Turbo sump for use with capacitive pressure sensor

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7204150
APP PUB NO 20060156824A1
SERIAL NO

11036775

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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The disclosed pressure sensor includes a body, a diaphragm, and a flow defining structure. The body defines an interior volume. The diaphragm divides the interior volume into a first portion and a second portion. At least a first part of the diaphragm moves in a first direction when a pressure in the first portion increases relative to a pressure in the second portion. The first part of the diaphragm moves in a second direction when the pressure in the first portion decreases relative to the pressure in the second portion. The first part of the diaphragm and at least a first part of the body are characterized by a capacitance. The capacitance changes in response to movement of the first part of diaphragm relative to the first part of the body. The flow defining structure provides a fluid flow path from the first portion of the interior volume to a position outside of the internal volume. At least part of the fluid flow path extends from a first location to a second location. The at least part of the fluid flow path is characterized by a total length and a straight line distance. The total length is the shortest distance through the path from the first location to the second location. The straight line distance is the shortest distance between the first location and the second location. The total length is at least two times greater than the straight line distance.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
MKS INSTRUMENTS, INC.WILMINGTON, MA463

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Grudzien, Chris P Haverhill, MA 9 102

Cited Art Landscape

Patent Info (Count) # Cites Year
 
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* Cited By Examiner

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
KULITE SEMICONDUCTOR PRODUCTS, INC. (2)
* 7841240 Header for a differential pressure transducer 3 2008
* 2009/0260,446 Header for a differential pressure transducer 6 2008
* Cited By Examiner

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
11.5 Year Payment $7400.00 $3700.00 $1850.00 Oct 17, 2018
Fee Large entity fee small entity fee micro entity fee
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00