US Patent No: 7,196,837

Number of patents in Portfolio can not be more than 2000

Area array modulation and lead reduction in interferometric modulators

1 Status Updates

Stats

ALSO PUBLISHED AS: 20050231791
ATTORNEY / AGENT: (SPONSORED)
 

Importance

Loading Importance Indicators... loading....

Abstract

A light modulator is arranged as array of rows and columns of interferometric display elements. Each element is divided into sub-rows of sub-elements. Array connection lines transmit operating signals to the display elements, with one connection line corresponding to one row of display elements in the array. Sub-array connection lines electrically connect to each array connection line. Switches transmit the operating signals from each array connection line to the sub-rows to effect gray scale modulation.

Loading the Abstract Image... loading....

First Claim

Related Publications

Loading Related Publications... loading....

Patent Owner(s)

Patent OwnerAddressTotal Patents
QUALCOMM MEMS TECHNOLOGIES, INC.SAN DIEGO, CA589

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chui, Clarence San Jose, CA 269 4460
Kothari, Manish Cupertino, CA 262 2930
Sampsell, Jeffrey Brian San Francisco, CA 24 708

Cited Art

Patent Info (Count) # Cites Year
 
TEXAS INSTRUMENTS INCORPORATED (127)
4,500,171 Process for plastic LCD fill hole sealing 197 1982
4,441,791 Deformable mirror light modulator 589 1982
4,482,213 Perimeter seal reinforcement holes for plastic LCDs 208 1982
4,571,603 Deformable mirror electrostatic printer 348 1984
4,566,935 Spatial light modulator and method 477 1984
4,710,732 Spatial light modulator and method 468 1984
4,596,992 Linear spatial light modulator and printer 361 1984
4,615,595 Frame addressed spatial light modulator 377 1984
4,662,746 Spatial light modulator and method 471 1985
4,856,863 Optical fiber interconnection network including spatial light modulator 272 1988
4,956,619 Spatial light modulator 553 1988
5,079,544 Standard independent digitized video system 334 1989
5,028,939 Spatial light modulator system 369 1989
4,954,789 Spatial light modulator 525 1989
5,037,173 Optical interconnection network 302 1989
5,018,256 Architecture and process for integrating DMD with control circuit substrates 291 1990
5,083,857 Multi-level deformable mirror device 514 1990
5,142,405 Bistable DMD addressing circuit and method 321 1990
5,061,049 Spatial light modulator and method 703 1990
5,192,395 Method of making a digital flexure beam accelerometer 194 1990
5,096,279 Spatial light modulator and method 474 1990
5,099,353 Architecture and process for integrating DMD with control circuit substrates 305 1991
5,226,099 Digital micromirror shutter device 350 1991
5,162,787 Apparatus and method for digitized video system utilizing a moving display surface 240 1991
5,170,156 Multi-frequency two dimensional display system 244 1991
5,192,946 Digitized color video display system 307 1991
5,214,419 Planarized true three dimensional display 248 1991
5,214,420 Spatial light modulator projection system with random polarity light 285 1991
5,206,629 Spatial light modulator and memory for digitized video display 241 1991
5,179,274 Method for controlling operation of optical systems and devices 222 1991
5,168,406 Color deformable mirror device and method for manufacture 269 1991
5,254,980 DMD display system controller 232 1991
5,563,398 Spatial light modulator scanning system 190 1991
5,233,385 White light enhanced color field sequential projection 347 1991
5,233,456 Resonant mirror and method of manufacture 291 1991
5,216,537 Architecture and process for integrating DMD with control circuit substrates 364 1992
5,331,454 Low reset voltage process for DMD 337 1992
5,296,950 Optical signal free-space conversion board 220 1992
5,231,532 Switchable resonant filter for optical radiation 233 1992
5,212,582 Electrostatically controlled beam steering device and method 336 1992
5,312,513 Methods of forming multiple phase light modulators 261 1992
5,172,262 Spatial light modulator and method 374 1992
5,305,640 Digital flexure beam accelerometer 178 1992
5,446,479 Multi-dimensional array video processor system 243 1992
5,818,095 High-yield spatial light modulator with light blocking layer 287 1992
5,272,473 Reduced-speckle display system 265 1992
5,327,286 Real time optical correlation system 262 1992
5,287,096 Variable luminosity display system 259 1992
5,325,116 Device for writing to and reading from optical storage media 246 1992
5,280,277 Field updated deformable mirror device 310 1992
5,506,597 Apparatus and method for image projection 274 1992
5,457,566 DMD scanner 233 1992
5,278,652 DMD architecture and timing for use in a pulse width modulated display system 333 1993
5,461,411 Process and architecture for digital micromirror printer 282 1993
5,323,002 Spatial light modulator based optical calibration system 259 1993
5,489,952 Method and device for multi-format television 308 1993
5,365,283 Color phase control for projection display using spatial light modulator 272 1993
5,526,172 Microminiature, monolithic, variable electrical signal processor and apparatus including same 381 1993
5,581,272 Signal generator for controlling a spatial light modulator 186 1993
5,457,493 Digital micro-mirror based image simulation system 290 1993
5,411,769 Method of producing micromechanical devices 251 1993
5,339,116 DMD architecture and timing for use in a pulse-width modulated display system 270 1993
5,526,051 Digital television system 239 1993
5,459,602 Micro-mechanical optical shutter 209 1993
5,452,024 DMD display system 389 1993
5,497,197 System and method for packaging data into video processor 223 1993
5,517,347 Direct view deformable mirror device 283 1993
5,583,688 Multi-level digital micromirror device 441 1993
5,448,314 Method and apparatus for sequential color imaging 392 1994
5,602,671 Low surface energy passivation layer for micromechanical devices 265 1994
5,606,441 Multiple phase light modulation using binary addressing 210 1994
5,444,566 Optimized electronic operation of digital micromirror devices 345 1994
5,665,997 Grated landing area to eliminate sticking of micro-mechanical devices 284 1994
5,526,688 Digital flexure beam accelerometer and method 198 1994
5,523,803 DMD architecture and timing for use in a pulse-width modulated display system 265 1994
6,061,075 Non-systolic time delay and integration printing 174 1994
5,497,172 Pulse width modulation for spatial light modulator with split reset addressing 291 1994
5,454,906 Method of providing sacrificial spacer for micro-mechanical devices 272 1994
5,499,062 Multiplexed memory timing with block reset and secondary memory 250 1994
5,548,301 Pixel control circuitry for spatial light modulator 233 1994
5,650,881 Support post architecture for micromechanical devices 250 1994
5,552,924 Micromechanical device having an improved beam 237 1994
5,610,624 Spatial light modulator with reduced possibility of an on state defect 194 1994
5,659,374 Method of repairing defective pixels 197 1994
5,612,713 Digital micro-mirror device with block data loading 67 1995
5,567,334 Method for creating a digital micromirror device using an aluminum hard mask 230 1995
6,049,317 System for imaging of light-sensitive media 235 1995
5,610,438 Micro-mechanical device with non-evaporable getter 284 1995
5,515,076 Multi-dimensional array video processor system 239 1995
6,232,936 DMD Architecture to improve horizontal resolution 203 1995
5,535,047 Active yoke hidden hinge digital micromirror device 438 1995
5,619,365 Elecronically tunable optical periodic surface filters with an alterable resonant frequency 224 1995
5,619,366 Controllable surface filter 218 1995
5,551,293 Micro-machined accelerometer array with shield plane 208 1995
5,570,135 Method and device for multi-format television 206 1995
5,589,852 Apparatus and method for image projection with pixel intensity control 261 1995
5,597,736 High-yield spatial light modulator with light blocking layer 233 1995
5,600,383 Multi-level deformable mirror device with torsion hinges placed in a layer different from the torsion beam layer 380 1995
5,608,468 Method and device for multi-format television 231 1995
5,610,625 Monolithic spatial light modulator and memory package 176 1995
5,646,768 Support posts for micro-mechanical devices 288 1995
5,745,193 DMD architecture and timing for use in a pulse-width modulated display system 205 1995
6,099,132 Manufacture method for micromechanical devices 200 1995
6,447,126 Support post architecture for micromechanical devices 317 1995
5,657,099 Color phase control for projection display using spatial light modulator 199 1995
5,654,741 Spatial light modulator display pointing device 184 1995
5,784,212 Method of making a support post for a micromechanical device 225 1996
5,771,116 Multiple bias level reset waveform for enhanced DMD control 267 1996
5,842,088 Method of calibrating a spatial light modulator printing system 244 1997
5,808,780 Non-contacting micromechanical optical switch 222 1997
5,912,758 Bipolar reset for spatial light modulators 195 1998
6,480,177 Blocked stepped address voltage for micromechanical devices 183 1998
6,028,690 Reduced micromirror mirror gaps for improved contrast ratio 276 1998
6,282,010 Anti-reflective coatings for spatial light modulators 270 1999
6,323,982 Yield superstructure for digital micromirror device 252 1999
6,295,154 Optical switching apparatus 284 1999
6,147,790 Spring-ring micromechanical device 230 1999
6,038,056 Spatial light modulator having improved contrast ratio 252 1999
6,473,274 Symmetrical microactuator structure for use in mass data storage devices, or the like 182 2000
6,549,338 Bandpass filter to reduce thermal impact of dichroic light shift 202 2000
6,552,840 Electrostatic efficiency of micromechanical devices 228 2000
6,466,358 Analog pulse width modulation cell for digital micromechanical device 204 2000
6,778,155 Display operation with inserted block clears 172 2001
6,643,069 SLM-base color projection display having multiple SLM's and multiple projection lenses 209 2001
6,775,174 Memory architecture for micromirror cell 173 2001
6,625,047 Micromechanical memory element 238 2001
6,741,503 SLM display data address mapping for four bank frame buffer 172 2002
 
QUALCOMM MEMS TECHNOLOGIES, INC. (15)
5,835,255 Visible spectrum modulator arrays 460 1994
6,040,937 Interferometric modulation 573 1996
5,986,796 Visible spectrum modulator arrays 446 1996
6,674,562 Interferometric modulation of radiation 596 1998
6,055,090 Interferometric modulation 423 1999
6,867,896 Interferometric modulation of radiation 364 2001
6,680,792 Interferometric modulation of radiation 457 2001
6,650,455 Photonic mems and structures 455 2001
2002/0075,555 Interferometric modulation of radiation 387 2001
6,794,119 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 349 2002
6,710,908 Controlling micro-electro-mechanical cavities 307 2002
6,574,033 Microelectromechanical systems device and method for fabricating same 399 2002
6,741,377 Device having a light-absorbing mask and a method for fabricating same 250 2002
2004/0058,532 Controlling electromechanical behavior of structures within a microelectromechanical systems device 272 2002
2004/0240,032 Interferometric modulation of radiation 290 2004
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (13)
6,862,029 Color display system 187 1999
6,859,218 Electronic display devices and methods 174 2000
6,862,022 Method and system for automatically selecting a vertical refresh rate for a video display monitor 186 2001
6,632,698 Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS 257 2001
2003/0202,264 Micro-mirror device 193 2002
6,747,785 MEMS-actuated color light modulator and methods 206 2002
6,666,561 Continuously variable analog micro-mirror device 212 2002
2004/0147,056 Micro-fabricated device and method of making 179 2003
6,829,132 Charge control of micro-electromechanical device 200 2003
6,811,267 Display system with nonvisible data projection 209 2003
2005/0057,442 Adjacent display of sequential sub-images 194 2003
2005/0068,583 Organizing a digital image 169 2003
2004/0212,026 MEMS device having time-varying control 170 2004
 
CANON KABUSHIKI KAISHA (6)
4,709,995 Ferroelectric display panel and driving method therefor to achieve gray scale 218 1985
5,633,652 Method for driving optical modulation device 132 1995
6,100,872 Display control method and apparatus 172 1997
6,630,786 Light-emitting device having light-reflective layer formed with, or/and adjacent to, material that enhances device performance 181 2001
6,822,628 Methods and systems for compensating row-to-row brightness variations of a field emission display 182 2001
6,853,129 Protected substrate structure for a field emission display device 177 2003
 
XEROX CORPORATION (6)
6,160,833 Blue vertical cavity surface emitting laser 196 1998
6,180,428 Monolithic scanning light emitting devices using micromachining 178 1998
6,201,633 Micro-electromechanical based bistable color display sheets 250 1999
6,545,335 Structure and method for electrical isolation of optoelectronic integrated circuits 185 1999
6,548,908 Structure and method for planar lateral oxidation in passive devices 174 1999
6,674,090 Structure and method for planar lateral oxidation in active 159 1999
 
LUCENT TECHNOLOGIES INC. (4)
5,636,052 Direct view display based on a micromechanical modulation 290 1994
5,966,235 Micro-mechanical modulator having an improved membrane configuration 45 1997
5,943,158 Micro-mechanical, anti-reflection, switched optical modulator array and fabrication method 209 1998
6,275,326 Control arrangement for microelectromechanical devices and systems 80 1999
 
U.S. PHILIPS CORPORATION (4)
4,403,248 Display device with deformable reflective medium 322 1981
4,519,676 Passive display device 232 1983
4,459,182 Method of manufacturing a display device 232 1983
4,681,403 Display device with micromechanical leaf spring switches 213 1986
 
SHARP LABORATORIES OF AMERICA, INC. (3)
6,496,122 Image display and remote control system capable of displaying two distinct images 276 1998
6,606,175 Multi-segment light-emitting diode 174 1999
6,870,581 Single panel color video projection display using reflective banded color falling-raster illumination 194 2001
 
FUJI PHOTO FILM CO., LTD. (2)
6,356,254 Array-type light modulating device and method of operating flat display unit 125 1999
6,327,071 Drive methods of array-type light modulation element and flat-panel display 241 1999
 
LOCKHEED MARTIN CORPORATION (2)
4,982,184 Electrocrystallochromic display and element 338 1989
5,124,834 Transferrable, self-supporting pellicle for elastomer light valve displays and method for making the same 242 1989
 
MASSACHUSETTS INSTITUTE OF TECHNOLOGY (2)
5,233,459 Electric display device 332 1991
5,959,763 Spatial light modulator 219 1998
 
SANDIA CORPORATION (2)
5,867,302 Bistable microelectromechanical actuator 332 1997
6,813,060 Electrical latching of microelectromechanical devices 43 2002
 
SHARP KABUSHIKI KAISHA (2)
4,859,060 Variable interferometric device and a process for the production of the same 361 1986
6,113,239 Projection display system for reflective light valves 241 1998
 
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (2)
6,741,384 Control of MEMS and light modulator arrays 208 2003
6,861,277 Method of forming MEMS device 205 2003
 
ADVANTEST CORPORATION (1)
2004/0022,044 Switch, integrated circuit device, and method of manufacturing switch 40 2003
 
ANALOG DEVICES, INC. (1)
6,788,520 Capacitive sensing scheme for digital control state detection in optical switches 40 2000
 
AVAGO TECHNOLOGIES GENERAL IP PTE. LTD. (1)
5,745,281 Electrostatically-driven light modulator and display 271 1996
 
BAKER, JOHN M. (1)
5,552,925 Electro-micro-mechanical shutters on transparent substrates 217 1993
 
BRITISH TELECOMMUNICATIONS PUBLIC LIMITED COMPANY (1)
2003/0004,272 Data transfer method and apparatus 53 2002
 
CASIO COMPUTER CO., LTD. (1)
5,754,160 Liquid crystal display device having a plurality of scanning methods 63 1995
 
CHIMEI INNOLUX CORPORATION (1)
6,593,934 Automatic gamma correction system for displays 90 2000
 
CITIZEN FINETECH MIYOTA CO., LTD. (1)
6,507,330 DC-balanced and non-DC-balanced drive schemes for liquid crystal devices 54 2001
 
COLIBRYS SA (1)
5,078,479 Light modulation device with matrix addressing 267 1991
 
DENSO CORPORATION (1)
6,787,384 Functional device, method of manufacturing therefor and driver circuit 37 2003
 
DISCO CORPORATION (1)
6,433,917 Light modulation device and system 158 2000
 
ETALON, INC. (1)
2003/0072,070 Visible spectrum modulator arrays 262 2002
 
HEWLETT-PACKARD COMPANY (1)
6,465,355 Method of fabricating suspended microstructures 216 2001
 
HOEL, CARLTON H. (1)
5,619,061 Micromechanical microwave switching 178 1994
 
IDC, LLC (1)
6,589,625 Hermetic seal and method to create the same 256 2001
 
INTEL CORPORATION (1)
5,598,565 Method and apparatus for screen power saving 94 1993
 
IRIDIGM DISPLAY CORPORATION (1)
2001/0003,487 VISIBLE SPECTRUM MODULATOR ARRAYS 275 1999
 
KONINKLIJKE PHILIPS ELECTRONICS N.V. (1)
6,507,331 Display device 47 2000
 
MICRON TECHNOLOGY, INC. (1)
6,304,297 Method and apparatus for manipulating display of update rate 96 1998
 
MICROSOFT CORPORATION (1)
6,501,107 Addressable fuse array for circuits and mechanical devices 49 1999
 
NEW VISUAL MEDIA GROUP, L.L.C. (1)
5,638,084 Lighting-independent color video display 205 1996
 
NOBEX CORPORATION (1)
6,600,201 Systems with high density packing of micromachines 194 2001
 
NORTHEASTERN UNIVERSITY (1)
5,638,946 Micromechanical switch with insulated switch contact 358 1996
 
ONIX MICROSYSTEMS, INC. (1)
2001/0051,014 Optical switch employing biased rotatable combdrive devices and methods 51 2001
 
OPTRON SYSTEMS, INC. (1)
5,287,215 Membrane light modulation systems 167 1991
 
PACESETTER, INC. (1)
6,356,085 Method and apparatus for converting capacitance to voltage 50 2000
 
PROMOS TECHNOLOGIES INC. (1)
6,855,610 Method of forming self-aligned contact structure with locally etched gate conductive layer 184 2002
 
QINETIQ LIMITED (1)
6,762,873 Methods of driving an array of optical elements 65 2002
 
ROCKSTAR BIDCO, LP (1)
5,629,790 Micromachined torsional scanner 560 1993
 
SEERTECH CORPORATION (1)
2005/0116,924 Micro-electromechanical switching backplane 53 2004
 
SEIKO EPSON CORPORATION (1)
6,429,601 Electroluminescent devices 83 2000
 
TELEFONAKTIEBOLAGET LM ERICSSON (PUBL) (1)
2002/0186,108 Micro electromechanical switches 37 2002
 
TERAVICTA TECHNOLOGIES, INC. (1)
6,787,438 Device having one or more contact structures interposed between a pair of electrodes 57 2001
 
OTHER [CHECK PATENT PROFILE FOR ASSIGNMENT INFORMATION] (3)
5,142,414 Electrically actuatable temporal tristimulus-color device 255 1991
6,819,469 High-resolution spatial light modulator for 3-dimensional holographic display 229 2003
2005/0001,828 Charge control of micro-electromechanical device 170 2004

Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (18)
7,532,194 Driver voltage adjuster 3 2004
7,889,163 Drive method for MEMS devices 6 2005
7,843,410 Method and device for electrically programmable display 4 2005
7,345,805 Interferometric modulator array with integrated MEMS electrical switches 6 2005
7,724,993 MEMS switches with deforming membranes 0 2005
7,545,550 Systems and methods of actuating MEMS display elements 1 2005
7,446,927 MEMS switch with set and latch electrodes 5 2005
8,174,469 Dynamic driver IC and display panel configuration 0 2006
7,724,417 MEMS switches with deforming membranes 0 2006
7,556,981 Switches for shorting during MEMS etch release 1 2006
8,022,896 ESD protection for MEMS display panels 0 2007
7,859,739 Interferometric modulator array with integrated MEMS electrical switches 0 2008
7,977,931 Family of current/power-efficient high voltage linear regulator circuit architectures 0 2008
7,768,690 Backlight displays 1 2008
7,782,522 Encapsulation methods for interferometric modulator and MEMS devices 0 2008
7,911,677 MEMS switch with set and latch electrodes 0 2008
8,223,424 Interferometric modulator array with integrated MEMS electrical switches 0 2010
8,437,071 Interferometric modulator array with integrated MEMS electrical switches 0 2012

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Sep 27, 2014
11.5 Year Payment $7400.00 $3700.00 $1850.00 Sep 27, 2018
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00