Interferometer calibration methods and apparatus
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United States of America Patent
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May 1, 2007
Grant Date -
Nov 2, 2006
app pub date -
Jun 26, 2006
filing date -
Jul 21, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A Fabry-Perot (FP) interferometer includes substantially parallel first and second reflecting surfaces spaced apart by an optical gap between the first and second reflecting surfaces. The FP interferometer also has a mechanism for controlling the optical gap. The mechanism includes a plurality of electrostatic control plates. Each electrostatic control plate has a fixed control-plate area. Each control plate is adapted to control the optical gap by application of a control-plate voltage. The control-plate areas are related by integral ratios.
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