling electromechanical behavior of structures within a microelectromechanical systems device 285 2002
2004/0240,032 Interferometric modulation of radiation 304 2004
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (13)
6,862,029 Color display system 195 1999
6,859,218 Electronic display devices and methods 181 2000
6,862,022 Method and system for automatically selecting a vertical refresh rate for a video display monitor 208 2001
6,632,698 Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS 272 2001
2003/0202,264 Micro-mirror device 201 2002
6,747,785 MEMS-actuated color light modulator and methods 214 2002
6,666,561 Continuously variable analog micro-mirror device 228 2002
2004/0147,056 Micro-fabricated device and method of making 190 2003
6,829,132 Charge control of micro-electromechanical device 210 2003
6,811,267 Display system with nonvisible data projection 224 2003
2005/0057,442 Adjacent display of sequential sub-images 203 2003
2005/0068,583 Organizing a digital image 177 2003
2004/0212,026 MEMS device having time-varying control 178 2004
 
CANON KABUSHIKI KAISHA (6)
4,709,995 Ferroelectric display panel and driving method therefor to achieve gray scale 225 1985
5,633,652 Method for driving optical modulation device 137 1995
6,100,872 Display control method and apparatus 180 1997
6,630,786 Light-emitting device having light-reflective layer formed with, or/and adjacent to, material that enhances device performance 191 2001
6,822,628 Methods and systems for compensating row-to-row brightness variations of a field emission display 190 2001
6,853,129 Protected substrate structure for a field emission display device 185 2003
 
XEROX CORPORATION (6)
6,160,833 Blue vertical cavity surface emitting laser 203 1998
6,180,428 Monolithic scanning light emitting devices using micromachining 185 1998
6,201,633 Micro-electromechanical based bistable color display sheets 269 1999
6,545,335 Structure and method for electrical isolation of optoelectronic integrated circuits 192 1999
6,548,908 Structure and method for planar lateral oxidation in passive devices 181 1999
6,674,090 Structure and method for planar lateral oxidation in active 167 1999
 
LUCENT TECHNOLOGIES INC. (4)
5,636,052 Direct view display based on a micromechanical modulation 306 1994
5,966,235 Micro-mechanical modulator having an improved membrane configuration 47 1997
5,943,158 Micro-mechanical, anti-reflection, switched optical modulator array and fabrication method 215 1998
6,275,326 Control arrangement for microelectromechanical devices and systems 87 1999
 
U.S. Philips Corporation (4)
4,403,248 Display device with deformable reflective medium 342 1981
4,519,676 Passive display device 242 1983
4,459,182 Method of manufacturing a display device 243 1983
4,681,403 Display device with micromechanical leaf spring switches 223 1986
 
SHARP LABORATORIES OF AMERICA, INC. (3)
6,496,122 Image display and remote control system capable of displaying two distinct images 327 1998
6,606,175 Multi-segment light-emitting diode 181 1999
6,870,581 Single panel color video projection display using reflective banded color falling-raster illumination 204 2001
 
FUJI PHOTO FILM CO., LTD. (2)
6,356,254 Array-type light modulating device and method of operating flat display unit 133 1999
6,327,071 Drive methods of array-type light modulation element and flat-panel display 257 1999
 
LOCKHEED MARTIN CORPORATION (2)
4,982,184 Electrocrystallochromic display and element 356 1989
5,124,834 Transferrable, self-supporting pellicle for elastomer light valve displays and method for making the same 253 1989
 
MASSACHUSETTS INSTITUTE OF TECHNOLOGY (2)
5,233,459 Electric display device 353 1991
5,959,763 Spatial light modulator 238 1998
 
SANDIA CORPORATION (2)
5,867,302 Bistable microelectromechanical actuator 372 1997
6,813,060 Electrical latching of microelectromechanical devices 49 2002
 
SHARP KABUSHIKI KAISHA (2)
4,859,060 Variable interferometric device and a process for the production of the same 379 1986
6,113,239 Projection display system for reflective light valves 250 1998
 
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (2)
6,741,384 Control of MEMS and light modulator arrays 220 2003
6,861,277 Method of forming MEMS device 215 2003
 
ADVANTEST CORPORATION (1)
2004/0022,044 Switch, integrated circuit device, and method of manufacturing switch 42 2003
 
ANALOG DEVICES, INC. (1)
6,788,520 Capacitive sensing scheme for digital control state detection in optical switches 45 2000
 
AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD. (1)
5,745,281 Electrostatically-driven light modulator and display 292 1996
 
BAKER, JOHN M. (1)
5,552,925 Electro-micro-mechanical shutters on transparent substrates 230 1993
 
BRITISH TELECOMMUNICATIONS PUBLIC LIMITED COMPANY (1)
2003/0004,272 Data transfer method and apparatus 56 2002
 
CASIO COMPUTER CO., LTD. (1)
5,754,160 Liquid crystal display device having a plurality of scanning methods 69 1995
 
CITIZEN FINETECH MIYOTA CO., LTD. (1)
6,507,330 DC-balanced and non-DC-balanced drive schemes for liquid crystal devices 61 2001
 
COLIBRYS SA (1)
5,078,479 Light modulation device with matrix addressing 281 1991
 
DENSO CORPORATION (1)
6,787,384 Functional device, method of manufacturing therefor and driver circuit 39 2003
 
DISCO CORPORATION (1)
6,433,917 Light modulation device and system 172 2000
 
ETALON, INC. (1)
2003/0072,070 Visible spectrum modulator arrays 275 2002
 
HEWLETT-PACKARD COMPANY (1)
6,465,355 Method of fabricating suspended microstructures 224 2001
 
HOEL, CARLTON H. (1)
5,619,061 Micromechanical microwave switching 183 1994
 
INNOLUX CORPORATION (1)
6,593,934 Automatic gamma correction system for displays 98 2000
 
INTEL CORPORATION (1)
5,598,565 Method and apparatus for screen power saving 98 1993
 
IRIDIGM DISPLAY CORPORATION (1)
2001/0003,487 VISIBLE SPECTRUM MODULATOR ARRAYS 293 1999
 
KONINKLIJKE PHILIPS ELECTRONICS N.V. (1)
6,507,331 Display device 51 2000
 
MICRON TECHNOLOGY, INC. (1)
6,304,297 Method and apparatus for manipulating display of update rate 102 1998
 
MICROSOFT CORPORATION (1)
6,501,107 Addressable fuse array for circuits and mechanical devices 52 1999
 
NEW VISUAL MEDIA GROUP, L.L.C. (1)
5,638,084 Lighting-independent color video display 217 1996
 
NOBEX CORPORATION (1)
6,600,201 Systems with high density packing of micromachines 201 2001
 
NORTHWESTERN UNIVERSITY (1)
5,638,946 Micromechanical switch with insulated switch contact 387 1996
 
ONIX MICROSYSTEMS, INC. (1)
2001/0051,014 Optical switch employing biased rotatable combdrive devices and methods 57 2001
 
Optron Systems, Inc. (1)
5,287,215 Membrane light modulation systems 174 1991
 
PACESETTER, INC. (1)
6,356,085 Method and apparatus for converting capacitance to voltage 55 2000
 
PROMOS TECHNOLOGIES INC. (1)
6,855,610 Method of forming self-aligned contact structure with locally etched gate conductive layer 191 2002
 
QINETIQ LIMITED (1)
6,762,873 Methods of driving an array of optical elements 72 2002
 
ROCKSTAR CONSORTIUM US LP (1)
5,629,790 Micromachined torsional scanner 574 1993
 
SEERTECH CORPORATION (1)
2005/0116,924 Micro-electromechanical switching backplane 57 2004
 
SEIKO EPSON CORPORATION (1)
6,429,601 Electroluminescent devices 93 2000
 
TELEFONAKTIEBOLAGET LM ERICSSON (PUBL) (1)
2002/0186,108 Micro electromechanical switches 41 2002
 
TERAVICTA TECHNOLOGIES, INC. (1)
6,787,438 Device having one or more contact structures interposed between a pair of electrodes 64 2001
 
Other [Check patent profile for assignment information] (3)
5,142,414 Electrically actuatable temporal tristimulus-color device 268 1991
6,819,469 High-resolution spatial light modulator for 3-dimensional holographic display 242 2003
2005/0001,828 Charge control of micro-electromechanical device 178 2004

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (21)
7,532,194 Driver voltage adjuster 4 2004
7,889,163 Drive method for MEMS devices 18 2005
7,843,410 Method and device for electrically programmable display 6 2005
7,345,805 Interferometric modulator array with integrated MEMS electrical switches 6 2005
7,724,993 MEMS switches with deforming membranes 2 2005
7,545,550 Systems and methods of actuating MEMS display elements 4 2005
7,446,927 MEMS switch with set and latch electrodes 6 2005
8,174,469 Dynamic driver IC and display panel configuration 0 2006
7,724,417 MEMS switches with deforming membranes 0 2006
7,556,981 Switches for shorting during MEMS etch release 1 2006
8,022,896 ESD protection for MEMS display panels 0 2007
7,859,739 Interferometric modulator array with integrated MEMS electrical switches 0 2008
7,977,931 Family of current/power-efficient high voltage linear regulator circuit architectures 0 2008
7,768,690 Backlight displays 8 2008
7,782,522 Encapsulation methods for interferometric modulator and MEMS devices 0 2008
7,911,677 MEMS switch with set and latch electrodes 0 2008
8,736,590 Low voltage driver scheme for interferometric modulators 0 2010
8,223,424 Interferometric modulator array with integrated MEMS electrical switches 0 2010
8,693,084 Interferometric modulator in transmission mode 0 2012
8,437,071 Interferometric modulator array with integrated MEMS electrical switches 0 2012
8,791,897 Method and system for writing data to MEMS display elements 0 2012
 
PIXTRONIX, INC. (5)
8,482,496 Circuits for controlling MEMS display apparatus on a transparent substrate 0 2007
8,519,945 Circuits for controlling display apparatus 0 2007
8,526,096 Mechanical light modulators with stressed beams 0 2009
8,519,923 Display methods and apparatus 0 2012
8,599,463 MEMS anchors 0 2012

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Sep 27, 2014
11.5 Year Payment $7400.00 $3700.00 $1850.00 Sep 27, 2018
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00