US Patent No: 7,205,569
Number of patents in Portfolio can not be more than 2000
Thin film transistor with microlens structures
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Apr 17, 2007
Issued date -
Jul 26, 2005
filing date -
11/189,903
serial no -
In Force
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Abstract
A thin film transistor with a microlens. A metal gate is formed on a substrate. A gate dielectric covers the metal gate. A semiconductor layer is formed on the gate dielectric. Source/drain metal layers respectively overlap ends of the top surface of the semiconductor layer such that the semiconductor layer between the source/drain metal layers is exposed. The microlens is formed on the exposed top surface of the semiconductor layer.
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First Claim
Related Publications
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International Classification(s)
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Cited Art
| Patent Info | (Count) | # Cites | Year |
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| 5,811,322 Method of making a broadband backside illuminated MESFET with collecting microlens | 10 | 1996 | |
| 6,078,070 Broadband backside illuminated MESFET with collecting microlens | 8 | 1998 | |
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| 6,744,068 Active pixel sensor with intra-pixel charge transfer | 17 | 2003 | |
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| 2003/0137,680 IMAGE PROCESSING APPARATUS, METHOD OF CONTROLLING SAME, AND IMAGE PROCESSING SYSTEM | 1998 | ||
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| 7,154,654 Transmissive spatial light modulator and method of manufacturing the same | 9 | 2004 | |
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| 7,132,694 Electro-optical device, method for fabricating the same, and electronic apparatus | 2 | 2004 | |
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| 2006/0187,379 Production method of microlens array, liquid crystal display device and production method thereof, and projector | 6 | 2006 | |
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| 6,171,885 High efficiency color filter process for semiconductor array imaging devices | 47 | 1999 | |
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| 5,574,293 Solid state imaging device using disilane | 15 | 1994 | |
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| 5,463,216 Image sensor | 12 | 1994 | |
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| 2002/0030,768 Integrated high resolution image sensor and display on an active matrix array with micro-lens | 27 | 2001 | |
Patent Citation Ranking
Maintenance Fees
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