Micromirror devices with in-plane deformable hinge

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United States of America Patent

PATENT NO 7215459
SERIAL NO

11056732

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.

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Patent Owner(s)

Patent OwnerAddress
TEXAS INSTRUMENTS INCORPORATED12500 TI BOULEVARD MS 3999 DALLAS TX 75243

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Doan, Jonathan Mountain View, CA 17 243
Dunphy, James San Jose, CA 47 508
Huibers, Andrew Palo Alto, CA 69 2174
Patel, Satyadev Sunnyvale, CA 43 670
Shi, Hongqin San Jose, CA 33 475
Simonian, Dmitri Sunnyvale, CA 29 428
Zhang, Jianglong Sunnyvale, CA 16 223

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