US Patent No: 7,205,265

Number of patents in Portfolio can not be more than 2000

Cleaning compositions and methods of use thereof

ALSO PUBLISHED AS: 20040067860
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Abstract

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A remover composition and method for removing resists from substrates containing nucleophilic amine and at least one solvent is described. Optionally, a chelating agent can also be included in the remover composition. The remover composition is especially suitable for removing a variety of resists from substrates at different stages in the process of manufacturing integrated circuits.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
EKC TECHNOLOGY, INC.HAYWARD, CA69

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lee, Wai Mun Fremont, CA 84 570

Cited Art Landscape

Patent Info (Count) # Cites Year
 
EKC TECHNOLOGY, INC. (14)
4,395,348 Photoresist stripping composition and method 59 1981
4,824,763 Triamine positive photoresist stripping composition and prebaking process 65 1987
5,279,771 Stripping compositions comprising hydroxylamine and alkanolamine 78 1990
5,399,464 Triamine positive photoresist stripping composition and post-ion implantation baking 26 1992
5,334,332 Cleaning compositions for removing etching residue and method of using 144 1992
5,381,807 Method of stripping resists from substrates using hydroxylamine and alkanolamine 51 1993
5,482,566 Method for removing etching residue using a hydroxylamine-containing composition 57 1994
5,672,577 Cleaning compositions for removing etching residue with hydroxylamine, alkanolamine, and chelating agent 35 1995
6,110,881 Cleaning solutions including nucleophilic amine compound having reduction and oxidation potentials 25 1996
6,121,217 Alkanolamine semiconductor process residue removal composition and process 12 1997
5,911,835 Method of removing etching residue 53 1997
6,000,411 Cleaning compositions for removing etching residue and method of using 19 1998
6,399,551 Alkanolamine semiconductor process residue removal process 7 1999
6,276,372 Process using hydroxylamine-gallic acid composition 24 2000
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (8)
4,187,140 Method for etching silicon and a residue and oxidation resistant etchant therefor 13 1978
4,238,275 Pyrocatechol-amine-water solution for the determination of defects 21 1978
4,276,186 Cleaning composition and use thereof 81 1979
4,929,301 Anisotropic etching method and etchant 24 1986
5,049,201 Method of inhibiting corrosion in an electronic package 18 1989
4,941,941 Method of anisotropically etching silicon wafers and wafer etching solution 25 1989
5,091,103 Photoresist stripper 63 1990
5,374,454 Method for conditioning halogenated polymeric materials and structures fabricated therewith 58 1993
 
TOKYO OHKA KOGYO CO., LTD. (5)
5,185,235 Remover solution for photoresist 57 1990
5,795,702 Photoresist stripping liquid compositions and a method of stripping photoresists using the same 66 1996
5,792,274 Remover solution composition for resist and method for removing resist using the same 56 1996
6,068,000 Substrate treatment method 28 1997
5,968,848 Process for treating a lithographic substrate and a rinse solution for the treatment 42 1997
 
MALLINCKRODT BAKER, INC. (4)
4,395,479 Stripping compositions and methods of stripping resists 29 1982
4,428,871 Stripping compositions and methods of stripping resists 43 1982
4,401,747 Stripping compositions and methods of stripping resists 31 1982
4,403,029 Stripping compositions and methods of stripping resists 37 1982
 
BETZ LABORATORIES, INC. (3)
4,282,111 Hydroquinone as an oxygen scavenger in an aqueous medium 41 1980
4,289,645 Hydroquinone and mu-amine compositions 43 1980
4,549,968 Method of utilizing improved stability oxygen scavenger compositions 28 1984
 
W.R. GRACE & CO.-CONN. (3)
4,278,635 Method for deoxygenation of water 47 1979
4,350,606 Composition and method for inhibiting corrosion 44 1980
5,022,926 Corrosion control 20 1989
 
AIR PRODUCTS AND CHEMICALS, INC. (2)
4,770,713 Stripping compositions containing an alkylamide and an alkanolamine and use thereof 65 1988
5,419,779 Stripping with aqueous composition containing hydroxylamine and an alkanolamine 66 1993
 
EASTMAN KODAK COMPANY (2)
4,264,716 Photographic color developer compositions 48 1979
4,482,626 Photographic color developer compositions 34 1984
 
HMC PATENTS HOLDING CO., INC. (2)
4,242,218 Phenol-free photoresist stripper 23 1976
4,221,674 Organic sulfonic acid stripping composition and method with nitrile and fluoride metal corrosion inhibitor system 33 1979
 
HYDROCHEM INDUSTRIAL SERVICES, INC. (2)
4,276,185 Methods and compositions for removing deposits containing iron sulfide from surfaces comprising basic aqueous solutions of particular chelating agents 47 1980
4,861,386 Enhanced cleaning procedure for copper alloy equipment 14 1988
 
NALCO CHEMICAL COMPANY (2)
5,094,814 All-volatile multi-functional oxygen and carbon dioxide corrosion control treatment for steam systems 15 1990
5,091,108 Method of retarding corrosion of metal surfaces in contact with boiler water systems which corrosion is caused by dissolved oxygen 16 1991
 
The Dow Chemical Company (2)
RE30714 Removal of copper containing incrustations from ferrous surfaces 19 1978
RE30796 Scale removal, ferrous metal passivation and compositions therefor 26 1978
 
Armor All Products Corporation (1)
4,363,741 Automotive cooling system cleaner 12 1981
 
ASAHI KOGAKU KOGYO KABUSHIKI KAISHA (1)
4,732,887 Composite porous material, process for production and separation of metallic element 39 1985
 
AT&T IPM CORP. (1)
5,407,788 Photoresist stripping method 27 1993
 
AVANTOR PERFORMANCE MATERIALS, INC. (1)
5,308,745 Alkaline-containing photoresist stripping compositions producing reduced metal corrosion with cross-linked or hardened resist resins 101 1992
 
AZ ELECTRONIC MATERIALS USA CORP. (1)
5,073,622 Process for the preparation of novolak resins with low metal ion content 46 1990
 
CALGON CORPORATION (1)
4,895,703 Trihydroxybenzene boiler corrosion inhibitor compositions and method 26 1988
 
CHAMPION, RONALD E. (1)
5,288,332 A process for removing corrosive by-products from a circuit assembly 44 1993
 
CLARIANT GMBH (1)
4,765,844 Solvents for photoresist removal 30 1986
 
EMT PURCHASE CORP., A CORP. OF DE (1)
4,744,834 Photoresist stripper comprising a pyrrolidinone, a diethylene glycol ether, a polyglycol and a quaternary ammonium hydroxide 58 1986
 
ENTHONE INC. (1)
4,554,049 Selective nickel stripping compositions and method of stripping 20 1984
 
FUJIFILM CORPORATION (1)
5,043,252 Developer composition for PS plates for use in making lithographic printing plate and method of plate-making 7 1990
 
FUJIFILM ELECTRONIC MATERIALS U.S.A., INC. (1)
5,798,323 Non-corrosive stripping and cleaning composition 46 1997
 
GENERAL ELECTRIC CAPITAL CORPORATION (1)
5,015,298 Composition and method for removing iron containing deposits from equipment constructed of dissimilar metals 24 1990
 
GENERAL ELECTRIC COMPANY (1)
4,873,136 Method for preparing polymer surfaces for subsequent plating thereon, and improved metal-plated plastic articles made therefrom 34 1988
 
GRACE DEARBORN INC. (1)
4,626,411 Composition and method for deoxygenation 40 1985
 
GTE Products Corporation (1)
4,279,870 Liquid-liquid extraction process for the recovery of tungsten from low level sources 19 1980
 
HENKEL CORPORATION (1)
4,737,195 Activator-accelerator mixtures for alkaline paint stripper compositions 23 1986
 
MACDERMID ACUMEN, INC. (1)
5,143,592 Process for preparing nonconductive substrates 21 1990
 
MERCK PATENT GMBH (1)
4,786,578 Agent and method for the removal of photoresist and stripper residues from semiconductor substrates 50 1987
 
Minnesota Mining and Manufacturing Company (1)
4,699,868 Photographic tanning developer formulation 17 1986
 
Mobil Oil Corporation (1)
4,980,077 Method for removing alkaline sulfate scale 29 1989
 
PHILIP A. HUNT CHEMICAL CORPORALTION (1)
4,617,251 Stripping composition and method of using the same 113 1985
 
PPG INDUSTRIES OHIO, INC. (1)
5,746,837 Process for treating an aluminum can using a mobility enhancer 10 1997
 
S.C. JOHNSON COMMERCIAL MARKETS, INC. (1)
4,284,435 Method for spray cleaning painted surfaces 38 1979
 
Sera Solar Corporation (1)
4,824,489 Ultra-thin solar cell and method 26 1988
 
SHIN-ETSU CHEMICAL CO., LTD. (1)
4,539,230 Method for preventing deposition of polymer scale and a coating agent therefor 33 1984
 
The Procter & Gamble Company (1)
4,268,406 Liquid detergent composition 58 1980
 
Tokyo Shibaura Electric Co., Ltd. (1)
4,239,661 Surface-treating agent adapted for intermediate products of a semiconductor device 72 1978
 
UNITED TECHNOLOGIES CORPORATION (1)
4,834,912 Composition for cleaning a gas turbine engine 43 1987
 
USX CORPORATION, A CORP. OF DE (1)
4,509,989 Cleaning method for removing sulfur containing deposits from coke oven gas lines 16 1983
 
WAKO PURE CHEMICAL INDUSTRIES, LTD. (1)
5,290,361 Surface treating cleaning method 174 1992

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
Other [Check patent profile for assignment information] (3)
8,101,561 Composition and method for treating semiconductor substrate surface 1 2010
8,173,584 Composition and method for treating semiconductor substrate surface 0 2011
8,889,609 Cleaning formulations and method of using the cleaning formulations 0 2012

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