Devices containing platinum-iridium films and methods of preparing such films and devices
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United States of America Patent
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May 15, 2007
Grant Date -
Jan 13, 2005
app pub date -
Aug 6, 2004
filing date -
Aug 31, 2000
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Abstract
Methods for forming platinum-iridium films, particularly in the manufacture of a semiconductor device, and devices (e.g., capacitors, integrated circuit devices, and memory cells) containing such films.
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