Method and system for metrology recipe generation and review and analysis of design, simulation and metrology results
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United States of America Patent
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Apr 17, 2007
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N/A
app pub date -
Jun 10, 2004
filing date -
Jun 10, 2004
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Abstract
A method of generating a metrology recipe includes identifying regions of interest within a device layout. A coordinate list, which corresponds to the identified regions of interest, can be provided and used to create a clipped layout, which can be represented by a clipped layout data file. The clipped layout data file and corresponding coordinate list can be provided and converted into a metrology recipe for guiding one or more metrology instruments in testing a processed wafer and/or reticle. The experimental metrology results received in response to the metrology request can be linked to corresponding design data and simulation data and stored in a queriable database system.
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