Epitaxial oxide films via nitride conversion

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Apr 24, 2007
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Nov 10, 2003
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Oct 13, 2000

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The present invention relates to oxides on suitable substrates, as converted from nitride precursors.

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Patent Owner	Address
APPLIED THIN FILMS INC	ILLINOIS AMERICA ILLINOIS 215333

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C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....

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Inventor Name	Address	# of filed Patents	Total Citations
Barnett, Scott A	Evanston, IL	23	414
Kim, Ilwon	Skokie, IL	8	104
Rechner, John	Wilmette, IL	5	66
Sambasivan, Sankar	Chicago, IL	36	689

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Epitaxial oxide films via nitride conversion

Number of patents in Portfolio can not be more than 2000

United States of America Patent

10704840

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US Family Size	Non-US Coverage
Patent Longevity Expired	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
April 24, 2007	US,7208196,B2 US7208196B2	GRANTED PATENT AS SECOND PUBLICATION
May 20, 2004	US,20040096587,A1 US20040096587A1	FIRST PUBLISHED PATENT APPLICATION

PATENT NO	7208196
SERIAL NO	10704840
DOCKET NO

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10704840

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