US Patent No: 7,205,265
Number of patents in Portfolio can not be more than 2000
Cleaning compositions and methods of use thereof
Stats
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Apr 17, 2007
Issued date -
Jul 30, 2003
filing date -
10/630,300
serial no -
In Force
status
Importance
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Abstract
A remover composition and method for removing resists from substrates containing nucleophilic amine and at least one solvent is described. Optionally, a chelating agent can also be included in the remover composition. The remover composition is especially suitable for removing a variety of resists from substrates at different stages in the process of manufacturing integrated circuits.
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First Claim
Related Publications
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International Classification(s)
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Cited Art
| Patent Info | (Count) | # Cites | Year |
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| 4,395,348 Photoresist stripping composition and method | 58 | 1981 | |
| 4,824,763 Triamine positive photoresist stripping composition and prebaking process | 65 | 1987 | |
| 5,279,771 Stripping compositions comprising hydroxylamine and alkanolamine | 77 | 1990 | |
| 5,399,464 Triamine positive photoresist stripping composition and post-ion implantation baking | 26 | 1992 | |
| 5,334,332 Cleaning compositions for removing etching residue and method of using | 143 | 1992 | |
| 5,381,807 Method of stripping resists from substrates using hydroxylamine and alkanolamine | 50 | 1993 | |
| 5,482,566 Method for removing etching residue using a hydroxylamine-containing composition | 56 | 1994 | |
| 5,672,577 Cleaning compositions for removing etching residue with hydroxylamine, alkanolamine, and chelating agent | 34 | 1995 | |
| 6,110,881 Cleaning solutions including nucleophilic amine compound having reduction and oxidation potentials | 22 | 1996 | |
| 6,121,217 Alkanolamine semiconductor process residue removal composition and process | 11 | 1997 | |
| 5,911,835 Method of removing etching residue | 49 | 1997 | |
| 6,000,411 Cleaning compositions for removing etching residue and method of using | 18 | 1998 | |
| 6,399,551 Alkanolamine semiconductor process residue removal process | 7 | 1999 | |
| 6,276,372 Process using hydroxylamine-gallic acid composition | 21 | 2000 | |
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| 4,187,140 Method for etching silicon and a residue and oxidation resistant etchant therefor | 13 | 1978 | |
| 4,238,275 Pyrocatechol-amine-water solution for the determination of defects | 21 | 1978 | |
| 4,276,186 Cleaning composition and use thereof | 81 | 1979 | |
| 4,929,301 Anisotropic etching method and etchant | 24 | 1986 | |
| 5,049,201 Method of inhibiting corrosion in an electronic package | 18 | 1989 | |
| 4,941,941 Method of anisotropically etching silicon wafers and wafer etching solution | 25 | 1989 | |
| 5,091,103 Photoresist stripper | 61 | 1990 | |
| 5,374,454 Method for conditioning halogenated polymeric materials and structures fabricated therewith | 56 | 1993 | |
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| 5,185,235 Remover solution for photoresist | 57 | 1990 | |
| 5,795,702 Photoresist stripping liquid compositions and a method of stripping photoresists using the same | 62 | 1996 | |
| 5,792,274 Remover solution composition for resist and method for removing resist using the same | 54 | 1996 | |
| 6,068,000 Substrate treatment method | 26 | 1997 | |
| 5,968,848 Process for treating a lithographic substrate and a rinse solution for the treatment | 39 | 1997 | |
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| 4,395,479 Stripping compositions and methods of stripping resists | 28 | 1982 | |
| 4,428,871 Stripping compositions and methods of stripping resists | 43 | 1982 | |
| 4,401,747 Stripping compositions and methods of stripping resists | 30 | 1982 | |
| 4,403,029 Stripping compositions and methods of stripping resists | 37 | 1982 | |
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| 4,282,111 Hydroquinone as an oxygen scavenger in an aqueous medium | 41 | 1980 | |
| 4,289,645 Hydroquinone and mu-amine compositions | 43 | 1980 | |
| 4,549,968 Method of utilizing improved stability oxygen scavenger compositions | 28 | 1984 | |
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| 4,278,635 Method for deoxygenation of water | 47 | 1979 | |
| 4,350,606 Composition and method for inhibiting corrosion | 44 | 1980 | |
| 5,022,926 Corrosion control | 20 | 1989 | |
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| 4,770,713 Stripping compositions containing an alkylamide and an alkanolamine and use thereof | 64 | 1988 | |
| 5,419,779 Stripping with aqueous composition containing hydroxylamine and an alkanolamine | 65 | 1993 | |
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| 4,264,716 Photographic color developer compositions | 48 | 1979 | |
| 4,482,626 Photographic color developer compositions | 34 | 1984 | |
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| 4,242,218 Phenol-free photoresist stripper | 23 | 1976 | |
| 4,221,674 Organic sulfonic acid stripping composition and method with nitrile and fluoride metal corrosion inhibitor system | 32 | 1979 | |
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| 4,276,185 Methods and compositions for removing deposits containing iron sulfide from surfaces comprising basic aqueous solutions of particular chelating agents | 47 | 1980 | |
| 4,861,386 Enhanced cleaning procedure for copper alloy equipment | 14 | 1988 | |
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| 5,094,814 All-volatile multi-functional oxygen and carbon dioxide corrosion control treatment for steam systems | 15 | 1990 | |
| 5,091,108 Method of retarding corrosion of metal surfaces in contact with boiler water systems which corrosion is caused by dissolved oxygen | 16 | 1991 | |
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| RE30714 Removal of copper containing incrustations from ferrous surfaces | 18 | 1978 | |
| RE30796 Scale removal, ferrous metal passivation and compositions therefor | 25 | 1978 | |
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| 4,363,741 Automotive cooling system cleaner | 12 | 1981 | |
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| 4,732,887 Composite porous material, process for production and separation of metallic element | 35 | 1985 | |
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| 5,407,788 Photoresist stripping method | 26 | 1993 | |
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| 5,308,745 Alkaline-containing photoresist stripping compositions producing reduced metal corrosion with cross-linked or hardened resist resins | 98 | 1992 | |
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| 5,073,622 Process for the preparation of novolak resins with low metal ion content | 45 | 1990 | |
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| 4,895,703 Trihydroxybenzene boiler corrosion inhibitor compositions and method | 23 | 1988 | |
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| 5,288,332 A process for removing corrosive by-products from a circuit assembly | 39 | 1993 | |
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| 4,765,844 Solvents for photoresist removal | 30 | 1986 | |
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| 4,744,834 Photoresist stripper comprising a pyrrolidinone, a diethylene glycol ether, a polyglycol and a quaternary ammonium hydroxide | 57 | 1986 | |
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| 4,554,049 Selective nickel stripping compositions and method of stripping | 20 | 1984 | |
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| 5,043,252 Developer composition for PS plates for use in making lithographic printing plate and method of plate-making | 7 | 1990 | |
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| 5,798,323 Non-corrosive stripping and cleaning composition | 41 | 1997 | |
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| 5,015,298 Composition and method for removing iron containing deposits from equipment constructed of dissimilar metals | 24 | 1990 | |
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| 4,873,136 Method for preparing polymer surfaces for subsequent plating thereon, and improved metal-plated plastic articles made therefrom | 34 | 1988 | |
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| 4,626,411 Composition and method for deoxygenation | 40 | 1985 | |
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| 4,279,870 Liquid-liquid extraction process for the recovery of tungsten from low level sources | 19 | 1980 | |
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| 4,737,195 Activator-accelerator mixtures for alkaline paint stripper compositions | 23 | 1986 | |
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| 5,143,592 Process for preparing nonconductive substrates | 21 | 1990 | |
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| 4,786,578 Agent and method for the removal of photoresist and stripper residues from semiconductor substrates | 50 | 1987 | |
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| 4,699,868 Photographic tanning developer formulation | 17 | 1986 | |
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| 4,980,077 Method for removing alkaline sulfate scale | 28 | 1989 | |
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| 4,617,251 Stripping composition and method of using the same | 112 | 1985 | |
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| 5,746,837 Process for treating an aluminum can using a mobility enhancer | 10 | 1997 | |
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| 4,284,435 Method for spray cleaning painted surfaces | 37 | 1979 | |
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| 4,824,489 Ultra-thin solar cell and method | 26 | 1988 | |
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| 4,539,230 Method for preventing deposition of polymer scale and a coating agent therefor | 33 | 1984 | |
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| 4,268,406 Liquid detergent composition | 58 | 1980 | |
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| 4,239,661 Surface-treating agent adapted for intermediate products of a semiconductor device | 71 | 1978 | |
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| 4,834,912 Composition for cleaning a gas turbine engine | 40 | 1987 | |
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| 4,509,989 Cleaning method for removing sulfur containing deposits from coke oven gas lines | 16 | 1983 | |
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| 5,290,361 Surface treating cleaning method | 172 | 1992 | |
Patent Citation Ranking
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Oct 17, 2014 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Oct 17, 2018 |
| Fee | Large entity fee | small entity fee | micro entity fee |
|---|---|---|---|
| Surcharge - 7.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
| Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |