Cleaning compositions and methods of use thereof

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7205265
APP PUB NO 20040067860A1
SERIAL NO

10630300

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A remover composition and method for removing resists from substrates containing nucleophilic amine and at least one solvent is described. Optionally, a chelating agent can also be included in the remover composition. The remover composition is especially suitable for removing a variety of resists from substrates at different stages in the process of manufacturing integrated circuits.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
EKC TECHNOLOGY, INC.HAYWARD, CA36

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lee, Wai Mun Fremont, CA 59 816

Cited Art Landscape

Patent Info (Count) # Cites Year
 
MINNESOTA MINING AND MANUFACTURING COMPANY (1)
4699868 Photographic tanning developer formulation 18 1986
 
WAKO PURE CHEMICAL INDUSTRIES, LTD. (1)
5290361 Surface treating cleaning method 175 1992
 
CHAMPION, RONALD E. (1)
5288332 A process for removing corrosive by-products from a circuit assembly 44 1993
 
FUJIFILM CORPORATION (1)
5043252 Developer composition for PS plates for use in making lithographic printing plate and method of plate-making 7 1990
 
Mobil Oil Corporation (1)
4980077 Method for removing alkaline sulfate scale 31 1989
 
W.R. GRACE & CO.-CONN. (2)
4350606 Composition and method for inhibiting corrosion 45 1980
5022926 Corrosion control 23 1989
 
ECOLAB USA INC. (1)
4895703 Trihydroxybenzene boiler corrosion inhibitor compositions and method 26 1988
 
HENKEL CORPORATION (1)
4737195 Activator-accelerator mixtures for alkaline paint stripper compositions 23 1986
 
MALLINCKRODT BAKER, INC. (4)
4395479 Stripping compositions and methods of stripping resists 30 1982
4428871 Stripping compositions and methods of stripping resists 44 1982
4401747 Stripping compositions and methods of stripping resists 31 1982
4403029 Stripping compositions and methods of stripping resists 37 1982
 
TOKYO OHKA KOGYO CO., LTD. (5)
5185235 Remover solution for photoresist 59 1990
5795702 Photoresist stripping liquid compositions and a method of stripping photoresists using the same 76 1996
5792274 Remover solution composition for resist and method for removing resist using the same 60 1996
6068000 Substrate treatment method 28 1997
5968848 Process for treating a lithographic substrate and a rinse solution for the treatment 43 1997
 
FUJIFILM ELECTRONIC MATERIALS U.S.A., INC. (1)
5798323 Non-corrosive stripping and cleaning composition 55 1997
 
NALCO CHEMICAL COMPANY (2)
5094814 All-volatile multi-functional oxygen and carbon dioxide corrosion control treatment for steam systems 15 1990
5091108 Method of retarding corrosion of metal surfaces in contact with boiler water systems which corrosion is caused by dissolved oxygen 16 1991
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (5)
4929301 Anisotropic etching method and etchant 24 1986
5049201 Method of inhibiting corrosion in an electronic package 19 1989
4941941 Method of anisotropically etching silicon wafers and wafer etching solution 25 1989
5091103 Photoresist stripper 67 1990
5374454 Method for conditioning halogenated polymeric materials and structures fabricated therewith 59 1993
 
GENERAL ELECTRIC COMPANY (1)
4873136 Method for preparing polymer surfaces for subsequent plating thereon, and improved metal-plated plastic articles made therefrom 36 1988
 
GRACE DEARBORN INC. (1)
4626411 Composition and method for deoxygenation 41 1985
 
AT&T IPM CORP. (1)
5407788 Photoresist stripping method 27 1993
 
USX CORPORATION (1)
4509989 Cleaning method for removing sulfur containing deposits from coke oven gas lines 16 1983
 
The Procter & Gamble Company (1)
4268406 Liquid detergent composition 60 1980
 
GENERAL ELECTRIC CAPITAL CORPORATION (1)
5015298 Composition and method for removing iron containing deposits from equipment constructed of dissimilar metals 24 1990
 
ARMOR ALL PRODUCTS CORPORATION (1)
4363741 Automotive cooling system cleaner 14 1981
 
SHIN-ETSU CHEMICAL CO., LTD. (1)
4539230 Method for preventing deposition of polymer scale and a coating agent therefor 33 1984
 
BETZ LABORATORIES, INC. (3)
4282111 Hydroquinone as an oxygen scavenger in an aqueous medium 41 1980
4289645 Hydroquinone and mu-amine compositions 43 1980
4549968 Method of utilizing improved stability oxygen scavenger compositions 29 1984
 
PHILIP A. HUNT CHEMICAL CORPORALTION (1)
4617251 Stripping composition and method of using the same 114 1985
 
CLARIANT GMBH (1)
4765844 Solvents for photoresist removal 40 1986
 
PPG INDUSTRIES OHIO, INC. (1)
5746837 Process for treating an aluminum can using a mobility enhancer 12 1997
 
GTE Products Corporation (1)
4279870 Liquid-liquid extraction process for the recovery of tungsten from low level sources 19 1980
 
EASTMAN KODAK COMPANY (1)
4482626 Photographic color developer compositions 34 1984
 
EKC TECHNOLOGY, INC. (14)
4395348 Photoresist stripping composition and method 60 1981
4824763 Triamine positive photoresist stripping composition and prebaking process 74 1987
5279771 Stripping compositions comprising hydroxylamine and alkanolamine 80 1990
5399464 Triamine positive photoresist stripping composition and post-ion implantation baking 26 1992
5334332 Cleaning compositions for removing etching residue and method of using 147 1992
5381807 Method of stripping resists from substrates using hydroxylamine and alkanolamine 51 1993
5482566 Method for removing etching residue using a hydroxylamine-containing composition 57 1994
5672577 Cleaning compositions for removing etching residue with hydroxylamine, alkanolamine, and chelating agent 37 1995
6110881 Cleaning solutions including nucleophilic amine compound having reduction and oxidation potentials 28 1996
* 6121217 Alkanolamine semiconductor process residue removal composition and process 12 1997
* 5911835 Method of removing etching residue 57 1997
* 6000411 Cleaning compositions for removing etching residue and method of using 19 1998
* 6399551 Alkanolamine semiconductor process residue removal process 7 1999
* 6276372 Process using hydroxylamine-gallic acid composition 27 2000
 
HYDROCHEM INDUSTRIAL SERVICES, INC. (2)
4276185 Methods and compositions for removing deposits containing iron sulfide from surfaces comprising basic aqueous solutions of particular chelating agents 48 1980
4861386 Enhanced cleaning procedure for copper alloy equipment 14 1988
 
ASAHI KASEI KABUSHIKI KAISHA (1)
4732887 Composite porous material, process for production and separation of metallic element 43 1985
 
AIR PRODUCTS AND CHEMICALS, INC. (1)
4770713 Stripping compositions containing an alkylamide and an alkanolamine and use thereof 67 1988
 
ENTHONE INC. (1)
4554049 Selective nickel stripping compositions and method of stripping 20 1984
 
SERA SOLAR CORPORATION (1)
4824489 Ultra-thin solar cell and method 29 1988
 
AVANTOR PERFORMANCE MATERIALS, INC. (1)
5308745 Alkaline-containing photoresist stripping compositions producing reduced metal corrosion with cross-linked or hardened resist resins 109 1992
 
MERCK PATENT GMBH (1)
4786578 Agent and method for the removal of photoresist and stripper residues from semiconductor substrates 50 1987
 
MACDERMID ACUMEN, INC. (1)
5143592 Process for preparing nonconductive substrates 23 1990
 
VERSUM MATERIALS US, LLC (1)
5419779 Stripping with aqueous composition containing hydroxylamine and an alkanolamine 69 1993
 
AZ ELECTRONIC MATERIALS USA CORP. (1)
5073622 Process for the preparation of novolak resins with low metal ion content 46 1990
 
EMT PURCHASE CORP., A CORP. OF DE (1)
4744834 Photoresist stripper comprising a pyrrolidinone, a diethylene glycol ether, a polyglycol and a quaternary ammonium hydroxide 62 1986
 
UNITED TECHNOLOGIES CORPORATION (1)
4834912 Composition for cleaning a gas turbine engine 46 1987
* Cited By Examiner

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
LASERWORT LTD (3)
8101561 Composition and method for treating semiconductor substrate surface 1 2010
* 2011/0118,165 COMPOSITION AND METHOD FOR TREATING SEMICONDUCTOR SUBSTRATE SURFACE 4 2010
8173584 Composition and method for treating semiconductor substrate surface 3 2011
 
EKC TECHNOLOGY, INC. (1)
* 2008/0004,193 Semiconductor process residue removal composition and process 1 2007
 
ADVANCED TECHNOLOGY MATERIALS, INC. (1)
* 2010/0261,632 NON-FLUORIDE CONTAINING COMPOSITION FOR THE REMOVAL OF RESIDUE FROM A MICROELECTRONIC DEVICE 29 2008
 
VERSUM MATERIALS US, LLC (1)
8889609 Cleaning formulations and method of using the cleaning formulations 0 2012
* Cited By Examiner

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