High throughout image for processing inspection images

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United States of America Patent

PATENT NO 7215808
APP PUB NO 20050249395A1
SERIAL NO

10860617

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Disclosed is an image processing system for analyzing images of a specimen to determine whether the specimen contains defects. The system includes a plurality of processors for receiving image data from a specimen and for analyzing one or more selected patch(es) of such image data to determine whether the specimen has a defect. The system also includes a plurality of buses for coupling the processors together, wherein the bus has the following specifications: a data rate of about 50 gigabits per second or more and an error rate less than about 10.sup.-16. In one implementation, the buses are low voltage differential signal type buses, and in another implementation, the buses are hyper transport type buses.

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Patent Owner(s)

  • KLA-TENCOR TECHNOLOGIES CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Miller, Lawrence R Los Altos, CA 31 682

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