Electronic design for integrated circuits based process related variations
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United States of America
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Apr 3, 2007
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N/A
app pub date -
Dec 17, 2002
filing date -
Dec 17, 2002
priority date (Note) -
Withdrawn
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Abstract
An electronic design is generated for an integrated circuit that is to be fabricated in accordance with the electronic design by a process that will impart topographically induced feature dimension variations to the integrated circuit. The generating includes adjusting the electronic design based on predictions of topographical and topographical-related feature dimension variations by a pattern-dependent model. An RC extraction tool is used in conjunction with the generating and adjusting of the electronic design. The process includes a fabrication process that will impart topographical variation to the integrated circuit and a lithography or etch process. Placement attributes for elements of the integrated circuit are determined.
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