Reflectance surface analyzer
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United States of America Patent
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Apr 17, 2007
Grant Date -
Sep 22, 2005
app pub date -
Mar 19, 2004
filing date -
Mar 19, 2004
priority date (Note) -
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Abstract
There is described an improved Surface Reflectance Instrument which achieves more complete detection of surface defects in the nature of small particles. One of the improvements is the use of an elliptical integrated cavity with internal surface mirrors, and another the use of a position sensing diode as the detector for the scattered light. Other improvements and the use of a stable laser at a particular wavelength resulting in greater detection are also described.
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