US Patent No: 7,196,837

Number of patents in Portfolio can not be more than 2000

Area array modulation and lead reduction in interferometric modulators

ALSO PUBLISHED AS: 20050231791

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Abstract

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A light modulator is arranged as array of rows and columns of interferometric display elements. Each element is divided into sub-rows of sub-elements. Array connection lines transmit operating signals to the display elements, with one connection line corresponding to one row of display elements in the array. Sub-array connection lines electrically connect to each array connection line. Switches transmit the operating signals from each array connection line to the sub-rows to effect gray scale modulation.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
QUALCOMM MEMS TECHNOLOGIES, INC.SAN DIEGO, CA659

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chui, Clarence San Jose, CA 320 5533
Kothari, Manish Cupertino, CA 311 3916
Sampsell, Jeffrey Brian San Francisco, CA 31 905

Cited Art Landscape

Patent Info (Count) # Cites Year
 
TEXAS INSTRUMENTS INCORPORATED (127)
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4,441,791 Deformable mirror light modulator 630 1982
4,482,213 Perimeter seal reinforcement holes for plastic LCDs 224 1982
4,571,603 Deformable mirror electrostatic printer 366 1984
4,566,935 Spatial light modulator and method 512 1984
4,710,732 Spatial light modulator and method 490 1984
4,596,992 Linear spatial light modulator and printer 395 1984
4,615,595 Frame addressed spatial light modulator 396 1984
4,662,746 Spatial light modulator and method 495 1985
4,856,863 Optical fiber interconnection network including spatial light modulator 284 1988
4,956,619 Spatial light modulator 581 1988
5,079,544 Standard independent digitized video system 348 1989
5,028,939 Spatial light modulator system 393 1989
4,954,789 Spatial light modulator 570 1989
5,037,173 Optical interconnection network 320 1989
5,018,256 Architecture and process for integrating DMD with control circuit substrates 302 1990
5,083,857 Multi-level deformable mirror device 535 1990
5,142,405 Bistable DMD addressing circuit and method 341 1990
5,061,049 Spatial light modulator and method 735 1990
5,192,395 Method of making a digital flexure beam accelerometer 206 1990
5,096,279 Spatial light modulator and method 510 1990
5,099,353 Architecture and process for integrating DMD with control circuit substrates 317 1991
5,226,099 Digital micromirror shutter device 370 1991
5,162,787 Apparatus and method for digitized video system utilizing a moving display surface 251 1991
5,170,156 Multi-frequency two dimensional display system 256 1991
5,192,946 Digitized color video display system 326 1991
5,214,419 Planarized true three dimensional display 259 1991
5,214,420 Spatial light modulator projection system with random polarity light 300 1991
5,206,629 Spatial light modulator and memory for digitized video display 252 1991
5,179,274 Method for controlling operation of optical systems and devices 233 1991
5,168,406 Color deformable mirror device and method for manufacture 284 1991
5,254,980 DMD display system controller 243 1991
5,563,398 Spatial light modulator scanning system 205 1991
5,233,385 White light enhanced color field sequential projection 378 1991
5,233,456 Resonant mirror and method of manufacture 305 1991
5,216,537 Architecture and process for integrating DMD with control circuit substrates 382 1992
5,331,454 Low reset voltage process for DMD 350 1992
5,296,950 Optical signal free-space conversion board 231 1992
5,231,532 Switchable resonant filter for optical radiation 247 1992
5,212,582 Electrostatically controlled beam steering device and method 347 1992
5,312,513 Methods of forming multiple phase light modulators 279 1992
5,172,262 Spatial light modulator and method 389 1992
5,305,640 Digital flexure beam accelerometer 192 1992
5,446,479 Multi-dimensional array video processor system 254 1992
5,818,095 High-yield spatial light modulator with light blocking layer 311 1992
5,272,473 Reduced-speckle display system 289 1992
5,327,286 Real time optical correlation system 276 1992
5,287,096 Variable luminosity display system 273 1992
5,325,116 Device for writing to and reading from optical storage media 257 1992
5,280,277 Field updated deformable mirror device 335 1992
5,506,597 Apparatus and method for image projection 286 1992
5,457,566 DMD scanner 244 1992
5,278,652 DMD architecture and timing for use in a pulse width modulated display system 353 1993
5,461,411 Process and architecture for digital micromirror printer 302 1993
5,323,002 Spatial light modulator based optical calibration system 279 1993
5,489,952 Method and device for multi-format television 334 1993
5,365,283 Color phase control for projection display using spatial light modulator 287 1993
5,526,172 Microminiature, monolithic, variable electrical signal processor and apparatus including same 411 1993
5,581,272 Signal generator for controlling a spatial light modulator 199 1993
5,457,493 Digital micro-mirror based image simulation system 329 1993
5,411,769 Method of producing micromechanical devices 264 1993
5,339,116 DMD architecture and timing for use in a pulse-width modulated display system 292 1993
5,526,051 Digital television system 267 1993
5,459,602 Micro-mechanical optical shutter 220 1993
5,452,024 DMD display system 424 1993
5,497,197 System and method for packaging data into video processor 235 1993
5,517,347 Direct view deformable mirror device 307 1993
5,583,688 Multi-level digital micromirror device 469 1993
5,448,314 Method and apparatus for sequential color imaging 413 1994
5,602,671 Low surface energy passivation layer for micromechanical devices 278 1994
5,606,441 Multiple phase light modulation using binary addressing 225 1994
5,444,566 Optimized electronic operation of digital micromirror devices 361 1994
5,665,997 Grated landing area to eliminate sticking of micro-mechanical devices 303 1994
5,526,688 Digital flexure beam accelerometer and method 212 1994
5,523,803 DMD architecture and timing for use in a pulse-width modulated display system 285 1994
6,061,075 Non-systolic time delay and integration printing 185 1994
5,497,172 Pulse width modulation for spatial light modulator with split reset addressing 314 1994
5,454,906 Method of providing sacrificial spacer for micro-mechanical devices 284 1994
5,499,062 Multiplexed memory timing with block reset and secondary memory 264 1994
5,548,301 Pixel control circuitry for spatial light modulator 254 1994
5,650,881 Support post architecture for micromechanical devices 264 1994
5,552,924 Micromechanical device having an improved beam 249 1994
5,610,624 Spatial light modulator with reduced possibility of an on state defect 205 1994
5,659,374 Method of repairing defective pixels 209 1994
5,612,713 Digital micro-mirror device with block data loading 71 1995
5,567,334 Method for creating a digital micromirror device using an aluminum hard mask 245 1995
6,049,317 System for imaging of light-sensitive media 258 1995
5,610,438 Micro-mechanical device with non-evaporable getter 298 1995
5,515,076 Multi-dimensional array video processor system 250 1995
6,232,936 DMD Architecture to improve horizontal resolution 215 1995
5,535,047 Active yoke hidden hinge digital micromirror device 470 1995
5,619,365 Elecronically tunable optical periodic surface filters with an alterable resonant frequency 239 1995
5,619,366 Controllable surface filter 234 1995
5,551,293 Micro-machined accelerometer array with shield plane 225 1995
5,570,135 Method and device for multi-format television 231 1995
5,589,852 Apparatus and method for image projection with pixel intensity control 279 1995
5,597,736 High-yield spatial light modulator with light blocking layer 251 1995
5,600,383 Multi-level deformable mirror device with torsion hinges placed in a layer different from the torsion beam layer 410 1995
5,608,468 Method and device for multi-format television 251 1995
5,610,625 Monolithic spatial light modulator and memory package 188 1995
5,646,768 Support posts for micro-mechanical devices 308 1995
5,745,193 DMD architecture and timing for use in a pulse-width modulated display system 225 1995
6,099,132 Manufacture method for micromechanical devices 211 1995
6,447,126 Support post architecture for micromechanical devices 330 1995
5,657,099 Color phase control for projection display using spatial light modulator 211 1995
5,654,741 Spatial light modulator display pointing device 196 1995
5,784,212 Method of making a support post for a micromechanical device 238 1996
5,771,116 Multiple bias level reset waveform for enhanced DMD control 289 1996
5,842,088 Method of calibrating a spatial light modulator printing system 261 1997
5,808,780 Non-contacting micromechanical optical switch 234 1997
5,912,758 Bipolar reset for spatial light modulators 208 1998
6,480,177 Blocked stepped address voltage for micromechanical devices 196 1998
6,028,690 Reduced micromirror mirror gaps for improved contrast ratio 293 1998
6,282,010 Anti-reflective coatings for spatial light modulators 294 1999
6,323,982 Yield superstructure for digital micromirror device 266 1999
6,295,154 Optical switching apparatus 301 1999
6,147,790 Spring-ring micromechanical device 243 1999
6,038,056 Spatial light modulator having improved contrast ratio 266 1999
6,473,274 Symmetrical microactuator structure for use in mass data storage devices, or the like 196 2000
6,549,338 Bandpass filter to reduce thermal impact of dichroic light shift 216 2000
6,552,840 Electrostatic efficiency of micromechanical devices 239 2000
6,466,358 Analog pulse width modulation cell for digital micromechanical device 218 2000
6,778,155 Display operation with inserted block clears 185 2001
6,643,069 SLM-base color projection display having multiple SLM's and multiple projection lenses 225 2001
6,775,174 Memory architecture for micromirror cell 184 2001
6,625,047 Micromechanical memory element 259 2001
6,741,503 SLM display data address mapping for four bank frame buffer 184 2002
 
QUALCOMM MEMS TECHNOLOGIES, INC. (16)
5,835,255 Visible spectrum modulator arrays 516 1994
6,040,937 Interferometric modulation 649 1996
5,986,796 Visible spectrum modulator arrays 496 1996
6,674,562 Interferometric modulation of radiation 691 1998
6,055,090 Interferometric modulation 459 1999
6,589,625 Hermetic seal and method to create the same 295 2001
6,867,896 Interferometric modulation of radiation 401 2001
6,680,792 Interferometric modulation of radiation 523 2001
6,650,455 Photonic mems and structures 519 2001
2002/0075,555 Interferometric modulation of radiation 426 2001
6,794,119 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 400 2002
6,710,908 Controlling micro-electro-mechanical cavities 353 2002
6,574,033 Microelectromechanical systems device and method for fabricating same 467 2002
6,741,377 Device having a light-absorbing mask and a method for fabricating same 293 2002
2004/0058,532 Controlling electromechanical behavior of structures within a microelectromechanical systems device 289 2002
2004/0240,032 Interferometric modulation of radiation 308 2004
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (13)
6,862,029 Color display system 199 1999
6,859,218 Electronic display devices and methods 185 2000
6,862,022 Method and system for automatically selecting a vertical refresh rate for a video display monitor 212 2001
6,632,698 Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS 277 2001
2003/0202,264 Micro-mirror device 205 2002
6,747,785 MEMS-actuated color light modulator and methods 218 2002
6,666,561 Continuously variable analog micro-mirror device 235 2002
2004/0147,056 Micro-fabricated device and method of making 194 2003
6,829,132 Charge control of micro-electromechanical device 217 2003
6,811,267 Display system with nonvisible data projection 231 2003
2005/0057,442 Adjacent display of sequential sub-images 208 2003
2005/0068,583 Organizing a digital image 181 2003
2004/0212,026 MEMS device having time-varying control 183 2004
 
CANON KABUSHIKI KAISHA (6)
4,709,995 Ferroelectric display panel and driving method therefor to achieve gray scale 227 1985
5,633,652 Method for driving optical modulation device 139 1995
6,100,872 Display control method and apparatus 183 1997
6,630,786 Light-emitting device having light-reflective layer formed with, or/and adjacent to, material that enhances device performance 196 2001
6,822,628 Methods and systems for compensating row-to-row brightness variations of a field emission display 194 2001
6,853,129 Protected substrate structure for a field emission display device 189 2003
 
XEROX CORPORATION (6)
6,160,833 Blue vertical cavity surface emitting laser 207 1998
6,180,428 Monolithic scanning light emitting devices using micromachining 189 1998
6,201,633 Micro-electromechanical based bistable color display sheets 275 1999
6,545,335 Structure and method for electrical isolation of optoelectronic integrated circuits 196 1999
6,548,908 Structure and method for planar lateral oxidation in passive devices 185 1999
6,674,090 Structure and method for planar lateral oxidation in active 170 1999
 
LUCENT TECHNOLOGIES INC. (4)
5,636,052 Direct view display based on a micromechanical modulation 311 1994
5,966,235 Micro-mechanical modulator having an improved membrane configuration 49 1997
5,943,158 Micro-mechanical, anti-reflection, switched optical modulator array and fabrication method 218 1998
6,275,326 Control arrangement for microelectromechanical devices and systems 89 1999
 
U.S. PHILIPS CORPORATION (4)
4,403,248 Display device with deformable reflective medium 348 1981
4,519,676 Passive display device 247 1983
4,459,182 Method of manufacturing a display device 248 1983
4,681,403 Display device with micromechanical leaf spring switches 229 1986
 
SHARP LABORATORIES OF AMERICA, INC. (3)
6,496,122 Image display and remote control system capable of displaying two distinct images 337 1998
6,606,175 Multi-segment light-emitting diode 185 1999
6,870,581 Single panel color video projection display using reflective banded color falling-raster illumination 209 2001
 
FUJI PHOTO FILM CO., LTD. (2)
6,356,254 Array-type light modulating device and method of operating flat display unit 135 1999
6,327,071 Drive methods of array-type light modulation element and flat-panel display 261 1999
 
LOCKHEED MARTIN CORPORATION (2)
4,982,184 Electrocrystallochromic display and element 361 1989
5,124,834 Transferrable, self-supporting pellicle for elastomer light valve displays and method for making the same 258 1989
 
MASSACHUSETTS INSTITUTE OF TECHNOLOGY (2)
5,233,459 Electric display device 358 1991
5,959,763 Spatial light modulator 241 1998
 
SANDIA CORPORATION (2)
5,867,302 Bistable microelectromechanical actuator 379 1997
6,813,060 Electrical latching of microelectromechanical devices 51 2002
 
SHARP KABUSHIKI KAISHA (2)
* 4,859,060 Variable interferometric device and a process for the production of the same 384 1986
6,113,239 Projection display system for reflective light valves 255 1998
 
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (2)
6,741,384 Control of MEMS and light modulator arrays 224 2003
6,861,277 Method of forming MEMS device 219 2003
 
ADVANTEST CORPORATION (1)
2004/0022,044 Switch, integrated circuit device, and method of manufacturing switch 44 2003
 
ANALOG DEVICES, INC. (1)
6,788,520 Capacitive sensing scheme for digital control state detection in optical switches 47 2000
 
AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD. (1)
5,745,281 Electrostatically-driven light modulator and display 299 1996
 
BAKER, JOHN M. (1)
5,552,925 Electro-micro-mechanical shutters on transparent substrates 234 1993
 
BRITISH TELECOMMUNICATIONS PUBLIC LIMITED COMPANY (1)
2003/0004,272 Data transfer method and apparatus 59 2002
 
CASIO COMPUTER CO., LTD. (1)
5,754,160 Liquid crystal display device having a plurality of scanning methods 73 1995
 
CITIZEN FINETECH MIYOTA CO., LTD. (1)
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COLIBRYS SA (1)
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DENSO CORPORATION (1)
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DISCO CORPORATION (1)
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ETALON, INC. (1)
2003/0072,070 Visible spectrum modulator arrays 279 2002
 
HEWLETT-PACKARD COMPANY (1)
6,465,355 Method of fabricating suspended microstructures 228 2001
 
HOEL, CARLTON H. (1)
5,619,061 Micromechanical microwave switching 186 1994
 
INNOLUX CORPORATION (1)
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INTEL CORPORATION (1)
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IRIDIGM DISPLAY CORPORATION (1)
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KONINKLIJKE PHILIPS ELECTRONICS N.V. (1)
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MICRON TECHNOLOGY, INC. (1)
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MICROSOFT CORPORATION (1)
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NEW VISUAL MEDIA GROUP, L.L.C. (1)
5,638,084 Lighting-independent color video display 222 1996
 
NOBEX CORPORATION (1)
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ONIX MICROSYSTEMS, INC. (1)
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Optron Systems, Inc. (1)
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PACESETTER, INC. (1)
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PROMOS TECHNOLOGIES INC. (1)
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QINETIQ LIMITED (1)
6,762,873 Methods of driving an array of optical elements 75 2002
 
ROCKSTAR CONSORTIUM US LP (1)
5,629,790 Micromachined torsional scanner 577 1993
 
SEERTECH CORPORATION (1)
2005/0116,924 Micro-electromechanical switching backplane 60 2004
 
SEIKO EPSON CORPORATION (1)
6,429,601 Electroluminescent devices 95 2000
 
TELEFONAKTIEBOLAGET LM ERICSSON (PUBL) (1)
2002/0186,108 Micro electromechanical switches 43 2002
 
TERAVICTA TECHNOLOGIES, INC. (1)
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Other [Check patent profile for assignment information] (3)
5,142,414 Electrically actuatable temporal tristimulus-color device 273 1991
6,819,469 High-resolution spatial light modulator for 3-dimensional holographic display 248 2003
2005/0001,828 Charge control of micro-electromechanical device 183 2004
* Cited By Examiner

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (21)
* 7,532,194 Driver voltage adjuster 4 2004
7,889,163 Drive method for MEMS devices 20 2005
* 7,843,410 Method and device for electrically programmable display 6 2005
7,345,805 Interferometric modulator array with integrated MEMS electrical switches 6 2005
7,724,993 MEMS switches with deforming membranes 2 2005
7,545,550 Systems and methods of actuating MEMS display elements 5 2005
7,446,927 MEMS switch with set and latch electrodes 6 2005
8,174,469 Dynamic driver IC and display panel configuration 0 2006
7,724,417 MEMS switches with deforming membranes 0 2006
7,556,981 Switches for shorting during MEMS etch release 1 2006
8,022,896 ESD protection for MEMS display panels 0 2007
7,859,739 Interferometric modulator array with integrated MEMS electrical switches 0 2008
7,977,931 Family of current/power-efficient high voltage linear regulator circuit architectures 0 2008
* 7,768,690 Backlight displays 9 2008
7,782,522 Encapsulation methods for interferometric modulator and MEMS devices 0 2008
7,911,677 MEMS switch with set and latch electrodes 0 2008
8,736,590 Low voltage driver scheme for interferometric modulators 0 2010
8,223,424 Interferometric modulator array with integrated MEMS electrical switches 0 2010
8,693,084 Interferometric modulator in transmission mode 0 2012
8,437,071 Interferometric modulator array with integrated MEMS electrical switches 0 2012
8,791,897 Method and system for writing data to MEMS display elements 0 2012
 
PIXTRONIX, INC. (5)
8,482,496 Circuits for controlling MEMS display apparatus on a transparent substrate 0 2007
8,519,945 Circuits for controlling display apparatus 0 2007
8,526,096 Mechanical light modulators with stressed beams 0 2009
8,519,923 Display methods and apparatus 0 2012
8,599,463 MEMS anchors 0 2012
* Cited By Examiner

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