US Patent No: 7,206,443

Number of patents in Portfolio can not be more than 2000

Apparatus and methods for the inspection of objects

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Abstract

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A method for inspecting objects comprising: creating a reference image for a representative object, the reference image comprising an at least partially vectorized first representation of boundaries representing the representative object; acquiring an image of an object under inspection comprising a second representation of boundaries representing the object under inspection; and comparing a location of at least some boundaries in the second representation of boundaries to a location of corresponding boundaries in the at least partially vectorized first representation of boundaries, thereby to identify defects.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
3COM CORPORATIONPALO ALTO, CA32
ORBOTECH LTD.YAVNE128

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Duvdevani, Sharon Mazkeret Batya, IL 5 60
Gilat-Bernshtein, Tally Yavne, IL 7 98
Klingbell, Eyal Rehovot, IL 7 64
Mayo, Meir Rehovot, IL 5 60
Rippa, Shmuel Ramat Gan, IL 5 60
Smilansky, Zeev Meishar, IL 40 348

Cited Art Landscape

Patent Info (Count) # Cites Year
 
APPLIED MATERIALS ISRAEL, LTD. (3)
5,619,429 Apparatus and method for inspection of a patterned object by comparison thereof to a reference 75 1991
5,586,058 Apparatus and method for inspection of a patterned object by comparison thereof to a reference 104 1992
5,907,628 Apparatus and method for comparing and aligning two digital representations of an image 37 1996
 
COGNEX CORPORATION (3)
5,974,169 Machine vision methods for determining characteristics of an object using boundary points and bounding regions 71 1997
6,442,291 Machine vision methods and articles of manufacture for ball grid array 9 1998
6,714,679 Boundary analyzer 46 1999
 
ORBOTECH LTD. (3)
4,758,888 Method of and means for inspecting workpieces traveling along a production line 28 1987
5,774,572 Automatic visual inspection system 22 1993
5,774,573 Automatic visual inspection system 24 1995
 
KLA Instruments Corporation (2)
4,532,650 Photomask inspection apparatus and method using corner comparator defect detection algorithm 163 1983
5,578,821 Electron beam inspection system and method 220 1995
 
APPLIED MATERIALS, INC. (1)
6,366,690 Pixel based machine for patterned wafers 16 1998
 
IDENTIX INCORPORATED (1)
5,067,162 Method and apparatus for verifying identity using image correlation 231 1986
 
Intelligent Reasoning Systems, Inc. (1)
6,577,757 System and method for dynamic image recognition 15 1999
 
JOST SOLUTIONS LLC (1)
6,036,091 Method and apparatus supporting high speed evaluation of bar code indicia 22 1997
 
LOCKHEED MARTIN CORPORATION (1)
6,028,948 Surface anomaly-detection and analysis method 10 1997
 
Narendra Ahuja (1)
5,815,596 Multiscale image edge and region detection method and apparatus 19 1996
 
Nippon Seiko Kabushiki Kaisha (1)
5,048,094 Method and apparatus for checking pattern 44 1989
 
NUFLARE TECHNOLOGY, INC. (1)
4,958,374 Method of checking pattern and apparatus therefor 24 1988
 
OMRON CORPORATION (1)
5,245,671 Apparatus for inspecting printed circuit boards and the like, and method of operating same 45 1990
 
Orbotech Inc. (1)
5,495,535 Method of inspecting articles 91 1993
 
RUDOLPH TECHNOLOGIES, INC. (1)
6,487,307 System and method of optically inspecting structures on an object 27 1999
 
SONY CORPORATION OF AMERICA (1)
5,696,838 Pattern searching method using neural networks and correlation 20 1995
 
The Johns Hopkins University (1)
5,146,228 Coherent correlation addition for increasing match information in scene matching navigation systems 26 1990
 
WESTINGHOUSE ELECTRIC SYSTEMS AND LOGISTICS LIMITED (1)
4,989,082 Image processing system for comparing a test article with a master article to determine that an object is correctly located on the test article 24 1989

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
NGR INC. (8)
7,660,455 Pattern inspection apparatus, pattern inspection method, and recording medium 3 2005
7,817,844 Pattern inspection apparatus and method 13 2005
7,796,801 Pattern inspection apparatus and method 20 2006
7,983,471 Pattern inspection apparatus and method 3 2007
8,422,761 Defect and critical dimension analysis systems and methods for a semiconductor lithographic process 0 2009
8,150,140 System and method for a semiconductor lithographic process control using statistical information in defect identification 0 2010
8,045,785 Pattern inspection apparatus and method 2 2010
8,285,031 Pattern inspection apparatus and method 2 2011
 
SHARP KABUSHIKI KAISHA (8)
7,889,932 Methods and systems for detecting regions in digital images 0 2006
8,630,498 Methods and systems for detecting pictorial regions in digital images 0 2006
8,437,054 Methods and systems for identifying regions of substantially uniform color in a digital image 1 2006
7,864,365 Methods and systems for segmenting a digital image into regions 3 2006
7,792,359 Methods and systems for detecting regions in digital images 1 2006
7,876,959 Methods and systems for identifying text in digital images 3 2006
8,368,956 Methods and systems for segmenting a digital image into regions 1 2010
8,150,166 Methods and systems for identifying text in digital images 0 2011
 
SEMICONDUCTOR INSIGHTS INC. (2)
7,765,517 Method and apparatus for removing dummy features from a data structure 2 2007
7,886,258 Method and apparatus for removing dummy features from a data structure 0 2010
 
COGNEX CORPORATION (1)
7,961,201 Method and apparatus for producing graphical machine vision content for distribution via a network 2 2000
 
EXELIS INC. (1)
8,731,309 Method and system for processing raster scan images 0 2013
 
FUJI MACHINE MFG. CO., LTD. (1)
7,715,614 Method and device for producing component data 0 2005
 
HON HAI PRECISION INDUSTRY CO., LTD. (1)
8,417,019 Image correction system and method 0 2011
 
SEMICONDUCTOR INSIGHT INC. (1)
8,219,940 Method and apparatus for removing dummy features from a data structure 1 2005
 
VISTEC SEMICONDUCTOR SYSTEMS GMBH (1)
8,200,004 Method for inspecting a surface of a wafer with regions of different detection sensitivity 0 2008

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