Cam reference for inspection of contour images

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United States of America Patent

PATENT NO 7218771
APP PUB NO 20030011761A1
SERIAL NO

10168713

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Abstract

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This invention discloses an electrical circuit inspection system including an optical subsystem for optically inspecting an electrical circuit and providing an inspection output identifying more than two different types of regions and an analysis subsystem for analyzing the inspection output, the analyzing including comparing the inspection output with a computer file reference identifying more than two different types of regions. A method for inspecting an electrical circuit inspection is also disclosed.

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Patent Owner(s)

Patent OwnerAddress
ORBOTECH LTDISRAEL MASAO CITY YAVNE CENTRAL DISTRICT

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gilat-Bernshtein, Tally Yavne, IL 7 203
Gutman, Zeev Kfar Mordechai, IL 9 198

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