Automatic N2 purge system for 300 mm full automation fab
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United States of America Patent
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Apr 10, 2007
Grant Date -
Oct 13, 2005
app pub date -
Apr 8, 2004
filing date -
Apr 8, 2004
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Abstract
A system for manufacturing semiconductor integrated circuit (IC) devices, including an operating control system, a process intermediate station in communication with the operating control system, and a gas purge device, wherein the gas purge device is included in the process intermediate station.
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