US Patent No: 7,206,443

Number of patents in Portfolio can not be more than 2000

Apparatus and methods for the inspection of objects

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Abstract

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A method for inspecting objects comprising: creating a reference image for a representative object, the reference image comprising an at least partially vectorized first representation of boundaries representing the representative object; acquiring an image of an object under inspection comprising a second representation of boundaries representing the object under inspection; and comparing a location of at least some boundaries in the second representation of boundaries to a location of corresponding boundaries in the at least partially vectorized first representation of boundaries, thereby to identify defects.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
3COM CORPORATIONPALO ALTO, CA7
ORBOTECH LTD.YAVNE58

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Duvdevani, Sharon Mazkeret Batya, IL 3 78
Gilat-Bernshtein, Tally Yavne, IL 7 127
Klingbell, Eyal Rehovot, IL 4 83
Mayo, Meir Rehovot, IL 3 78
Rippa, Shmuel Ramat Gan, IL 3 78
Smilansky, Zeev Meishar, IL 30 421

Cited Art Landscape

Patent Info (Count) # Cites Year
 
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OMRON CORPORATION (1)
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RUDOLPH TECHNOLOGIES, INC. (1)
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SONY CORPORATION OF AMERICA (1)
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Orbotech Inc. (1)
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ORBOTECH LTD. (3)
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KLA Instruments, Corporation (2)
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Narendra Ahuja (1)
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CALLAHAN CELLULAR L.L.C. (1)
* 6,036,091 Method and apparatus supporting high speed evaluation of bar code indicia 23 1997
 
THE JOHNS HOPKINS UNIVERSITY (1)
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APPLIED MATERIALS, INC. (1)
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WESTINGHOUSE ELECTRIC SYSTEMS AND LOGISTICS LIMITED (1)
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COGNEX CORPORATION (3)
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Intelligent Reasoning Systems, Inc. (1)
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LOCKHEED MARTIN CORPORATION (1)
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APPLIED MATERIALS ISRAEL, LTD. (3)
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5,586,058 Apparatus and method for inspection of a patterned object by comparison thereof to a reference 108 1992
* 5,907,628 Apparatus and method for comparing and aligning two digital representations of an image 37 1996
* Cited By Examiner

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
SHARP KABUSHIKI KAISHA (14)
7,889,932 Methods and systems for detecting regions in digital images 1 2006
8,630,498 Methods and systems for detecting pictorial regions in digital images 0 2006
* 8,437,054 Methods and systems for identifying regions of substantially uniform color in a digital image 1 2006
7,864,365 Methods and systems for segmenting a digital image into regions 6 2006
7,792,359 Methods and systems for detecting regions in digital images 1 2006
* 2007/0291,120 Methods and Systems for Identifying Regions of Substantially Uniform Color in a Digital Image 14 2006
* 2007/0291,288 Methods and Systems for Segmenting a Digital Image into Regions 7 2006
* 2007/0206,857 Methods and Systems for Detecting Pictorial Regions in Digital Images 2 2006
7,876,959 Methods and systems for identifying text in digital images 5 2006
* 2008/0056,573 Methods and Systems for Identifying Text in Digital Images 1 2006
8,368,956 Methods and systems for segmenting a digital image into regions 2 2010
8,150,166 Methods and systems for identifying text in digital images 0 2011
* 9,092,842 System for defect detection and repair 0 2011
* 2013/0034,293 SYSTEM FOR DEFECT DETECTION AND REPAIR 1 2011
 
VISTEC SEMICONDUCTOR SYSTEMS GMBH (1)
* 8,200,004 Method for inspecting a surface of a wafer with regions of different detection sensitivity 0 2008
 
TECHINSIGHTS INC. (3)
7,765,517 Method and apparatus for removing dummy features from a data structure 3 2007
* 2008/0059,920 Method and apparatus for removing dummy features from a data structure 3 2007
7,886,258 Method and apparatus for removing dummy features from a data structure 0 2010
 
HON HAI PRECISION INDUSTRY CO., LTD. (2)
* 8,417,019 Image correction system and method 0 2011
* 2012/0155,760 IMAGE CORRECTION SYSTEM AND METHOD 2 2011
 
SHARP LABORATORIES OF AMERICA, INC. (1)
* 2009/0041,344 Methods and Systems for Determining a Background Color in a Digital Image 1 2007
 
NATIONAL APPLIED RESEARCH LABORATORIES (1)
* 2013/0235,186 Apparatus and Method for Inspecting Chip Defects 0 2012
 
FUJI MACHINE MFG. CO., LTD. (1)
* 7,715,614 Method and device for producing component data 1 2005
 
EXELIS INC. (1)
* 8,731,309 Method and system for processing raster scan images 0 2013
 
LYNX GEOSYSTEMS, LLC A Colorado Limited Liability Company (1)
* 2009/0142,002 POLYGON AND POLYLINE MEASURING TOOL FOR GIS APPLICATIONS 4 2008
 
NGR Inc. (17)
* 7,660,455 Pattern inspection apparatus, pattern inspection method, and recording medium 7 2005
* 2005/0226,494 Pattern inspection apparatus, pattern inspection method, and recording medium 24 2005
7,817,844 Pattern inspection apparatus and method 17 2005
* 2005/0146,714 Pattern inspection apparatus and method 42 2005
7,796,801 Pattern inspection apparatus and method 26 2006
* 2006/0245,636 Pattern inspection apparatus and method 48 2006
7,983,471 Pattern inspection apparatus and method 4 2007
* 2008/0130,982 Pattern inspection apparatus and method 18 2007
8,422,761 Defect and critical dimension analysis systems and methods for a semiconductor lithographic process 1 2009
* 2010/0158,345 Defect And Critical Dimension Analysis Systems And Methods For A Semiconductor Lithographic Process 3 2009
8,150,140 System and method for a semiconductor lithographic process control using statistical information in defect identification 5 2010
* 2010/0215,247 System And Method For A Semiconductor Lithographic Process Control Using Statistical Information In Defect Identification 6 2010
8,045,785 Pattern inspection apparatus and method 6 2010
* 2010/0303,334 PATTERN INSPECTION APPARATUS AND METHOD 7 2010
8,285,031 Pattern inspection apparatus and method 3 2011
* 2011/0235,895 PATTERN INSPECTION APPARATUS AND METHOD 3 2011
9,189,843 Pattern inspection apparatus and method 0 2012
 
PALO ALTO RESEARCH CENTER INCORPORATED (1)
9,035,673 Method of in-process intralayer yield detection, interlayer shunt detection and correction 0 2010
 
COGNEX CORPORATION (2)
* 7,961,201 Method and apparatus for producing graphical machine vision content for distribution via a network 3 2000
* 2011/0314,385 METHOD AND APPARATUS FOR PRODUCING GRAPHICAL MACHINE VISION CONTENT FOR DISTRIBUTION VIA A NETWORK 0 2011
 
SEMICONDUCTOR INSIGHT INC. (2)
* 8,219,940 Method and apparatus for removing dummy features from a data structure 1 2005
* 2007/0011,628 Method and apparatus for removing dummy features from a data structure 18 2005
* Cited By Examiner

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