Deflection mechanisms in micromirror devices
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United States of America Patent
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May 8, 2007
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N/A
app pub date -
Nov 5, 2004
filing date -
Jan 10, 2003
priority date (Note) -
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Abstract
A method and apparatus for operating spatial light modulator have been disclosed herein. The spatial light modulator comprises an array of micromirror devices, each of which further comprises a reflective deflectable mirror plate attached to a deformable hinge, and an addressing electrode for addressing and deflecting the mirror plate.
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