Method and device for fabricating a release structure to facilitate bonding of mirror devices onto a substrate
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United States of America Patent
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Apr 10, 2007
Grant Date -
Dec 7, 2006
app pub date -
Jun 1, 2005
filing date -
Jun 1, 2005
priority date (Note) -
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status (Latency Note)
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Abstract
A method of fabricating a spatial light modulator. The method includes providing a first substrate having a mirror layer, the mirror layer having an upper surface and a lower surface. The method also includes forming a standoff structure from the first substrate, the standoff structure having an integrated surface coupled to the lower surface of the mirror layer and a bonding surface opposite the integrated surface. The standoff structure includes a centrally located base section extending from the integrated surface to the bonding surface along a first axis and a plurality of lateral extension arms extending from the base section along a second axis orthogonal to the first axis. The method further includes providing a second substrate having a bonding surface and a support surface, joining the bonding surface of the standoff structure to the bonding surface of the second substrate, and releasing a portion of the first substrate to form a torsion spring hinge coplanar with the mirror layer.
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